JPS58191643U - sample stand - Google Patents

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図ａ及びｂは従来例の正面図及びＡ−Ａ断面図、第
２図はその使用説明図、第３図ａ及びｂは本考案の一実
施例の正面図及びＢ−Ｂ断面図、第４図及び第５図はそ
の使用説明図、第６図は第５図の平面図、第７図は展開
図、第８図は他の実施例を示すホルダの断面図である。 〔主要部分の符号の説明〕、１・・・吸着面、４゜４′
・・・吸気孔、９・・・螺旋溝、１０・・・載置面、１
１゜１２・・・ウェーハ。　　、Figures 1a and b are a front view and a sectional view taken along the line A-A of the conventional example, Figure 2 is an explanatory view of its use, and Figures 3a and b are a front view and a sectional view taken along the line B-B of an embodiment of the present invention. , FIG. 4 and FIG. 5 are explanatory views of its use, FIG. 6 is a plan view of FIG. 5, FIG. 7 is a developed view, and FIG. 8 is a sectional view of the holder showing another embodiment. [Explanation of symbols of main parts], 1...Adsorption surface, 4゜4'
...Intake hole, 9...Spiral groove, 10...Placement surface, 1
1゜12...wafer. ,

Claims (1)

【実用新案登録請求の範囲】 板状の試料を真空吸着により試料載置面に支持する試料
台において、 前記試料載置面に、その中心をとりまきつつ該載置面の
周辺に向かう如く設けられた一本の溝と；真空引きのた
めに該溝内に、前記載置面の中心からの位置が互いに異
なるように設けられた複数の吸気孔とを有し、大きさの
異なる試料が載置されたとき、該試料によって覆われる
前記溝の長さに応じて、前記複数の吸気孔の作動すべき
個数を可変としたことを特徴とする試料台。[Claims for Utility Model Registration] In a sample stage that supports a plate-shaped sample on a sample mounting surface by vacuum suction, a specimen is provided on the sample mounting surface so as to surround the center of the sample mounting surface and extend toward the periphery of the mounting surface. one groove; and a plurality of suction holes provided in the groove at different positions from the center of the placement surface for evacuation, and samples of different sizes are placed therein. A sample stand characterized in that the number of the plurality of air intake holes to be activated is variable depending on the length of the groove covered by the sample when the sample stand is placed.