JPS58190705A - Optical sensor - Google Patents
Optical sensorInfo
- Publication number
- JPS58190705A JPS58190705A JP7290382A JP7290382A JPS58190705A JP S58190705 A JPS58190705 A JP S58190705A JP 7290382 A JP7290382 A JP 7290382A JP 7290382 A JP7290382 A JP 7290382A JP S58190705 A JPS58190705 A JP S58190705A
- Authority
- JP
- Japan
- Prior art keywords
- light
- optical
- optical fiber
- amount
- reflected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 35
- 238000006073 displacement reaction Methods 0.000 claims abstract description 9
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 239000013307 optical fiber Substances 0.000 abstract description 18
- 230000005611 electricity Effects 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 7
- 206010041662 Splinter Diseases 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000006698 induction Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Abstract
Description
【発明の詳細な説明】
（ａ）発明の技術分野
本発明は光量変化を利用して変位量を検出する光センサ
に関するものである。DETAILED DESCRIPTION OF THE INVENTION (a) Technical Field of the Invention The present invention relates to an optical sensor that detects the amount of displacement using changes in the amount of light.
ト
（、ａ）従来技術と問題点
機構的な運動の位置について広く種々の測定、検出装置
が使用されているが、特に遠隔測定、表示、制御の場合
従来は電気的な測定、伝達を利用することが一般的であ
る。しかし電気回路による伝達に屡々配線途中において
誘導障害、ノイズを給して影響されることが多い。例え
ば回路中で開閉されるスイッチ等も大きなノイズの原因
となる。(a) Prior art and problems A wide variety of measuring and detecting devices are used to determine the position of mechanical movement, but in the case of remote measurement, display, and control, electrical measurement and transmission have traditionally been used. It is common to do so. However, transmission through electrical circuits is often affected by inductive disturbances and noise in the wiring. For example, switches that are opened and closed in a circuit can also cause large noise.
−カデジタル化された電気信号は一層これらのノイズに
対して敏感となるため電気的伝達には限度かある。- There is a limit to electrical transmission since digitized electrical signals are more sensitive to these noises.
第１図は油圧シリンダのストローク位置検出器の取付け
の構造図である。油圧シリンダ１から出入するピストン
棒２に接触回転するロークリエンコーダ３によりデジタ
ル信号を送出する。信号は線路４を介して離れた位置の
デコーダ５に伝えられる。線路４には一般にはシールド
線等を使用して外部からの誘導、ノイズの混入されるこ
とを極力防止するように計っている。尚ロータリエンコ
ーダにかえてアナログ方式のポテンシオメータも同様に
広く使用される。これらの方法はノイズ条件の比較的よ
い室内に配置される工作機械等の機器において、位置決
め装置に広く使用されるが、例えば車両に搭載される各
種の計測装置等にあっては上記のごとき信号発生手段に
よると車稠等ではエンジンの点火栓の放電ノイズのため
正確な信号を捕えることは屡々困難となる。FIG. 1 is a structural diagram of the installation of a stroke position detector of a hydraulic cylinder. A digital signal is sent out by a rotary encoder 3 that rotates in contact with a piston rod 2 moving in and out of a hydraulic cylinder 1. The signal is transmitted via line 4 to decoder 5 at a remote location. Generally, a shielded wire or the like is used for the line 4 in order to prevent induction and noise from entering as much as possible from the outside. Note that analog potentiometers are also widely used instead of rotary encoders. These methods are widely used for positioning devices in equipment such as machine tools that are placed indoors with relatively good noise conditions. According to the generating means, it is often difficult to capture an accurate signal in a vehicle cabin or the like due to the discharge noise of the engine's spark plug.
