JPS5846457B2 - Method for manufacturing quartz glass pipe as base material for optical fiber - Google Patents

Method for manufacturing quartz glass pipe as base material for optical fiber

Info

Publication number
JPS5846457B2
JPS5846457B2 JP54082280A JP8228079A JPS5846457B2 JP S5846457 B2 JPS5846457 B2 JP S5846457B2 JP 54082280 A JP54082280 A JP 54082280A JP 8228079 A JP8228079 A JP 8228079A JP S5846457 B2 JPS5846457 B2 JP S5846457B2
Authority
JP
Japan
Prior art keywords
medium
pipe
sintered
optical fiber
semi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54082280A
Other languages
Japanese (ja)
Other versions
JPS569232A (en
Inventor
英夫 覚前
隆夫 枝広
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Sumitomo Electric Industries Ltd
Original Assignee
Nippon Telegraph and Telephone Corp
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp, Sumitomo Electric Industries Ltd filed Critical Nippon Telegraph and Telephone Corp
Priority to JP54082280A priority Critical patent/JPS5846457B2/en
Publication of JPS569232A publication Critical patent/JPS569232A/en
Publication of JPS5846457B2 publication Critical patent/JPS5846457B2/en
Expired legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Glass Melting And Manufacturing (AREA)

Description

【発明の詳細な説明】 発明の技術分野 本発明は光フアイバ用のロッドインチューブ、光ファイ
バのクラッド層またはジャケット層としての光フアイバ
用母材となる石英ガラスパイプの製造方法に関するもの
である。DETAILED DESCRIPTION OF THE INVENTION Technical Field of the Invention The present invention relates to a method for manufacturing a rod-in tube for an optical fiber, a quartz glass pipe serving as a base material for an optical fiber as a cladding layer or a jacket layer of the optical fiber.

発明の背景 従来此種の石英系のガラスパイプの製造方法として一般
に知られているものは下記のようなものがある。BACKGROUND OF THE INVENTION Conventionally known methods for manufacturing this type of quartz-based glass pipe include the following.

（イ） 火炎加水分解法によるパイプの製造方法１、シ
ードの棒状物体に加水分解により５Ｉ０２の煤付けを行
ない、シードを抜き去った円筒上媒体をガラス旋盤等で
回転を与えながらバーナーで加熱して石英ガラスパイプ
とする。(B) Method 1 for manufacturing pipes by flame hydrolysis method: 5I02 soot is applied to a rod-shaped object of seeds by hydrolysis, and the cylindrical medium from which the seeds have been removed is heated with a burner while being rotated with a glass lathe or the like. and make it into a quartz glass pipe.

２、又は加水分解、ＣＶＤ法（化学蒸着法）で作ったＳ
ｒ ０２の媒体を焼結し石英バルクとし、それを加工
して石英パイプ母材が作られる。2, or S made by hydrolysis, CVD method (chemical vapor deposition method)
The r02 medium is sintered into quartz bulk, which is processed to produce a quartz pipe base material.

（ロ）天然石英を用いる石英パイプの製造方法天然の石
英の粉末化したものを加熱して積層し、石英バルクを作
り、以下上記と同様に加工して石英パイプとするが、本
発明の製造方法とは範ちゅうを異にする数比較の対象と
しない。(b) Manufacturing method of quartz pipe using natural quartz Powdered natural quartz is heated and laminated to form a quartz bulk, which is then processed in the same manner as above to make a quartz pipe. However, the manufacturing method of the present invention Do not compare numbers that are in a different category than the method.

従来技術と問題点 上記従来の方式では（イ）−１，に関してはシードロッ
ドの引抜きの困難さと、寸法の精度については媒体の時
の形状の画一化が困難であると共に、焼結により最終寸
法に不定要素が入る。Prior Art and Problems Regarding (a)-1, in the conventional method described above, it is difficult to pull out the seed rod, and regarding dimensional accuracy, it is difficult to standardize the shape of the medium, and due to sintering, the final Indeterminate elements are included in the dimensions.

