JPS58189836A - Surface treatment of substrate of magnetic disk - Google Patents

Surface treatment of substrate of magnetic disk

Info

Publication number
JPS58189836A
JPS58189836A JP7311082A JP7311082A JPS58189836A JP S58189836 A JPS58189836 A JP S58189836A JP 7311082 A JP7311082 A JP 7311082A JP 7311082 A JP7311082 A JP 7311082A JP S58189836 A JPS58189836 A JP S58189836A
Authority
JP
Japan
Prior art keywords
stage
substrate
layers
disk
magnetic disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7311082A
Other languages
Japanese (ja)
Inventor
Susumu Ito
伊東　進
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP7311082A priority Critical patent/JPS58189836A/en
Publication of JPS58189836A publication Critical patent/JPS58189836A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers

Landscapes

  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To simplify manufacturing stages, to reduce defects, and to lower the manufacturing cost, by carrying out a stage for coating the surfaces of the substrate of a magnetic disk with org. substance layers before forming a magnetic recording medium and a stage for heat treating the layers. CONSTITUTION:A rolled blank 1 of an Al alloy for the substrate of a disk is cut to the disk shape, and the surfaces of the blank 1 are planed to about 1.0mum surface roughness (stage a b). The planed surfaces are cleaned, dried, and coated with org. substance layers 3 characterized by this invention, and the layers 3 are heat-treated (stage c). The layers 3 are desirably made of a thermosetting resin which has bonding strength and can be spread to about 1mum small thicness, and the resin includes a known photoresist. Adhesion increasing films 4 of Cr, Ti, Mo or the like having 100- several 1,000Angstrom thickness are then formed by sputtering or vapor deposition (stage d). The surfaces of the resulting substrate of a disk are provided with moderate hardness, and the surface roughness is considerably improved from the level finished in the stage (a).

Description

【発明の詳細な説明】 この発明は磁気ディスク装置に使われる高性能磁気ディ
スク基板の表面処理法に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a surface treatment method for a high performance magnetic disk substrate used in a magnetic disk device.

磁気ディスク装置に使用される高性能磁気ディスクは高
保磁力の薄１！！磁気記録媒体が必要条件であるが、こ
のような薄膜磁気記録媒体が均一な膜厚でピンホールや
突起の無い状態に形成されるため罠は、薄膜磁気記録媒
体が形成される前のディスク基板の表面が極めて滑らか
な、かつピンホールや突起、シミ等の欠陥の無い状態に
仕上げられなければならない。このため、従来はＵ合金
から取る圧延素板を磁気ディスク基板用に切断し、その
表面會鞘密旋削盤によシ旋削し、研摩した後洗浄・乾燥
し、その上に比較的硬度の高いメッキ法によるＮｉＰ層
や陽極酸化法によるアルマイト層から成る硬質層を形成
し、この硬質層全再度仕上げ研摩し、洗浄・乾燥する工
程がとられて来た。この方法は工程が長く、研摩工程を
２度必喪とすること、洗浄・乾燥工程が多くなるため、
乾燥ムラやＡ／合合金版板自身不純物拳不均−性を反映
した複雑な欠陥を発生し易いという本質的な欠点を有し
ている。High-performance magnetic disks used in magnetic disk devices are thin 1 with high coercive force! ! A magnetic recording medium is a necessary condition, but since such a thin film magnetic recording medium is formed with a uniform thickness and no pinholes or protrusions, the problem is that the disk substrate before the thin film magnetic recording medium is formed. The surface must be extremely smooth and free from defects such as pinholes, protrusions, and stains. For this reason, in the past, rolled blanks made from U alloy were cut into magnetic disk substrates, the surface of which was turned using a dense lathe, polished, then washed and dried, and then a relatively hard The process of forming a hard layer consisting of a NiP layer by plating or an alumite layer by anodic oxidation, polishing the entire hard layer again, cleaning and drying has been adopted. This method requires a long process, requires two polishing steps, and requires many cleaning and drying steps.
It has the essential drawback that it tends to cause uneven drying and complex defects reflecting the non-uniformity of impurities in the A/composite alloy plate itself.

