JPS5850194A - Brazing filler metal for diffusion bonding and its manufacture - Google Patents
Brazing filler metal for diffusion bonding and its manufactureInfo
- Publication number
- JPS5850194A JPS5850194A JP14872181A JP14872181A JPS5850194A JP S5850194 A JPS5850194 A JP S5850194A JP 14872181 A JP14872181 A JP 14872181A JP 14872181 A JP14872181 A JP 14872181A JP S5850194 A JPS5850194 A JP S5850194A
- Authority
- JP
- Japan
- Prior art keywords
- brazing filler
- metals
- brazing material
- brazing
- diffusion bonding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
- B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
- B23K35/0233—Sheets, foils
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Pressure Welding/Diffusion-Bonding (AREA)
- Continuous Casting (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は拡散接合用ロウ材及びその製造方法、更に詳し
くは母材間の相対位置がずれることなく極めて高精度で
母材を容器に接合することのできる拡散接合用ロウ材と
その製造方法に関する―
最近、各種機械−１部品の複雑化及びそれに伴う高精度
化への要望が高ま抄、そのため、各種部品への高度な接
合技術の開発が進められている。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a brazing material for diffusion bonding and a method for manufacturing the same, and more particularly, to a brazing material for diffusion bonding that can bond a base material to a container with extremely high precision without shifting the relative position between the base materials. Regarding brazing filler metals and their manufacturing methods - Recently, there has been an increasing demand for the complexity of parts in various machines and the resulting high precision, and for this reason, the development of advanced joining techniques for various parts is progressing.
多くの接合技術のうち、ロウ接法は、外部からは溶接に
みられるように直接施工することが不可能である内部の
接合も可能とする方法であって、近時、複雑な影状部品
の接合には広く適用されている。このｐつ接法は、接合
すべき母材の胃に、該母材よに低融点であって、一般に
は該母材と材料組成の異なるロウ材を介在させ、接合部
を所定温度に加熱して該費つ材を＊＊−流動化せしめ該
接合部に充分行きわたらぜた後、冷却して凝ＩＩ−ｔし
めるという方法である。したがって、この方法で接合さ
れた部材は、当然にもその使用濃度が接合に用いたロウ
材の融点以下であ勢、しかも接合部の機械的強度はロウ
材の強度によって規定されるという本質的な制約条件が
ある。Among the many joining techniques, brazing is a method that can also be used to join internally, which cannot be done directly from the outside like welding. It is widely applied for joining. This p-joint method involves interposing a brazing filler metal, which has a lower melting point than the base materials and generally has a different material composition than the base materials, in the stomach of the base materials to be joined, and heats the joint to a predetermined temperature. This is a method in which the waste material is fluidized and sufficiently distributed over the joint, and then cooled and solidified. Therefore, the components joined by this method are naturally reinforced at a concentration below the melting point of the brazing material used for joining, and the mechanical strength of the joint is determined by the strength of the brazing material. There are some constraints.
このような問題を解決して開発され友のが拡散接合方法
である。仁の方法は、接合すべ龜母材とその材料組成が
はば同質のロウ材（拡散接合用゛ロウ材）を用い、液相
拡散の原理を適用したものである。このよりな―つ材と
しては、例えば、Ｎｉ、Ｃｒを主成分とし、Ｂ、Ｓｌ、
Ｐ等を融点低下元素として含有するメジグラスＭＦＢ８
０（商品名）が知られている。その方法の一例を示せば
以下のとお鰺である。まず接合すべき母材の接合面にあ
わせてロウ材を切断・加工する（工１１１ ）、つ「に
該ロウ材を母材の接合面に配置する（工程２）、全体を
所定の押し薯内に設置する（工程３）、ついで全体を所
定温度の炉内に入れて四つ材を溶融する（工程４）、そ
の温度に所定時間保持し、溶融したロウ材を母材に液相
拡散せしめることによって母材を接合する（工１１５）
という一連の工程から威や立つ１のである。工程５にお
いては、ロウ材の等温凝固現象が起っている。A method developed to solve these problems is the diffusion bonding method. Jin's method uses a solder material (diffusion bonding solder material) that has the same material composition as the base material to be joined, and applies the principle of liquid phase diffusion. For example, this solid material contains Ni, Cr as main components, B, Sl,
Mejiglass MFB8 containing P etc. as a melting point lowering element
0 (product name) is known. An example of this method is the following horse mackerel. First, the brazing material is cut and processed to match the joining surface of the base materials to be joined (step 111), and then the soldering material is placed on the joining surface of the base materials (step 2), and the whole is pressed in a specified manner. (Step 3), then place the whole in a furnace at a predetermined temperature to melt the four materials (Step 4), hold at that temperature for a predetermined time, and liquid phase diffuse the molten brazing material into the base material. Joining the base materials by tightening (Step 115)
This series of processes makes it stand out from the crowd. In step 5, isothermal solidification of the brazing material occurs.