（イ）−２，に関しては寸法精度的には表面の仕上がり
を問題にしない場合に相当の精度が得られる。Regarding (a)-2, considerable accuracy can be obtained in terms of dimensional accuracy if surface finish is not an issue.

しかし石英バルクの加工は硬くもろいためにこの点に難
がある。However, machining bulk quartz is difficult because it is hard and brittle.

発明の目的 本発明は従来の欠点を改善するため、５１０２を主成分
とする媒体を出発材とし、該媒体を全体がガラス化しな
い範囲で加熱し半焼結媒体として機械加工によりパイプ
状に形成した後再び加熱焼結とパイプ状半焼結媒体の寸
法、表面不均一の修正工程を繰返し行ない完全ガラス化
することを特徴とし、その目的は製造上の作業性が優れ
、精度よく加工できる光フアイバ用母材の石英ガラスパ
イプの製造方法を提供することにある。Purpose of the Invention In order to improve the conventional drawbacks, the present invention uses a medium containing 5102 as a main component as a starting material, heats the medium within a range that does not vitrify the entire medium, and forms a semi-sintered medium into a pipe shape by machining. After that, the process of heating and sintering and correcting the dimension and surface unevenness of the pipe-shaped semi-sintered medium is repeated to completely vitrify it.The purpose is to create an optical fiber that has excellent workability and can be processed with high precision. An object of the present invention is to provide a method for manufacturing a quartz glass pipe as a base material.

発明の実施例 本発明はＳ ｔ ０２を主成分とする媒体を出発材とし
、該媒体は煤付けにより得られた積層体からなるもので
、該媒体から得られた石英ガラスは高純度で無水石英ガ
ラスが製造できるため光ファイバのロッドインチューブ
に利用したり、光ファイバのクラッド層やジャケット層
の材料として用い′好適なことに着目した光フアイバ用
母材としての石英ガラスパイプを製造する方法である。Embodiments of the Invention The present invention uses a medium containing S t 02 as a main component as a starting material, and the medium is composed of a laminate obtained by sooting, and the quartz glass obtained from the medium is highly purified and anhydrous. A method for manufacturing quartz glass pipes as a base material for optical fibers, which is suitable for use in rod-in tubes of optical fibers and as a material for cladding layers and jacket layers of optical fibers. It is.

この種光ファイバ用母材としての石英ガラスパイプは、
とくにクラッド層の部材として用いる際、該石英ガラス
パイプ内面の内径の均一性と、内面の表面の微細な凹凸
が出来るだけ無いことが要求される。This type of quartz glass pipe as a base material for optical fiber is
In particular, when used as a member of a cladding layer, it is required that the inner diameter of the quartz glass pipe be uniform and that the inner surface be as free from minute irregularities as possible.

これは光ファイバのコア内に閉じ込められた光がクラッ
ド層との境界面で屈折する際に、屈折角を出来るだけ一
定に保つためと、臨界角を越えて光が外へとび出さない
ためである。This is to keep the refraction angle as constant as possible when the light confined within the core of the optical fiber is refracted at the interface with the cladding layer, and to prevent the light from escaping beyond a critical angle. be.

然し上述した媒体から出発して焼結炉でたとえば８００
℃〜１３００℃で焼結する際媒体の体積変化が生じ、収
縮現象を起しなからＳ ｉ０２のガラス化が達成される
のであるが、このとき出発材の媒体の形状の幾何学的精
度、焼結温度、焼結スピード、焼結炉内の発熱体と出発
材の媒体との距離、焼結中に炉内で媒体に回転運動を与
える回転速度等が形成される石英ガラスパイプの幾何学
的寸法に対し影響を与える。However, starting from the above-mentioned medium, for example 800
During sintering at temperatures between 1300°C and 1300°C, the volume of the medium changes and vitrification of Si02 is achieved without shrinkage. Sintering temperature, sintering speed, distance between the heating element in the sintering furnace and the medium of the starting material, the rotational speed that imparts rotational movement to the medium in the furnace during sintering, etc. The geometry of the quartz glass pipe in which it is formed influence on the dimensions of the object.

