JPS5845535U - Retake - Google Patents
RetakeInfo
- Publication number
- JPS5845535U JPS5845535U JP1981140499U JP14049981U JPS5845535U JP S5845535 U JPS5845535 U JP S5845535U JP 1981140499 U JP1981140499 U JP 1981140499U JP 14049981 U JP14049981 U JP 14049981U JP S5845535 U JPS5845535 U JP S5845535U
- Authority
- JP
- Japan
- Prior art keywords
- silicon dioxide
- dioxide film
- utility
- reticle
- retake
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Prevention Of Fouling (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図は、本考案の一実施例を説明するだめの一部断面図で
ある。
１・・・ガラス板、２・・・クロム膜、３・・・二酸化
シリ ′コン被膜、４・・・付着基。The figure is a partial sectional view illustrating an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1...Glass plate, 2...Chromium film, 3...Silicon dioxide film, 4...Adhesion group.
Claims (1)
リコン膜をそなえ、該二酸化シリコン膜は表面処理によ
って表面自由エネルギーが低下されていることを特徴と
するレティクル。 ２ シラン化合物によって表面処理された二酸化シリコ
ン膜をそなえたことを特徴とする実用新案登録請求の範
囲第１項記載のレティクル。[Claims for Utility Model Registration] 1. A reticle comprising a silicon dioxide film adhered to the surface on the side where a pattern is present, the silicon dioxide film having surface free energy reduced by surface treatment. 2. The reticle according to claim 1, which is a utility model, and is characterized by comprising a silicon dioxide film whose surface is treated with a silane compound.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981140499U JPS5845535U (en) | 1981-09-24 | 1981-09-24 | Retake |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981140499U JPS5845535U (en) | 1981-09-24 | 1981-09-24 | Retake |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5845535U true JPS5845535U (en) | 1983-03-26 |
Family
ID=29933660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981140499U Pending JPS5845535U (en) | 1981-09-24 | 1981-09-24 | Retake |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5845535U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62136123U (en) * | 1986-02-21 | 1987-08-27 |
-
1981
- 1981-09-24 JP JP1981140499U patent/JPS5845535U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62136123U (en) * | 1986-02-21 | 1987-08-27 |
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