この方法によれば、ロウ材は母材へ液相拡散して等温凝
固するので、得られ先接合慕は母材と糟は同質の組成と
な抄、したがって、その耐熱性、機械的強度などは母材
に比べても遍色のないものとなる。すなわち、接合部の
材質特性はよ参優れ丸ものとなる。According to this method, the solder metal diffuses into the base material in a liquid phase and solidifies isothermally, so that the resulting solder material has the same composition as the base material, so its heat resistance, mechanical strength, etc. The color is uniform compared to the base material. In other words, the material properties of the joint are excellent and round.
しかしながら、この方法における大吉な問題点は、母材
間の接合精度を高めるために、高精度の押し璽及びその
付帯設備を必要とすることである。However, a major problem with this method is that it requires a highly accurate seal and its ancillary equipment in order to improve the joining accuracy between the base materials.
ロウ材は工程４において完全に溶融する。したがって、
母材は相互に水平又は垂直方向に遊動し得る状態となる
。ｗ合部の寸法精度を高めるためには、この遊動状態に
ある母材の動きを抑制しなければならない。置は、その
えめに用−られるからである。The brazing material is completely melted in step 4. therefore,
The base materials are allowed to move horizontally or vertically relative to each other. In order to improve the dimensional accuracy of the w joint, it is necessary to suppress the movement of the base material in this floating state. This is because the location is used for that purpose.
接合部の形状が複雑になれば、それに対応して用いる薯
も複雑とな抄、を友、接合すべ龜母材が多種異形の場合
には、それに合わせて型も個々に対応させなければなら
ない。As the shape of the joint becomes more complex, the molds used must also become more complex.If the base materials to be joined have a variety of different shapes, the molds must be made individually. .
本発明雪らは、拡散接合方法における上記のような欠点
がロウ材の溶融に基づく母材の遊動に基因するものであ
ることに着目した。しかしながら一方では溶融したロウ
材の母材への液相拡散ば、時間の経過とともに、その液
相温度を高温側に移行せしめるという等温凝固現象にも
着目し、この現象を有効に利用することによって母材の
遊動を招かな一拡散接合用ロウ材とその製造方法を開発
するに到った。The inventors of the present invention, Yuki et al., have focused on the fact that the above-mentioned drawbacks of the diffusion bonding method are due to the movement of the base material due to melting of the brazing material. However, on the other hand, we focused on the isothermal solidification phenomenon in which the liquidus temperature of the molten brazing material shifts to a higher temperature side as time passes when the liquid phase diffuses into the base material, and by making effective use of this phenomenon. We have developed a brazing material for diffusion bonding that does not cause movement of the base material, and a method for manufacturing the same.
本発明は、接合すべき母材を遊動さ姥ることがないので
押し型を用いることを不要とし、かつ、高精度で母材を
容易に接合し得る拡散接合用ロウ材とその製造方法を提
供することに目的がある。The present invention provides a brazing material for diffusion bonding and a method for manufacturing the same, which eliminates the need for a press die because the base materials to be joined do not move loosely, and which can easily join the base materials with high precision. There is a purpose in providing.