第２図は従来の光信号を利用した位置検出装置の原理図
である。矢印ＣＤ方向に移動する軸１１上に反射板１２
を取り付け、−刃固定部には多数の光ファイバ１３を並
列して配設し、この一端を反射板１２に対向させるとと
もに光ファイバ１３の他方の端部にビームスプリンター
１４を夫々取り付け、光を総てのビームスプリッタ−１
４の上方から入射する。軸１１が移動して反射板１２が
何れかの光ファイバ１３の直下に来た場合光は反射され
てビームスプリンター１４に再帰し、この反射光はビー
ムスプリンター１４のハーフミラ−面１４ａで偏光され
る。このようにして反射光のみられる光ファイバ１３を
検知することにより反射板１２の、即ち軸の移動位置が
検出される。この方法は検出す段きする位置に夫々の光
ファイバ、ビームスプリンター等を多数配列するため高
価になり、且つ精度上にも限度がある。FIG. 2 is a principle diagram of a conventional position detection device using optical signals. A reflector 12 is placed on the shaft 11 moving in the direction of arrow CD.
- A large number of optical fibers 13 are arranged in parallel on the blade fixing part, one end of which faces the reflection plate 12, and a beam splinter 14 is attached to the other end of the optical fiber 13 to emit light. All beam splitters-1
4 is incident from above. When the shaft 11 moves and the reflector 12 comes directly under one of the optical fibers 13, the light is reflected and returns to the beam splinter 14, and this reflected light is polarized by the half mirror surface 14a of the beam splinter 14. . By detecting the optical fiber 13 in which the reflected light is seen in this manner, the moving position of the reflecting plate 12, that is, the shaft is detected. This method is expensive because a large number of optical fibers, beam splinters, etc. are arranged at each detection position, and there is also a limit in terms of accuracy.
（７）発明の目的
本発明は信号を光信号として光ファイバにより検出し、
伝送を可能ならしめ、且つこれを経済的に実現するもの
である。(7) Purpose of the invention The present invention detects a signal as an optical signal using an optical fiber,
The purpose is to make transmission possible and realize this economically.
部に導く光導波路と、該被測定部に出射せしめられた該
光の反射光を該光導波路に再入射せしめ、該入射せしめ
られた反射光を分岐する光回路と、該分岐された反射光
を電気信号に変換する光電変換素子とよりなり、該被測
定部の変位に基づく反射光量の変化により変位量をヰ★
出する光センサにより上記目的を達成するものである。an optical waveguide that guides the light emitted to the part to be measured, an optical circuit that makes the reflected light of the light emitted to the part to be measured re-enter the optical waveguide and branches the reflected light that has entered the part, and the branched reflected light. It consists of a photoelectric conversion element that converts the amount of light into an electrical signal, and changes the amount of displacement based on the amount of reflected light based on the displacement of the part to be measured.
The above objective is achieved by a light sensor that emits light.
Ｃ２
（１）発明の実施例
第３図は本発明に係る光センサの実施例の構成図である
。発光ダイオードからなる光源２１の発光が一定光量と
なるようにして光ファイバ２２に入射されて伝送され、
光サーキュレータ２３に入る。光サーキュレータ２３に
入射された入射光は光サーキュレータ２３の他端に接続
される光ファイバ２４に伝えられる。この伝送光は光フ
ァイバ２４の末端２４ａで放射され、レンズ２５によっ
て拡大された平行光として反射板２６に到達する。C2 (1) Embodiment of the invention FIG. 3 is a block diagram of an embodiment of the optical sensor according to the invention. The light emitted from a light source 21 consisting of a light emitting diode is incident on an optical fiber 22 and transmitted in a constant amount of light,
It enters the optical circulator 23. The incident light incident on the optical circulator 23 is transmitted to the optical fiber 24 connected to the other end of the optical circulator 23. This transmitted light is emitted from the end 24a of the optical fiber 24, and reaches the reflection plate 26 as parallel light that is expanded by the lens 25.
