JPS58191643U - sample stand - Google Patents
sample standInfo
- Publication number
- JPS58191643U JPS58191643U JP8944482U JP8944482U JPS58191643U JP S58191643 U JPS58191643 U JP S58191643U JP 8944482 U JP8944482 U JP 8944482U JP 8944482 U JP8944482 U JP 8944482U JP S58191643 U JPS58191643 U JP S58191643U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- mounting surface
- groove
- sample stand
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図a及びbは従来例の正面図及びA−A断面図、第
2図はその使用説明図、第3図a及びbは本考案の一実
施例の正面図及びB−B断面図、第4図及び第5図はそ
の使用説明図、第6図は第5図の平面図、第7図は展開
図、第8図は他の実施例を示すホルダの断面図である。
〔主要部分の符号の説明〕、1・・・吸着面、4゜4′
・・・吸気孔、9・・・螺旋溝、10・・・載置面、1
1゜12・・・ウェーハ。 、Figures 1a and b are a front view and a sectional view taken along the line A-A of the conventional example, Figure 2 is an explanatory view of its use, and Figures 3a and b are a front view and a sectional view taken along the line B-B of an embodiment of the present invention. , FIG. 4 and FIG. 5 are explanatory views of its use, FIG. 6 is a plan view of FIG. 5, FIG. 7 is a developed view, and FIG. 8 is a sectional view of the holder showing another embodiment. [Explanation of symbols of main parts], 1...Adsorption surface, 4゜4'
...Intake hole, 9...Spiral groove, 10...Placement surface, 1
1゜12...wafer. ,
Claims (1)
台において、 前記試料載置面に、その中心をとりまきつつ該載置面の
周辺に向かう如く設けられた一本の溝と;真空引きのた
めに該溝内に、前記載置面の中心からの位置が互いに異
なるように設けられた複数の吸気孔とを有し、大きさの
異なる試料が載置されたとき、該試料によって覆われる
前記溝の長さに応じて、前記複数の吸気孔の作動すべき
個数を可変としたことを特徴とする試料台。[Claims for Utility Model Registration] In a sample stage that supports a plate-shaped sample on a sample mounting surface by vacuum suction, a specimen is provided on the sample mounting surface so as to surround the center of the sample mounting surface and extend toward the periphery of the mounting surface. one groove; and a plurality of suction holes provided in the groove at different positions from the center of the placement surface for evacuation, and samples of different sizes are placed therein. A sample stand characterized in that the number of the plurality of air intake holes to be activated is variable depending on the length of the groove covered by the sample when the sample stand is placed.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8944482U JPS58191643U (en) | 1982-06-15 | 1982-06-15 | sample stand |
US06/499,024 US4448404A (en) | 1980-11-18 | 1983-06-02 | Device for holding a sheet-like sample |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8944482U JPS58191643U (en) | 1982-06-15 | 1982-06-15 | sample stand |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS58191643U true JPS58191643U (en) | 1983-12-20 |
Family
ID=30098060
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8944482U Pending JPS58191643U (en) | 1980-11-18 | 1982-06-15 | sample stand |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58191643U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020181871A (en) * | 2019-04-24 | 2020-11-05 | キヤノン株式会社 | Substrate holding apparatus, lithography apparatus, and manufacturing method of article |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS571077U (en) * | 1980-05-30 | 1982-01-06 |
-
1982
- 1982-06-15 JP JP8944482U patent/JPS58191643U/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS571077U (en) * | 1980-05-30 | 1982-01-06 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020181871A (en) * | 2019-04-24 | 2020-11-05 | キヤノン株式会社 | Substrate holding apparatus, lithography apparatus, and manufacturing method of article |
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