また元の媒体がガラス化した際、如何程に縮少するかと
いうことについては煤の成分、製造条件等により異なる
が、たとえば１／１１〜１／１６程度と非常に大きい。Furthermore, when the original medium is vitrified, the extent to which it shrinks varies depending on the components of soot, manufacturing conditions, etc., but is very large, for example, about 1/11 to 1/16.

したがって媒体が、はじめにたとえ精密に作られていて
も焼結後の寸法の保証はし難い。Therefore, even if the medium is initially manufactured precisely, it is difficult to guarantee the dimensions after sintering.

また該寸法に影響する上述した諸要因を制御しようとし
ても、自ずと限界がある。Furthermore, even if attempts are made to control the above-mentioned factors that influence the dimensions, there are limits.

本発明はこの点に鑑み、光フアイバ用母材としての石英
ガラスパイプの寸法および表面の均一性を所望の値に近
づける製造方法である。In view of this point, the present invention is a manufacturing method that brings the dimensions and surface uniformity of a quartz glass pipe as a base material for optical fiber close to desired values.

次に本発明の一実施例を図面により説明する。Next, one embodiment of the present invention will be described with reference to the drawings.

原料としてＳ ｒ Ｃｚ ４を用いてこれを火炎加水分
解によりＳ ！０２の媒体を作る。Using S r Cz 4 as a raw material, it is subjected to flame hydrolysis to produce S! Make 02 media.

第１図に於（１）て１はＣＶＤ法で用いられるようなバ
ブラーで、中（こＳ ＩＣ１３４の液２が入っている。In Fig. 1 (1), 1 is a bubbler like the one used in the CVD method, and contains liquid 2 of SIC134.

３はキャリヤーガスで例えば０２ガスを用いる。3 is a carrier gas, for example, 02 gas is used.

４はヒーターでバブラー１を加熱する。4 heats the bubbler 1 with a heater.

５はバーナー、６は媒体でその下部又は側面をバーナー
５の炎から発生した煤で出来ている。5 is a burner, and 6 is a medium whose lower part or side is made of soot generated from the flame of burner 5.

７は例えばＨ２ガスを用いる。7 uses H2 gas, for example.

媒体６は回転させながら煤の生長に従って上方に引上げ
ていく。The medium 6 is rotated and pulled upward as the soot grows.

ここで出来た媒体６を第２図に示す如く焼結炉１０に入
れる。The medium 6 thus produced is placed in a sintering furnace 10 as shown in FIG.

ここでの雰囲気温度は一例として８００°Ｃ〜１３００
℃であるが、ここでの要件は、（イ）前記の媒体６を収
縮する、（ロ）媒体６が全てガラス化する前に取り出す
、ことである。The ambient temperature here is 800°C to 1300°C as an example.
℃, but the requirements here are (a) to shrink the medium 6, and (b) to take out the medium 6 before it is completely vitrified.

この結果半焼結媒体１１が得られる。As a result, a semi-sintered medium 11 is obtained.

この一部にガラス化した所が出来ていても次の機械加工
に支障のない場合は問題にならない。Even if a vitrified area is formed in this part, it is not a problem as long as it does not interfere with the next machining process.

これを第３図に示す様に機械加工して１例としてパイプ
状の半焼結媒体１２を作る。This is machined as shown in FIG. 3 to produce, for example, a pipe-shaped semi-sintered medium 12.

これを更に第４図に示す如く焼結炉１３に入れて加熱す
る。This is further placed in a sintering furnace 13 and heated as shown in FIG.

この場合、該機械加工と焼結炉１３に入れて加熱する工
程を繰返し行ない、パイプ状半焼結媒体１２の寸法、内
面および外面の修正をガラス化が完全（こ終るまで行な
う。In this case, the machining and heating steps in the sintering furnace 13 are repeated to modify the dimensions, inner and outer surfaces of the pipe-shaped semi-sintered medium 12 until vitrification is complete.

その際の温度は１例を示せば雰囲気温度で１３００’Ｃ
〜１８００℃である。The temperature at that time is, for example, 1300'C in ambient temperature.
~1800°C.