本発明のロウ材は、融点の興なる２種額の田中村の薄帯
が帯幅方向に交互に連接し先一体的構造を有し、その製
造方法は、複数個の耐熱容器のそれぞれの中で、融点の
員なる２種−のロウ材の原料を別々に溶融し夢溶融した
ロウ材のそれぞれを、該容器に設けられたノズルであっ
て、それぞれが交互に並列して配設された豪歇個のノズ
★群から、−転体の回転面に、同時に射出して冷却する
ことを特徴とする亀のである。The brazing material of the present invention has an integral structure in which the Tanakamura thin strips of type 2, which have melting points, are connected alternately in the width direction of the strips, and the manufacturing method thereof is such that each of a plurality of heat-resistant containers is In the container, two kinds of brazing materials having different melting points are separately melted, and each of the melted brazing materials is transferred to a nozzle provided in the container, which is arranged alternately in parallel. This system is characterized by the fact that a large number of nozzles are simultaneously injected onto the rotating surface of the rotating body to cool it.
第１ｍｌに、本発明のロウ材の１例を一部切欠斜視図と
して示した。図にお−て、１．１′はそれぞれ融点の異
なるロウ材（以後、ロウ材１を低融点ロウ材（融点Ｔよ
）、ロウ材１′を高融点ロウ材（融点〒２）という、）
の薄帯である。各薄帯は、図のようにその帯幅方向に沿
って、交互に複数枚連接して一体化している０図は、各
薄帯冨敏、ｔ４枚を連設して成る例であるが、本発明の
四つ材はこれに限らず、融点の興なる！種額〇薄帯が交
互に帯幅方向に接合して−るものであれｄその薄帯の枚
数は何枚であってもよい。In the first ml, an example of the brazing material of the present invention is shown as a partially cutaway perspective view. In the figure, 1.1' are brazing materials with different melting points (hereinafter, brazing material 1 will be referred to as a low melting point brazing material (melting point T), and brazing material 1' will be referred to as a high melting point brazing material (melting point 〒2). )
It is a thin strip. As shown in the figure, a plurality of thin strips are alternately connected and integrated along the width direction of the strip. Figure 0 is an example in which each thin strip is made up of 4 strips connected in a row. The four materials of the present invention are not limited to this, but have a melting point! The number of thin strips may be any number, even if the thin strips are alternately joined in the width direction of the strip.
本発明のロウ材は、次のようにして拡散接合に供される
。すなわち、接合すぺ自母材の接合面の間に、とのロウ
材を介在させ、全体を例えｄ真空ネットプレス中に挿入
して母材間に圧力を印加して、該ロウ材を接合面の間に
固定する。The brazing material of the present invention is used for diffusion bonding as follows. That is, the brazing material is interposed between the joint surfaces of the base materials to be joined, and the entire body is inserted into a vacuum net press, for example, and pressure is applied between the base materials to join the brazing materials. fixed between the surfaces.
ついで、接合部をＴ１よ抄高く、かつ、Ｔ２よ多低い濃
度に加熱して該温度に所定時間保持する。ロウ材ｌは溶
融するがロウ材１′は熔融せず固相状態を維持する。溶
融したロウ材ｌは、時間のｌ過とともに母材へ液相拡散
し、その結果、等温凝固してその液相温度（Ｔ３）が上
昇する。Next, the bonded portion is heated to a concentration higher than T1 and lower than T2, and maintained at this temperature for a predetermined time. The brazing material 1 is melted, but the brazing material 1' is not melted and remains in a solid state. The molten brazing filler metal 1 diffuses into the base material as a liquid phase over time, and as a result, it solidifies isothermally and its liquidus temperature (T3) increases.