反射板２６は矢印Ｆ方向に示すよう入射光とは垂直方向
に移動し得る構造である。反射板２６による反射光は再
びレンズ２５に入り、築光されて光ファイバ２４に入°
射される。この入射光は光サーキュレータ２３に入り、
矢印Ｅ方向に転しられて出力端醋けられる光検出器２７
に入る。ここにおいて反射光量は電気量に変換され、出
力計２８によって光量は電気量として出力計２８に指示
される。The reflecting plate 26 has a structure that can move in a direction perpendicular to the incident light as shown in the direction of arrow F. The light reflected by the reflection plate 26 enters the lens 25 again, forms a light beam, and enters the optical fiber 24.
shot. This incident light enters the optical circulator 23,
Photodetector 27 which is rotated in the direction of arrow E and is placed at the output end.
to go into. Here, the amount of reflected light is converted into an amount of electricity, and the amount of light is indicated to the output meter 28 as an amount of electricity.
第４図は反射板２６の平面図である。点線３１は第３図
のレンス２５によって拡大された平行光の反射領域を示
す。反射板′？６には垂直に三角形の反射面３０が金又
はアルミ蒸着により形成されこの面以外は反射を抑止す
るため黒色皮膜がかけられている。このため反射板２６
のＦ方向の移動に伴い、点線に示すの反射領域３１が相
対的に上下し、このため第３図説明の反射板２６の上下
は反射光量の変化として現れる。FIG. 4 is a plan view of the reflection plate 26. A dotted line 31 indicates a reflection area of parallel light magnified by the lens 25 in FIG. a reflector'? 6 has a vertically triangular reflective surface 30 formed by vapor deposition of gold or aluminum, and other surfaces than this surface are coated with a black film to suppress reflection. Therefore, the reflector 26
With the movement in the F direction, the reflection area 31 shown by the dotted line moves up and down relatively, and therefore the up and down of the reflection plate 26 illustrated in FIG. 3 appears as a change in the amount of reflected light.
第５図は光センサの特性図である。反射板２６のＦ方向
への変位量χに対して反射光量Ｐｒの変化は近似的に直
線に示される。FIG. 5 is a characteristic diagram of the optical sensor. The change in the amount of reflected light Pr with respect to the amount of displacement χ of the reflection plate 26 in the F direction is approximately shown as a straight line.
第６図は本発明に係る他の反射板の実施例における平面
図である。反射板３６の基本的構造は第４図における説
明の反射板と同様である。特に反射面４０は曲線輪廓を
持った近似三角形をしている。点線で示す反射領域４１
の上下の移動による光量は非直線性を示す。本実施例の
ごとく反射面の形状は更に反射特性を変形させてその利
用の目的に応じて選択設計し使用する。FIG. 6 is a plan view of another embodiment of a reflecting plate according to the present invention. The basic structure of the reflector 36 is the same as that of the reflector explained in FIG. In particular, the reflective surface 40 has an approximate triangular shape with a curved contour. Reflection area 41 indicated by dotted line
The amount of light due to the vertical movement of shows non-linearity. As in the present embodiment, the shape of the reflecting surface is further modified in its reflection characteristics, and is selectively designed and used depending on the purpose of its use.
本発明において光サーキュレータの光端子部の光ファイ
バ番接続したが、光導波路として光ファイバは最小限光
サーキュレータと被測定部間に配置されればよいことで
あり、光サーキュレータの他の２端には直接に光源と光
電変換子が設けられてよいことであ。In the present invention, the optical fiber number is connected to the optical terminal part of the optical circulator, but the optical fiber as an optical waveguide only needs to be placed between the optical circulator and the part to be measured, and the other two ends of the optical circulator are connected. This means that a light source and a photoelectric converter may be directly provided.
父上記における光サーキュレータは反射光の偏光子、或
いは光方向性結合器等でもよく、何れも光ＩＣ回路基板
に形成される光導波路パターンによっても実現し得る。The optical circulator mentioned above may be a polarizer for reflected light, an optical directional coupler, or the like, and either of these can be realized by an optical waveguide pattern formed on an optical IC circuit board.
