JPS5851567A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5851567A JPS5851567A JP15016481A JP15016481A JPS5851567A JP S5851567 A JPS5851567 A JP S5851567A JP 15016481 A JP15016481 A JP 15016481A JP 15016481 A JP15016481 A JP 15016481A JP S5851567 A JPS5851567 A JP S5851567A
- Authority
- JP
- Japan
- Prior art keywords
- film
- substrate
- gate electrode
- photoresist film
- patterned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 14
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 26
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 9
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 8
- 229920005591 polysilicon Polymers 0.000 claims abstract description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 6
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 4
- 230000010354 integration Effects 0.000 abstract description 3
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 2
- 239000000377 silicon dioxide Substances 0.000 abstract description 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 238000000034 method Methods 0.000 description 13
- 238000002955 isolation Methods 0.000 description 7
- 239000007789 gas Substances 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- 238000000206 photolithography Methods 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 210000003141 lower extremity Anatomy 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 235000008331 Pinus X rigitaeda Nutrition 0.000 description 1
- 235000011613 Pinus brutia Nutrition 0.000 description 1
- 241000018646 Pinus brutia Species 0.000 description 1
- 229910005091 Si3N Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000013256 coordination polymer Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は半導体装置の製造方法の改良に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement in a method for manufacturing a semiconductor device.
従来のMO5型半導体装置の製造方法について第1図よ
り第3図までを用いて説明する−まずP型のシリコン(
Sl)基板lに周知のロコス法等の選択酸化法を用いて
所定パターンの素子間分離用二酸化シリコン(5iO2
)膜2を形成する。A conventional method for manufacturing an MO5 type semiconductor device will be explained using FIGS. 1 to 3. First, P-type silicon (
Sl) A predetermined pattern of silicon dioxide (5iO2
) forming film 2;
その後ゲート酸化1漢3を基板上に熱酸化法により形成
し丸後、該基板上に化学蒸!(CVD)決によってゲー
)電極となるポリSl膜4を形成する。After that, gate oxide 1 and 3 are formed on the substrate by thermal oxidation method, and then chemical vaporization is performed on the substrate. A poly-Sl film 4 which will become a gate electrode is formed by (CVD).
その後肢基板上にホトレジスト膜(図示せず)を塗布後
、該ホトレジスト膜を所定パターンにホトリソグラフィ
法を用いて成形した後、該バターニングせるホトレジス
ト膜をマスクとして前記ポリSl膜を所定パターンにプ
ラズマエツチングにより成形して第2図の5の如きゲー
ト電極を形成する。After coating a photoresist film (not shown) on the hindlimb substrate, the photoresist film is formed into a predetermined pattern using photolithography, and then the poly-Sl film is formed into a predetermined pattern using the photoresist film to be patterned as a mask. A gate electrode such as 5 in FIG. 2 is formed by shaping by plasma etching.
その後熱酸化法により該ポリSlのゲート電極の表面を
酸化する。Thereafter, the surface of the poly-Sl gate electrode is oxidized by thermal oxidation.
更に該基板上に前記バターニングせるゲート電極5およ
び素子間分離用5to2膜2をマスクとして燐CP’)
II子を矢印のようにイオン注入してソス領域1、およ
びドレイン領域7を形成する。Furthermore, phosphorus CP') is applied on the substrate using the gate electrode 5 and the 5to2 film 2 for isolation between elements as masks.
Sos region 1 and drain region 7 are formed by ion-implanting II atoms as shown by the arrows.
その後第3因に示すように該基板上に燐硅酸ガーyス(
PSG)膜11CVD?JilCjり形tauてから、
ソース類[6およびドレイン領域7より配線を取り出す
ための接続口9.10を窓開きする。Thereafter, as shown in the third factor, phosphosilicate gas (phosphorus silicate gas) (
PSG) Film 11CVD? Since JilCj Rigata tau,
Connection ports 9 and 10 for taking out wiring from the sources [6 and drain region 7] are opened.
ところで前述した接続口を窓開きするには該基板上に例
えばネガ型のホトレジスト膜を塗布後、該ホトレジスト
膜上に所定パターンの露光用マスクを設置して該ホトレ
ジスト膜を所定パターンに露光後、未露光部分のホトレ
ジスト膜を除去する。By the way, in order to open the aforementioned connection port, for example, a negative photoresist film is coated on the substrate, an exposure mask with a predetermined pattern is placed on the photoresist film, and the photoresist film is exposed in a predetermined pattern. Remove the unexposed portions of the photoresist film.