この発明は、上述のような磁気ディスク基板の表面処理
法に関する欠点を帛消し、簡便かつ欠陥の少い表面処理
法を提供することを目的とするもので、その特徴は、磁
気ディスクの磁気記録媒体を形成する前の基板表面に：
、有機物層を塗布する工程と、前記有機物層を加熱処理
する工程とを含むことにあり、これによって製造プロセ
スを簡便にし、しかも欠陥を少くし製造コス）１下げる
という効果を有する。The present invention aims to eliminate the drawbacks of the above-mentioned surface treatment method for magnetic disk substrates, and to provide a simple surface treatment method with fewer defects. On the substrate surface before forming the medium:
, includes a step of applying an organic layer and a step of heat-treating the organic layer, which has the effect of simplifying the manufacturing process, reducing defects, and lowering the manufacturing cost.

次に、この発明について図面を用いさらに詳細に説明す
る。図は本発明の実施例を示す工程図で、ディスク基板
となるアルミニウム合金から成る圧嬌累材１をディスク
板状に切断しさらに表面を表面粗さ１．０μｍ程度にな
るように平面研削する（工程体）→（ｂ））。次いで表
面洗浄−乾燥後この表面に本発明の１＃徴である有機物
層３を塗布し加熱処理する（工程（Ｃ））。この有機物
Ｎ４３は接着力があってｌμＷＬ程度に薄く塗布できる
熱硬化型樹脂が望ましく、そのような−例は周知のフォ
トレジストである。例えばＡＺ−１３５０Ｊ　（シラプ
レー社商品名）を用いた場合、スピン塗布法で塗布後２
５０〜３５０℃で約１時間熱処理を行えばよい。この後
、厚さ百乃至数千ＡのＣｒｔＴｉ、Ｎｏ等のスパッタ膜
もしくは蒸着膜による密着強化膜４ｔ−形成する（工程
（ｄ））。Next, this invention will be explained in more detail using the drawings. The figure is a process diagram showing an embodiment of the present invention, in which an indentation material 1 made of an aluminum alloy that will become a disk substrate is cut into a disk shape, and the surface is ground to a surface roughness of about 1.0 μm. (Process body)→(b)). Next, after surface cleaning and drying, an organic layer 3, which is the #1 feature of the present invention, is applied to the surface and heat-treated (step (C)). This organic material N43 is preferably a thermosetting resin that has adhesive strength and can be applied as thin as 1 μWL, and an example of such a resin is the well-known photoresist. For example, when using AZ-1350J (product name of Silapray Co., Ltd.), 2
Heat treatment may be performed at 50 to 350°C for about 1 hour. Thereafter, an adhesion reinforcing film 4t is formed by sputtering or vapor deposition of CrtTi, No, etc. to a thickness of 100 to several thousand amps (step (d)).

これによってディスク基板表面は過度の硬度を持ち、そ
の表面粗さは工程（ａ）のレベルより数段改良され、１
００Ａ以下となり、しかも欠陥の数は極めて少くなった
。As a result, the surface of the disk substrate has excessive hardness, and its surface roughness is improved by several steps from the level of step (a).
00A or less, and the number of defects was extremely small.

なお磁気ディスクとして光敗するには、このよ上述のよ
うに、本発明によれば研摩工程を簡略化し、洗浄−乾燥
工程の数を少くして１ｆＬ燥ムラの発生を少くすると同
時にアルミニウム合金素板１の持つ不純物や不均一性に
よる欠陥の発生をシャットアウトしているため、欠陥の
発生を極めて少くしているという長所があり、このこと
が磁気ディスクの価格低下に大きく貢献している。In order to achieve optical failure as a magnetic disk, the present invention simplifies the polishing process, reduces the number of cleaning and drying processes, and reduces the occurrence of 1fL drying unevenness, as described above, and at the same time, the aluminum alloy element Since the occurrence of defects due to impurities and non-uniformity of the plate 1 is shut out, it has the advantage of extremely reducing the occurrence of defects, and this greatly contributes to lowering the price of magnetic disks.