Ｔ３がＴ２よ抄も充分大きくなった時点で、接合部をＴ
２より高＜、フつＴ、よ抄紙一温度に加熱して該温度で
所定時間保持する。ロウ材ｌ′は溶融するが、液相拡散
しているロウ材１ ｔ！ ’ｒ３ｉＩＴｊ、よ抄高−た
め溶融せず同相状態にある。溶融したロウ材１′は時間
の経過とと−に、母材へ液相拡散して等温凝固する。When T3 is larger than T2, the joint is
The paper is heated to a temperature higher than 2 and held at that temperature for a predetermined period of time. The brazing material l' melts, but the brazing material 1t is diffused in the liquid phase! 'r3iITj, because of the high concentration, it does not melt and is in the same phase state. As time passes, the molten brazing material 1' diffuses into the base metal in a liquid phase and solidifies isothermally.
本発明のロウ材を用−て母材を拡散接合すれば、上記の
説明であきらかなように、接合時にあっては、ロウ材１
及びロウ材１′のりずれかは固相状態にあり真書が同時
に溶融することがなφので、母材の遊動するととがない
。したがって、押し櫂を用いるこさなく、母材をセット
した時と同一の状態でそのｔま接合することがで龜る。When the base materials are diffusion bonded using the brazing material of the present invention, as is clear from the above explanation, the brazing material 1
Since both the brazing material 1' and the brazing material 1' are in a solid state and the original material is not melted at the same time, there is no problem with the movement of the base material. Therefore, it is possible to join the base materials to that point in the same state as when they were set, without using a push paddle.
したがって、その接合の精度は自ずから高まる。Therefore, the accuracy of the joining increases naturally.
本発明のロウ材は次のようにして製造することがで龜る
＊＠２ＷＩは、本発明ｐつ材を調造するための装置の１
例を示す概念的模式図で、１１．１１’は憫えは石英ガ
ラスのような耐熱材料から成る容器で、その中には融点
の異なるロウ材の原料がそれぞれ別々に収容されている
。容＠１１．１１’には高周波加熱コイルのような加熱
手段１！が周設され、験手段を作動して該原料が溶融さ
れる。１３ 、１３’はそれぞれ溶融して−る一点の異
なるロウ材である。The brazing material of the present invention can be manufactured as follows.
In the conceptual diagram showing an example, 11.11' is a container made of a heat-resistant material such as quartz glass, and raw materials for brazing fillers having different melting points are individually housed in the container. Volume @ 11. 11' has a heating means such as a high frequency heating coil 1! is provided around the vessel, and the raw material is melted by activating the test means. 13 and 13' are different melted brazing materials.
容器１１．１１’の底部には、複数本（回では各３本）
のノズル１４ｍ、１４ｂ、１４ａ、１４’ａ、１４’ｂ
。At the bottom of the container 11.11', there are multiple bottles (3 bottles each in each case)
Nozzles 14m, 14b, 14a, 14'a, 14'b
.
１４′Ｃが設けられている。各ノズルは、例えば園のよ
うに１４＆ 、 １４’ａ、 １４１） 、１４’ｂ
、 １４１１．１４’ｅと交Ｉ＆−釜列（図では横一線
である。）に配設される。１ｓは、容器１１．１１’か
ら゛、連像したロウ材１３ 、１３’を、それぞれ対応
したノズルに供給するえめの弁である。14'C is provided. Each nozzle is, for example, 14 & , 14'a, 141), 14'b
, 1411.14'e and the I&- kettle row (in the figure, it is a horizontal line). Reference numeral 1s denotes a valve for supplying the sequentially imaged brazing materials 13 and 13' from the containers 11 and 11' to the corresponding nozzles.
並列する番ノズルの下には、所定の距離を置−で、例え
ば鋼製ロールのような回転体１６＃配設され、矢印Ｐ方
向に回転する。溶融し丸ロウ材１３ 、１３’は、容器
１１ 、１ ｌ’の上方開口端に気奮に接続されるガス
圧入装置（図示しない）から圧入されたガスによって、
各ノズルかうａ転体１＠の回転面に射出されて急冷する
。このとき、ノズル相互間の間隔、回転体の速度、射出
量等を適宜に遷択することによって、各ノズルから射出
されえロウ材の薄片は、相互にその側面で接触し、その
ｔｔ急冷されることによって、全体として各薄帯が帯幅
方向に交互に連接した一体的なロウ材１７を連続的に製
造することができる。A rotating body 16#, such as a steel roll, for example, is disposed below the parallel nozzles at a predetermined distance, and rotates in the direction of arrow P. The molten round brazing materials 13, 13' are heated by gas injected from a gas injection device (not shown) connected to the upper open end of the container 11, 1l'.