その後肢バターニングせるホトレジスト膜をマスクとし
て下部のPSG膜を弗化水素酸(HF )等を用いてエ
ツチングして接続口を窓開きしている。Using the photoresist film for buttering the hindlimb as a mask, the lower PSG film is etched using hydrofluoric acid (HF) or the like to open the connection port.
ところがこのような方法であると露光用マスクを設置す
る際に位置ずれを生じることがありこの位置ずれによっ
て接続口がソース領域上またはドレイン領域上に開孔さ
れず例えば該接続口がゲート電極5に接融するような不
都合が生じる。そこで、aw!続口を開孔するための寸
ahのマージンをあらかじめ設けてゲート1!極の端部
より素子間分離用5i02幌の端部Aまでの寸法を大き
くとることも試みたがこのような方法であると素子の集
積ifが低Fする欠点がある。However, with such a method, a positional shift may occur when installing the exposure mask, and due to this positional shift, the connection port is not opened above the source region or the drain region, and the connection port is not opened above the gate electrode 5. Inconveniences such as welding occur. So, aw! Gate 1 was prepared with a margin of 100 cm for opening the access hole in advance! An attempt was made to increase the dimension from the end of the pole to the end A of the element isolation 5i02 hood, but such a method has the disadvantage that the element integration if is low.
本発明は上述した欠点を除去するような半導体装置の製
造方法の虎供を目的とするものである。The object of the present invention is to provide a method for manufacturing a semiconductor device that eliminates the above-mentioned drawbacks.
かかる目的を達成するための半導体装置の製造方法は半
導体基板上に素子間分離用の二峻化Vリコン暎およびゲ
ート峻化嘆を形成する工程、該基板上にポリシリコン幌
を形成する工程、該ポリシリコン膜上にバターニングせ
るホトレジスト膜を形成する工程、前記バターニングせ
るホトレジスト膜をマスクとしてF部の不要なポリシリ
コン暎を除去して前記バターニング伸るホトレジスト膜
の巾より寸法の小さい巾のゲート電極を形成する工程、
−に該基板上に窒化シリコン膜を形成する工程、前記ゲ
ート電極上のホトレジスト膜を除去するとともに該ホト
レジスト膜りの窒化シリコン膜をも併せて除去する工程
、該ゲート電極の周辺部を熱酸化する工程、前記基板上
に残留している窒化シリコン嘆を除去する工程、該基板
に不純物原子を尋人してソースおよびドレイン領域を形
成する工程、該基板上に配線暎を形成する工程、該妃礫
嗅を所定パターンにバターニングする工程を含むことを
特徴とするものである。 。A method for manufacturing a semiconductor device to achieve such an object includes the steps of forming a double-sided V silicon layer and a gate layer for isolation between elements on a semiconductor substrate, a step of forming a polysilicon hood on the substrate, A step of forming a photoresist film that can be patterned on the polysilicon film, using the photoresist film that can be patterned as a mask to remove unnecessary polysilicon traces in the F section so that the width of the photoresist film that can be patterned is smaller than the width of the photoresist film that can be patterned. a step of forming a wide gate electrode;
- forming a silicon nitride film on the substrate; removing the photoresist film on the gate electrode and also removing the silicon nitride film on the photoresist film; thermally oxidizing the peripheral portion of the gate electrode; a step of removing silicon nitride remaining on the substrate; a step of adding impurity atoms to the substrate to form source and drain regions; a step of forming wiring holes on the substrate; This method is characterized in that it includes a step of patterning the pebble into a predetermined pattern. .
以F図面を用いて本発明の一実施例につき詳細に説明す
る。Hereinafter, one embodiment of the present invention will be described in detail using drawings F.
男4図より第12図までは本発明の半導体装置の製造方
法の工程の手順を示す断面図である。4 to 12 are cross-sectional views showing the steps of the method for manufacturing a semiconductor device of the present invention.
まず第4図に示すように例えばP型のSi基板1に例え
ば選択酸化法を用いて素子間分離用の5i02嗅2を形
成する。First, as shown in FIG. 4, a 5i02 layer 2 for isolation between elements is formed on, for example, a P-type Si substrate 1 using, for example, a selective oxidation method.
その後熱情化法によりゲート酸化11!3を形成してか
ら該基板上にグー)1[となるポリSi[4をCVD法
によって形成する。Thereafter, a gate oxide layer 11!3 is formed by a heat treatment method, and then poly-Si[4, which becomes 1[4] is formed on the substrate by a CVD method.
その後ゲート電極形成領域上のポリsI幌上に形成すべ
きゲート電極の中寸法より大きい中寸法を有するバター
ニングしたホトレジストWXliを形成する。このよう
なホトレジスト膜を形成する゛には基板上にホトレジス
ト膜を塗布後ホトリソグラフィ決を用いて形成するとよ
い。Thereafter, a patterned photoresist WXli having a medium dimension larger than the medium dimension of the gate electrode to be formed is formed on the polysI hood on the gate electrode formation region. To form such a photoresist film, it is preferable to apply the photoresist film on the substrate and then form it using photolithography.