この場合の焼結炉１３はその性能さえ出れば焼結炉１０
を用いてもよい。In this case, the sintering furnace 13 can be replaced with the sintering furnace 10 as long as its performance is achieved.
may also be used.

また焼結の温度はＳ ｒ Ｑ２中の他の原素の存在の有
無により変るものである。Moreover, the sintering temperature changes depending on the presence or absence of other elements in S r Q2.

この石英パイプはその用途により更に加熱されて引伸ば
すこと（こより寸法の異なるパイプを得ることが出来る
。Depending on the intended use, this quartz pipe can be further heated and stretched (this allows pipes of different sizes to be obtained.

以上述べた実施例からも明らかなように、従来の方法に
よると光フアイバ用母材としての石英ガラスパイプの寸
法の精度および表面の均一性の制御に限界があったのに
対し、本発明によると媒体の焼結の途中で、完全（こガ
ラス化する前で焼結を停止し、この時点で媒体が焼結に
より寸法が乱れた場合、たとえば媒体での直径が軸方向
に均一にできていたものが、この時点で軸方向に凹凸が
生するなどの不均一が生じていると、これを機械的ｌこ
表面を薄く削り落すことにより、軸方向に関してその時
点の最小径Ｏこ合せて太い部分を削り均一化をはかるこ
とができる。As is clear from the embodiments described above, the conventional method had limitations in controlling the dimensional accuracy and surface uniformity of the quartz glass pipe as a base material for optical fibers, whereas the present invention During the sintering of the medium, sintering is stopped before complete vitrification, and if the dimensions of the medium are disturbed by sintering at this point, for example, the diameter of the medium is uniform in the axial direction. However, if there are irregularities such as unevenness in the axial direction at this point, this can be removed mechanically by scraping the surface thinly to match the minimum diameter at that point in the axial direction. Thick parts can be shaved off to make it more uniform.

このように媒体が半焼結状態の機械的加工の容易な状態
の時点で外径または内径についても同様に、外径または
内径の寸法制御が可能である。In this way, when the medium is in a semi-sintered state that is easy to mechanically process, the outer diameter or inner diameter can be similarly controlled.

ざら（こ外径の均一化を仕上げた半焼結媒体を再度力日
熱して焼結を進行させた後、同様の手順を繰返すことに
より最終的に石英ガラスパイプに至る方法である。In this method, the semi-sintered medium with a uniform outer diameter is heated again to advance sintering, and the same procedure is repeated to finally produce a quartz glass pipe.

したがって急激な媒体から石英ガラスパイプに至るまで
の縮少、すなわち約１／１１〜１／１６の縮少に伴なう
寸法の乱れが、完全ガラス化に至る途中において、半焼
結の機械的加工性に富んだ状態で寸法および表面の修正
を加えつつ、徐々に最終段階へと進み、可及的に寸法お
よび表面の均一性に修正を加えつつ、すなわち寸法、表
面の均一性の修正を能動的に行ないながら、十分媒体の
収縮が進んだ焼結媒体を機械加工のできる限界まで行な
い、最後に完全焼結をして石英ガラスパイプを製造して
いる。Therefore, the dimensional disturbance caused by the sudden reduction from the medium to the quartz glass pipe, that is, the reduction by about 1/11 to 1/16, is caused by the mechanical processing of the semi-sintered pipe on the way to complete vitrification. Gradually proceed to the final stage while making modifications to the dimensions and surface while making modifications to the dimensions and surface uniformity as much as possible, i.e. actively modifying the dimensions and surface uniformity. The sintered medium, which has undergone sufficient shrinkage, is machined to the limit of possible machining, and finally sintered completely to manufacture quartz glass pipes.