Each nozzle injects the liquid onto the rotating surface of the a-rolling body 1 and rapidly cools it. At this time, by appropriately selecting the distance between the nozzles, the speed of the rotating body, the injection amount, etc., the thin pieces of brazing material injected from each nozzle come into contact with each other on their sides, and are rapidly cooled. By doing so, it is possible to continuously manufacture an integrated brazing material 17 in which each ribbon is alternately connected in the width direction.
なお、図では１つの容器に３本のノズルを設けた例を示
し友が、装置の態様は限定される仁とはない、要は、融
点の異なる２種類のロウ材を射出するノズル遍★互に並
列して配設されることによってのみ、本発明のロウ材の
製造が可能である。Note that the figure shows an example in which three nozzles are provided in one container, but the aspect of the device is not limited.In short, the nozzle injects two types of brazing materials with different melting points. The brazing material of the present invention can only be produced by arranging them in parallel with each other.
以下に本発明を実施例に基づいて説明する。The present invention will be explained below based on examples.
実施例
第２図に示した装置を作動して本発明のロウ材をＩＩＩ
！した。すなわち、まず、容器１１に組成＃Ｎｉ−１１
５ｊＣｒ−４８（融点１″”ｏｓｓｃ＞のロウ材、容器
１１’に組成がＮ１−）Ｃｒ−３Ｆｓ−４５８１−！Ｌ
２Ｂ（融点１４）Ｏａｒ）の費つ材を充填し、高周波加
熱コイルｌ！を作動して上記ロウ材を１３１１０Ｃまで
加熱して、全量を溶融した。EXAMPLE The apparatus shown in FIG. 2 was operated to prepare the brazing material III of the present invention.
! did. That is, first, the composition #Ni-11 is placed in the container 11.
5jCr-48 (brazing material with melting point 1""ossc>, composition in container 11' is N1-) Cr-3Fs-4581-! L
2B (melting point 14) Oar) and high frequency heating coil l! The brazing material was heated to 13110C to melt the entire amount.
つ−で、溶融ロウ材１３．１３’にガス圧をかけ、弁Ｉ
Ｓを開いて、各ノズルから、２０００ｒｐｍで回転する
銅製ロール１６の回転面に、溶融ロウ材を射出した。融
点の興なる薄帯が交互に連接し友一体的構造のロウ材の
帯１１が得られ友。Then, apply gas pressure to the molten brazing material 13 and 13', and
S was opened, and molten brazing material was injected from each nozzle onto the rotating surface of a copper roll 16 rotating at 2000 rpm. Thin strips with different melting points are connected alternately to obtain brazing material strips 11 with a monolithic structure.
厚みは３５ｓ鵬であった。The thickness was 35mm.
ついで、とのロウ材の帯をその壕ｆｉ、Ｎ１基超合壺Ｉ
Ｎ’ｌＳ＠＠ｆ）部品の闇に挾み込み、部品押え用の薯
を用いる仁となくそのまま全体にＱ、Ｓｋ＃／５ＩｌＦ
）圧力を上下方向に加えて、２刈０−５Ｔ＠ｒｒの真空
中で、壜ず１０１（Ｉ’で１時間加熱処理し、ついで１
０７０Ｃで１．５時間加熱処理した。部品間の相対位置
のずれは全く起らず、極めて高精度の接合が可能であっ
た。Next, I attached a belt of waxed wood to the trench and N1 super joint pot I.
N'lS@@f) Penetrating into the darkness of the parts, Q, Sk#/5Ilf is applied to the whole without using a potato to hold the parts down.
) Pressure was applied in the vertical direction, and the bottle 101 (I' was heated for 1 hour in a vacuum of 0-5T@rr,
Heat treatment was performed at 070C for 1.5 hours. There was no deviation in relative position between the parts, and extremely high precision joining was possible.