その後第5図に示すように該バターニングしたホトレジ
スト膜をマスクとして下部の不要なポリ5ilJを四部
化炭J#(CF4 )ガスを反応ガスとして用いてスパ
ッタエツチング法で除去する。このようにすればエツチ
ングの時間を調節することで反応ガスがバターニングし
たホトレジスト膜から下部へ回り込むように入り込み、
バターニングしたホトレジスト膜11より小さい中寸法
で、ケート電囁5が形成される。Thereafter, as shown in FIG. 5, using the patterned photoresist film as a mask, the unnecessary poly 5ilJ at the bottom is removed by sputter etching using carbon tetrapartite J# (CF4) gas as a reaction gas. In this way, by adjusting the etching time, the reactive gas can enter from the buttered photoresist film to the bottom.
A Kate wire 5 is formed with a medium size smaller than the patterned photoresist film 11.
そめ後@6図に示すように該基板上に窒化シリコン@1
2をスパッタリング法にて形成する。After that, silicon nitride @1 is deposited on the substrate as shown in Figure @6.
2 is formed by a sputtering method.
その後グー)[4fi、S上のホトレジスト@llを除
去するとともにその上のSi@N4嗅12をも併せて除
去する。この状西を第7図に示す。その後第8図に示す
ように該基板を熱酸化してグー)titの周囲に分厚く
酸化14!13を形成する。その後練基板上に残留して
いるS i 3N4膜12をCF4ガスを反応ガスとし
てヌバツタエッチング沃によって除去する。このときC
F4の反応ガスでヌバツタエッチングを行うとSi3N
4@がエツチングされる速度が5iOz 模がエツチン
グされる運屋エリ大であるのでゲート電極の周囲の分厚
くつい九5i02z膜は殆んど侵されない。After that, the photoresist @ll on S is removed, and the Si@N4 resist 12 on it is also removed. This state is shown in Figure 7. Thereafter, as shown in FIG. 8, the substrate is thermally oxidized to form thick oxides 14 and 13 around the goo. Thereafter, the S i 3N4 film 12 remaining on the etching substrate is removed by a pine vine etching method using CF4 gas as a reaction gas. At this time C
When Nubatsuta etching is performed with F4 reactive gas, Si3N
Since the rate at which 4@ is etched is as fast as that at which 5iOz is etched, the thick 95i02z film around the gate electrode is hardly attacked.
その後第9図に示すように分厚< 5i02膜13が付
着したグー)@囁と素子間分離用5102膜とをマスク
として基板に矢印のようにPi子をイオン注入してソー
ス領域6、およびドレイン債M、7を形咬する。その後
、ホトリソグラフィ汲を用いて接続口を設けるためのレ
ジストパターンを゛形成し!10図に示すようにゲート
電極の周囲とソース領域およびドVイン@域の5i02
の模享の差を利用して、ソース領域およびドレイン領域
上の5i02 %だけフッ峻等によりエツチングする。Thereafter, as shown in FIG. 9, using the 5102 film for element isolation as a mask, Pi ions are implanted into the substrate in the direction of the arrow to form the source region 6 and the drain. Bond M, form 7. After that, we used photolithography to form a resist pattern to provide a connection port! As shown in Figure 10, 5i02 around the gate electrode, the source region and the doVin@ region
Taking advantage of the difference in image quality, 5i02% of the source and drain regions are etched using fluorine or the like.
これによりソースvA域上およびドレイン領域上のSi
基板表面は嘘出され、次に第11図のようにアルミニウ
ム(AI)の配線幅14を蒸着によって形成する。この
ようにすることにより前記ゲート電極の中寸法、該ゲー
ト電極の同曲に形成する5in2膜13の厚さをあらか
じめ決めておくことで素子間分離用別02膜の端部Aか
らのA/の配線幅が基板に接続する位置がおのずから決
定でき従来の方法のように接続口がゲート電極に接触す
ることも−なくなる。As a result, the Si on the source vA region and the drain region
The surface of the substrate is exposed, and then, as shown in FIG. 11, a wiring width 14 of aluminum (AI) is formed by vapor deposition. By doing this, by predetermining the medium dimension of the gate electrode and the thickness of the 5in2 film 13 formed on the same curve of the gate electrode, the A/ The position where the wiring width is connected to the substrate can be determined automatically, and the connection port does not come into contact with the gate electrode as in the conventional method.