本発明によれば、従来の方法では寸法の精度、表面の均
一性に対する修正制御ができない最後の状態における加
工程度が、たとえば媒体の焼結（こ伴う収縮率をパラメ
ータで表現すると、機械加工のできるために完全に寸法
および表面状態が保持されている半焼結状態の体１ 積を１とすると、該体積が−〜−に収縮する１、１
１．４ 間では従来完全な制御を行なうことができなかったが本
発明では可能である。According to the present invention, the degree of machining in the final state where dimensional accuracy and surface uniformity cannot be corrected and controlled in the conventional method, for example, due to sintering of the medium (if the shrinkage rate associated with this is expressed as a parameter), machining A semi-sintered body whose dimensions and surface condition are perfectly preserved because of its ability to form.
Conventionally, it was not possible to perform complete control between 1.4 and 1.4, but it is possible with the present invention.

発明の効果 本発明の方法は上述の如くガラス化する直前の段階で機
械加工をするため未だ軟かく、丁度ナヨーク程度で且つ
その後ガラス化するまで収縮が余り起らない。Effects of the Invention In the method of the present invention, as described above, the machining is performed immediately before vitrification, so the material is still soft, just at the level of a yoke, and does not shrink much until it is vitrified afterwards.

体積比で例えば収縮率比を１ ／ １．１〜ｌ ／ １
．４程度にすることは容易である。For example, the shrinkage ratio in volume ratio is 1/1.1 to l/1
．． It is easy to make it about 4.

従って、媒体の半焼結状態で機械加工するので、材料が
柔かく作業性がよいうえに、１回の機械加工量は少くて
よいので精度の高い加工ができ、石英ガラスパイプの寸
法の調整が容易かつ高精度にできる利点がある。Therefore, since the medium is machined in a semi-sintered state, the material is soft and workability is good, and the amount of machining per time is small, allowing for highly accurate machining, making it easy to adjust the dimensions of the quartz glass pipe. It also has the advantage of being highly accurate.

さらに本発明は媒体の加熱焼結の途中で半焼結媒体を機
械加工することにより、従来の通常の石英ガラスの製法
において、芯杆を設けた形状の鋳型に水晶粉末を入れ焼
結して中空筒形インゴットを作り、このインゴットを熱
熔融してガラス化する、すなわち水晶を出発材とする石
英ガラスパイプを光フアイバ用母材とした場合問題とな
っていた、鋳型と焼結体との間で汚染が入ること、およ
び石英ガラスパイプ中にＳ ＩＯ２と少量のドーパント
を入れてＳ ＩＯ２のみの屈折率よりドーパント入りの
石英ガラスパイプの屈折率の値を低くシ、コアが５ＩＯ
２、クラッド層がドーパント入りの石英ガラスパイプを
ロッドインして製造していた石英ガラス光ファイバにお
いて、インゴット表面を特に熔融することによりドーパ
ントの気散を発生させ、その結果ドーパントの含有率が
石英パイプの内部で不規則になるという欠点なども無く
、その効果は大きい。Furthermore, by machining the semi-sintered medium during the heating and sintering of the medium, the present invention enables the production of hollow quartz glass by placing quartz powder in a mold with a core rod and sintering it. When a cylindrical ingot is made and the ingot is heat-melted and vitrified, that is, when a quartz glass pipe made from quartz crystal is used as a base material for optical fiber, there is a problem between the mold and the sintered body. In addition, by putting SIO2 and a small amount of dopant into the quartz glass pipe, the refractive index of the quartz glass pipe containing the dopant is lower than the refractive index of only SIO2, and the core is 5IO.
2. In silica glass optical fibers whose cladding layer is manufactured by rod-ining a quartz glass pipe containing a dopant, the dopant is diffused by melting the ingot surface, and as a result, the dopant content is reduced to quartz. There is no disadvantage of irregularities inside the pipe, and the effect is great.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明の一実施例の説明図で、第２図、第３図
、第４図は同製造過程の説明図を示す。 １はバブラー ２はＳ ｔ Ｃ１３４液、３はキャリヤ
ーガス、４はヒーター、５はバーナー、６は媒体、７は
Ｈ２ガス、１０．１３は焼結炉、１１は半焼結媒体、１
２はパイプ状の半焼結媒体。FIG. 1 is an explanatory diagram of one embodiment of the present invention, and FIGS. 2, 3, and 4 are explanatory diagrams of the same manufacturing process. 1 is a bubbler, 2 is S t C134 liquid, 3 is a carrier gas, 4 is a heater, 5 is a burner, 6 is a medium, 7 is H2 gas, 10.13 is a sintering furnace, 11 is a semi-sintering medium, 1
2 is a pipe-shaped semi-sintered medium.