この場合光源への再帰光を防止する光アイソレータ等が
設けられる。In this case, an optical isolator or the like is provided to prevent light from returning to the light source.
本実施例では光源に発光ダイオードを使用したが、レー
ザダイオード等も使用可能であり、光検本発明によれば
機械的変位量を光を利用して電気量に変換し測定するこ
とが可能となり、又変換の関数的関係を任意に設定する
ことも出来る。機械的変位はその他回転、力の測定等広
く応用拡大し得る所である。又光利用のため外界からの
誘導やノイズ等に対して影響されることがないので安定
である。以上の特性を利用し各種のフィートハック制御
にも応用し得る。In this example, a light emitting diode was used as the light source, but a laser diode or the like can also be used.According to the present invention, it is possible to convert mechanical displacement into an electrical quantity using light and measure it. , it is also possible to arbitrarily set the functional relationship of the transformation. Mechanical displacement can be expanded to a wide range of other applications such as rotation and force measurement. Furthermore, since it uses light, it is stable because it is not affected by induction or noise from the outside world. Utilizing the above characteristics, it can also be applied to various foot hack controls.
第１図は油圧シリンダのストローク位置検出器の取付け
の構造図、第２図は従来の光信号を利用した位置検出装
置の原理図、第３図は本発明に係る光センサの実施例の
構成図、第４図は本発明に係る反射板の平面図、第５図
は本発明に係る光センサの特性図、第６図は本発明に係
る他の反射板の平面図である。
図ニオいて２１は光源、２２．２４は光ファイバ、２３
は光サーキュレータ、２５はレンズ、２６は反射板２７
は光検出器、２８は出力針である。Fig. 1 is a structural diagram of the installation of a stroke position detector of a hydraulic cylinder, Fig. 2 is a principle diagram of a conventional position detection device using optical signals, and Fig. 3 is a configuration of an embodiment of an optical sensor according to the present invention. 4 is a plan view of a reflector according to the present invention, FIG. 5 is a characteristic diagram of an optical sensor according to the present invention, and FIG. 6 is a plan view of another reflector according to the present invention. In the figure, 21 is a light source, 22.24 is an optical fiber, 23
is an optical circulator, 25 is a lens, 26 is a reflector 27
is a photodetector, and 28 is an output needle.
Claims (1)
と、該被測定部に出射せしめられた該光の反射光を該光
導波路に再入射せしめ、該入射せしめられた反射光を分
岐する光回路と、該分岐された反射光を電気信号に変換
する光電変換素子とよりなり、該被測定部の変位に基づ
く反射光量の変化により変位量を検出する光センサ。A light source, an optical waveguide that guides the light emitted from the light source to a part to be measured, and a reflected light of the light emitted to the part to be measured that makes the reflected light enter the optical waveguide again, and the reflected light that was made to enter the part. An optical sensor that includes a branching optical circuit and a photoelectric conversion element that converts the branched reflected light into an electrical signal, and detects the amount of displacement based on a change in the amount of reflected light based on the displacement of the measured part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7290382A JPS58190705A (en) | 1982-04-30 | 1982-04-30 | Optical sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7290382A JPS58190705A (en) | 1982-04-30 | 1982-04-30 | Optical sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58190705A true JPS58190705A (en) | 1983-11-07 |
Family
ID=13502766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7290382A Pending JPS58190705A (en) | 1982-04-30 | 1982-04-30 | Optical sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58190705A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2658603A1 (en) * | 1990-02-20 | 1991-08-23 | Dassault Electronique | Method and device for remote acquisition of physical parameters |
| JPH0390212U (en) * | 1989-12-29 | 1991-09-13 |
-
1982
- 1982-04-30 JP JP7290382A patent/JPS58190705A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0390212U (en) * | 1989-12-29 | 1991-09-13 | ||
| FR2658603A1 (en) * | 1990-02-20 | 1991-08-23 | Dassault Electronique | Method and device for remote acquisition of physical parameters |
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