すなわち七pファライン方式で接続口が開孔される形と
なる。また接続口を開孔するためにゲート電極と素子間
分離用5i02幌との間の寸法に°余分なマージンを収
る必饅もなくなるので形成される装置の1#@度も同上
する。In other words, the connection port is formed using a 7p line method. Furthermore, since there is no need to accommodate an extra margin in the dimension between the gate electrode and the element isolation 5i02 hood to open the connection hole, the 1#@ degree of the formed device is also the same as above.
そのt第12図に示すように前記入4配置N嫂を所定の
パターンにホトリソグラフィ失、およびデフズブエツチ
ング法を用いて成形したのちItI基板上にパッシベー
ションのPSG[15をCVD1により形成して半導体
装置とする。ここで図の14Aはパターニングされた配
*膜を示す。As shown in FIG. 12, the above-mentioned 4-arrangement N-layer is formed into a predetermined pattern by photolithography and differential etching, and then a passivated PSG [15] is formed on the ItI substrate by CVD. Semiconductor device. Here, 14A in the figure shows a patterned * film.
以E述ぺたように本発明の方法により形成される半導体
装置の集積度が向上する利点が生じる。As described below, there is an advantage that the degree of integration of a semiconductor device formed by the method of the present invention is improved.
第1図エリ第3図までは従来の半導体装1直の製d′方
沃の工程を示す断面図で、第4図より第12図までは本
発明の製造方法の工程を示す断面図である。
図においてlはSi基板、2は素子間分離用5i02幌
、3はゲート酸化膜、4はポリSi)戻、5はゲート電
極、6はソース領域、7はドレイン領域、8.15はP
SG幌、9、lOは接続口、11.16はホFレジヌ)
幌、12はS i 3N4幌、13は5if2”l、1
4.14Aは配線幅、Aは端部を示す。
第1図
第2図
第3閃
第41121
第51X21
1
第6閃
第7図
第8閏
第9図
第10図1 and 3 are cross-sectional views showing the conventional manufacturing process of a single-stage semiconductor device, and FIGS. 4 to 12 are cross-sectional views showing the steps of the manufacturing method of the present invention. be. In the figure, l is a Si substrate, 2 is a 5i02 top for isolation between elements, 3 is a gate oxide film, 4 is a poly-Si back, 5 is a gate electrode, 6 is a source region, 7 is a drain region, 8.15 is a P
SG hood, 9, 1O is connection port, 11.16 is HOF resin)
Top, 12 is S i 3N4 hood, 13 is 5if2"l, 1
4.14A is the wiring width, and A is the end. Figure 1 Figure 2 Figure 3 Flash 41121 51X21 1 Figure 6 Flash Figure 7 Figure 8 Leap Figure 9 Figure 10
Claims (1)
程、該ポリシリコン膜上にバターニングせるホトレジス
ト膜を形成する工程、前記バターニングせるホトレジス
)膜をマスクとして該ポリシリコン膜を除去して前記バ
ターニングせるホトレジスジ膜の巾より寸法の小さい中
のゲート電極を形成する工程、更に該基板上に窒化シリ
コン膜を形成する工程、前記ゲート電極上のホトレジス
)膜を除去するとともに該ホトレジスト膜上の窒化シリ
コン襖をも併せて除去する工程、該ゲート電極の周辺部
を熱酸化する工程、前記基板上に残留している窒化シリ
コン幌を除去する工程、を含むことを特徴とする半導体
装置の製造方法。A step of forming a polysilicon film on an insulating film on a semiconductor substrate, a step of forming a photoresist film to be patterned on the polysilicon film, and a step of removing the polysilicon film using the photoresist film to be patterned as a mask. forming a gate electrode having a dimension smaller than the width of the photoresist film to be patterned; further forming a silicon nitride film on the substrate; removing the photoresist film on the gate electrode; A semiconductor device characterized by comprising the steps of also removing the silicon nitride hood of the substrate, thermally oxidizing the peripheral portion of the gate electrode, and removing the silicon nitride hood remaining on the substrate. Production method.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15016481A JPS5851567A (en) | 1981-09-22 | 1981-09-22 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15016481A JPS5851567A (en) | 1981-09-22 | 1981-09-22 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5851567A true JPS5851567A (en) | 1983-03-26 |
Family
ID=15490899
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15016481A Pending JPS5851567A (en) | 1981-09-22 | 1981-09-22 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5851567A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07197430A (en) * | 1993-12-28 | 1995-08-01 | Bridgestone Corp | Fender |
-
1981
- 1981-09-22 JP JP15016481A patent/JPS5851567A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07197430A (en) * | 1993-12-28 | 1995-08-01 | Bridgestone Corp | Fender |
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