【図面の簡単な説明】[Brief explanation of the drawing]

図は本発明を実施するための工程管示した図で、図にお
いて ｌ・・・アルミニウム合金基板（ディスク基板）２・・
・研削代　３・・・有機物層　４・・・密着強化膜５・
・・磁気記録媒体　６・・・保腺膜である。 −２３／The figure shows a process tube for carrying out the present invention. In the figure, l...aluminum alloy substrate (disk substrate) 2...
・Grinding allowance 3...Organic layer 4...Adhesion reinforcement film 5・
...Magnetic recording medium 6...Gland-retaining membrane. -23/

Claims (1)

【特許請求の範囲】 １、磁気ディスク装置に使われる磁気ディスクの磁気記
録媒体を形成する前の基板表面に、有機物層を塗布する
工程と、前記有機物を加熱処理する工程とを含むことを
特徴とする６気ディスク基板の表面処理法。 ２、　　有Ｉｔ物層がフォトレジストであることを特徴
とする特許請求の範囲第１項記載の磁気ディスク基板の
表面処理法。 ３、有機物層の上に密着強化膜が形成されていることを
特徴とする特許請求の範囲第１項及び第２項記載の磁気
ディスク基板の表面処理法。[Claims] 1. A method comprising the steps of applying an organic material layer to the surface of a substrate before forming a magnetic recording medium of a magnetic disk used in a magnetic disk device, and heat-treating the organic material. A surface treatment method for a 6-layer disk substrate. 2. The method for surface treatment of a magnetic disk substrate according to claim 1, wherein the It-containing layer is a photoresist. 3. A method for surface treatment of a magnetic disk substrate according to claims 1 and 2, characterized in that an adhesion reinforcing film is formed on the organic layer.
JP7311082A 1982-04-30 1982-04-30 Surface treatment of substrate of magnetic disk Pending JPS58189836A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7311082A JPS58189836A (en) 1982-04-30 1982-04-30 Surface treatment of substrate of magnetic disk

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7311082A JPS58189836A (en) 1982-04-30 1982-04-30 Surface treatment of substrate of magnetic disk

Publications (1)

Publication Number Publication Date
JPS58189836A true JPS58189836A (en) 1983-11-05

Family

ID=13508813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7311082A Pending JPS58189836A (en) 1982-04-30 1982-04-30 Surface treatment of substrate of magnetic disk

Country Status (1)

Country Link
JP (1) JPS58189836A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2610753A1 (en) * 1987-02-11 1988-08-12 Commissariat Energie Atomique MAGNETIC DISK MEMORY SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2610753A1 (en) * 1987-02-11 1988-08-12 Commissariat Energie Atomique MAGNETIC DISK MEMORY SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME

Similar Documents

Publication Publication Date Title
JPS58189836A (en) Surface treatment of substrate of magnetic disk
JPS58137146A (en) Optical recording and reproducing disc
JPS58189837A (en) Magnetic disk
JP2792186B2 (en) Manufacturing method of optical recording medium
JPH06103617A (en) Stamper for optical disk and production of substrate
JPH03224144A (en) Optical disk substrate
JPH052779A (en) Production of stamper
JPS63105986A (en) Production of stamper for optical disk
JPH02172041A (en) Manufacture of stamper for optical disk
JPS61222044A (en) Manufacture of optical disc
JPH01122022A (en) High-density floppy disk
JPH0630173B2 (en) Method for manufacturing stamper for optical disk
JPS62226424A (en) Production of magnetic disk substrate
JPS63259852A (en) Information recording carrier consisting of thin sheet
JPS59124025A (en) Magnetic recording medium
JPS6316408A (en) Formation of film for thin film magnetic head
JPS61275839A (en) Formation of photoresist film
JPS62132215A (en) Magnetic recording medium
JPS5954037A (en) Production of substrate for magnetic disc
JPS6195936A (en) Composite substrate
JPH01122023A (en) High-density floppy disk
JPH02282942A (en) Optical disk and production thereof
JPS5950402A (en) Method for forming thin film of optical parts made of synthetic resin
JPS605418A (en) Base plate for magnetic disc
JPS6126936A (en) Magnetic disk