本、発明のロウ材は以上の説明で明ら泰なように、・押
り、Ｉｌを！＠−ることなく、極めて精度の高い拡散接
合を可能とするのでその工業的−値は大である。As is clear from the above explanation, the brazing material of this invention is pressed and Il! It has great industrial value because it enables extremely high-precision diffusion bonding without causing any damage.
第１図は本発明ロウ材の１例の一部切欠斜視図、８２ｍ
は本発明ロウ材の製造装置の１例を示す概念的模式図で
ある。
ｌ・・・低融点−ウ材や薄帯、１／ ＋＋＋高融点ロウ
材の薄帯、１１．１１’−・・容器、１２・ご・加熱手
段（ｉ１！肩波加熱コイル）、１３．１３’・−溶融し
たツウ材、１４１〜１４＠、１４’ａ〜１４’ ｅ−・
・ノズル、１５・・・弁、１６・・・−転体、１７一本
発明のロウ材、Ｐ・−一転方向を示す掌印。
１．１Figure 1 is a partially cutaway perspective view of an example of the brazing material of the present invention, 82m
1 is a conceptual diagram showing an example of a manufacturing apparatus for a brazing material according to the present invention. 1...Low melting point - wax material or ribbon, 1/+++ High melting point brazing material ribbon, 11.11'-...Container, 12. Heating means (i1! Shoulder wave heating coil), 13. 13'--melted tow material, 141-14@, 14'a-14' e--
・Nozzle, 15... Valve, 16... - Turning body, 17 - Brazing material of the present invention, P. - Palm mark indicating the direction of turning. 1.1
Claims (1)
に交互”に連接した一体的構造の拡散接合用ロウ材。 ２−Ｉ［Ｗｋ個の耐熱容器のそれぞれの中で、融点・の
異なる！種額のロウ材の原料を別ｋに溶融し１ 溶融したロウ材のそれぞれを、該容器に駿けられたノズ
ルであって、それぞれが交互＆：釜列して配設されたー
歇個のノズル群から、闘転体の闘転面に同時に射出して
冷却することを特徴とする拡散接合用ａつ材の製造方法
。[Claims] 1. A brazing material for diffusion bonding having an integral structure in which thin strips of brazing material of two types with different melting points are connected alternately in the width direction of the band. 2-I [Wk heat resistant In each of the containers, different types of brazing materials with different melting points are separately melted. : A method for producing an axle material for diffusion bonding, characterized by simultaneously injecting and cooling the fighting surface of a fighting body from a group of nozzles arranged in rows in a pot.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14872181A JPS5842793B2 (en) | 1981-09-22 | 1981-09-22 | Brazing material for diffusion bonding and its manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14872181A JPS5842793B2 (en) | 1981-09-22 | 1981-09-22 | Brazing material for diffusion bonding and its manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5850194A true JPS5850194A (en) | 1983-03-24 |
| JPS5842793B2 JPS5842793B2 (en) | 1983-09-21 |
Family
ID=15459111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14872181A Expired JPS5842793B2 (en) | 1981-09-22 | 1981-09-22 | Brazing material for diffusion bonding and its manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5842793B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011158449A1 (en) * | 2010-06-16 | 2011-12-22 | 株式会社日立製作所 | Connection material, semiconductor device, and method for manufacturing same |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6658894B2 (en) * | 2016-08-17 | 2020-03-04 | 三菱電機株式会社 | Method and apparatus for manufacturing plate solder |
-
1981
- 1981-09-22 JP JP14872181A patent/JPS5842793B2/en not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011158449A1 (en) * | 2010-06-16 | 2011-12-22 | 株式会社日立製作所 | Connection material, semiconductor device, and method for manufacturing same |
| JP2012000629A (en) * | 2010-06-16 | 2012-01-05 | Hitachi Ltd | Connection material, semiconductor device, and method for manufacturing same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5842793B2 (en) | 1983-09-21 |
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