Claims (1)

【特許請求の範囲】[Claims] １ 光フアイバ用のロッドインチューブ、光ファイバの
クラッド層またはジャケット層としての光フアイバ用母
材の石英ガラスパイプの製造方法において、シリコンを
主成分とする薬品を用いて火炎加水分解またはＣＶＤ法
によりＳ ｒ ０２が主成分の煤状の中実棒からなる媒
体を形成する第１の工程と、該媒体を加熱炉中で加熱し
、該媒体の籾期の体積の縮少が見られ、かつ該媒体の全
体がガラス化しない範囲で半焼結を行ない半焼結媒体を
形成する第２の工程と、該半焼結媒体に対し、該半焼結
媒体の長手方向に中心孔を穿設しかつ該半焼結媒体の該
穿孔内面及び外表面を機械加工により研磨してパイプ状
とする第３の工程と、前記第２の工程と第３の工程とを
少なくとも一回行なった後、再び該媒体のパイプ状半焼
結媒体を加熱炉中で加熱し、焼結を進めた該パイプ状半
焼結媒体の内面及び外表面を前記機械加工により研磨す
る第４の工程とからなり、該第４の工程を繰返して完全
ガラス化することを特徴とする光フアイバ用母材の石英
ガラスパイプの製造方法。1. In a method for manufacturing a rod-in tube for an optical fiber, a quartz glass pipe as a base material for an optical fiber as a cladding layer or a jacket layer of an optical fiber, the process is performed by flame hydrolysis or CVD using a chemical mainly composed of silicon. a first step of forming a medium consisting of soot-like solid rods of which S r 02 is the main component; heating the medium in a heating furnace; a second step of forming a semi-sintered medium by performing semi-sintering within a range where the entire medium does not become vitrified; and a second step of forming a semi-sintered medium in the longitudinal direction of the semi-sintered medium; A third step of polishing the perforated inner and outer surfaces of the binding medium to form a pipe shape, and after performing the second step and the third step at least once, the pipe of the medium is polished again. A fourth step of heating the pipe-shaped semi-sintered medium in a heating furnace and polishing the inner and outer surfaces of the sintered pipe-shaped semi-sintered medium by the machining, and repeating the fourth step. A method for producing a quartz glass pipe as a base material for an optical fiber, which is completely vitrified using a process.
JP54082280A 1979-06-29 1979-06-29 Method for manufacturing quartz glass pipe as base material for optical fiber Expired JPS5846457B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54082280A JPS5846457B2 (en) 1979-06-29 1979-06-29 Method for manufacturing quartz glass pipe as base material for optical fiber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54082280A JPS5846457B2 (en) 1979-06-29 1979-06-29 Method for manufacturing quartz glass pipe as base material for optical fiber

Publications (2)

Publication Number Publication Date
JPS569232A JPS569232A (en) 1981-01-30
JPS5846457B2 true JPS5846457B2 (en) 1983-10-17

Family

ID=13770089

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54082280A Expired JPS5846457B2 (en) 1979-06-29 1979-06-29 Method for manufacturing quartz glass pipe as base material for optical fiber

Country Status (1)

Country Link
JP (1) JPS5846457B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6420741U (en) * 1987-07-28 1989-02-01
JPH0286195U (en) * 1988-12-23 1990-07-09

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3302745A1 (en) * 1983-01-27 1984-08-02 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen METHOD FOR PRODUCING OBJECTS FROM HIGH PURITY SYNTHETIC QUARTZ GLASS

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6420741U (en) * 1987-07-28 1989-02-01
JPH0286195U (en) * 1988-12-23 1990-07-09

Also Published As

Publication number Publication date
JPS569232A (en) 1981-01-30

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