JPS58171665A - Production of ultrasonic probe - Google Patents
Production of ultrasonic probeInfo
- Publication number
- JPS58171665A JPS58171665A JP5471382A JP5471382A JPS58171665A JP S58171665 A JPS58171665 A JP S58171665A JP 5471382 A JP5471382 A JP 5471382A JP 5471382 A JP5471382 A JP 5471382A JP S58171665 A JPS58171665 A JP S58171665A
- Authority
- JP
- Japan
- Prior art keywords
- matching layer
- plate
- matching
- ultrasonic probe
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
Description
【発明の詳細な説明】 本発明は、表面に２重整合層を有するセラミ。[Detailed description of the invention] The present invention is a ceramic having a double matching layer on the surface.
り圧電素子等からなる超音波断層装置用探触子の製造方
法に関するものである。The present invention relates to a method of manufacturing a probe for an ultrasonic tomography device made of a piezoelectric element or the like.
一般に、超音波によって被検体の断層影像を現出する超
音波断層装置において、その超音波探触子から超音波を
効率よく送受波するために、それぞれ適当な音響インピ
ーダンスを持った材料を２重の層にして振動子前面に付
与することによって探触子を構成することが知られてい
る。そして、この層の一層の厚さは用いる材料と超音波
の周波数によって異なるが、はぼ１００μｍ程度が普通
である。Generally, in an ultrasonic tomography device that uses ultrasonic waves to create a tomographic image of a subject, two layers of material each having an appropriate acoustic impedance are used to efficiently transmit and receive ultrasonic waves from the ultrasonic probe. It is known that a probe is constructed by forming a layer of and applying it to the front surface of a vibrator. The thickness of this layer varies depending on the material used and the frequency of the ultrasonic waves, but is usually about 100 μm.
従来、このような２重整合層を有する超音波探触子を製
造するにあたっては、セラミ、り系振動子等の前面に、
整合層を形成するだめの樹脂が流出しないように囲いを
設け、この囲いの中に１〜２朋程度の厚さで樹脂を流し
込み、この樹脂が硬化するまで約１日の間装置した後、
精密な研磨機で所定の厚さく約１００μｍ）に研磨し、
さらに同様な工程をもう一度繰返すという方法が採用さ
れていた。Conventionally, when manufacturing an ultrasonic probe with such a double matching layer, a layer was placed on the front side of the ceramic or phosphor transducer, etc.
An enclosure is provided to prevent the resin forming the matching layer from flowing out, and the resin is poured into the enclosure to a thickness of about 1 to 2 mm, and the apparatus is left in the apparatus for about one day until the resin hardens.
Polished to a predetermined thickness of approximately 100 μm using a precision polishing machine,
The method used was to repeat the same process once again.
しかしながら、このような従来の探触子の製造方法では
、製品を得るまでに日数がかかり、１だ、整合層の大部
分を研磨によって捨ててしまうので材料の歩留りが悪く
、さらに、整合層一層の厚さを１００±５μｍという寸
法精度に保たねばならないため研磨に細心の注意を払う
必要があるなどの問題点があった。その上、最近では超
音波の周波数も５〜１０ＭＨｚと高くなり、整合層の厚
さ′に４０〜７０μｍ程度の寸法が要求されるようにな
ってきたことから、研磨作業も容易でなく、この点から
も従来法の改善が要求されていた。However, with such conventional probe manufacturing methods, it takes several days to obtain a product, and first, most of the matching layer is discarded by polishing, resulting in a poor material yield. There were problems such as the need to pay close attention to polishing because the thickness must be maintained at a dimensional accuracy of 100±5 μm. Furthermore, recently, the frequency of ultrasonic waves has increased to 5 to 10 MHz, and the thickness of the matching layer is now required to be approximately 40 to 70 μm, making polishing work difficult and difficult. Improvements to the conventional method were also required from this point of view.
本発明の目的は、前記問題を解消し、表面に２重の極薄
整合層を有する超音波の送受波効率のよい超音波探触子
を、音響整合層材料の歩留り良く、短９時間に、簡単容
易に製造する方法を提供することにある。An object of the present invention is to solve the above-mentioned problems and to provide an ultrasonic probe having a double ultra-thin matching layer on the surface with high efficiency in transmitting and receiving ultrasonic waves, with a high yield of acoustic matching layer material, and in a short time of 9 hours. The purpose is to provide a simple and easy manufacturing method.
本発明は、前記目的を達成するためになされたものであ
り、その特徴は、第１整合層と同一厚さのスペ−サーを
介して対向させた定盤間でエポキシ樹脂等の第１整合層
材料融液を固化した後、前記スペ−サーを、それよりも
第２整合層の厚さ分だけ厚い寸法のものとしてから、固
化した第１整合層材料と一方の定盤との間で第２整合層
材料融）を固化し、次いで、このようにして得られた２
層の整合層からなるシート材の第１整合層と振動子とを
、第１整合層と同じ材質の接着剤を用いて接着して超音
波探触子を得ることにある。The present invention has been made to achieve the above object, and is characterized by a first matching layer made of epoxy resin or the like between surface plates facing each other via a spacer having the same thickness as the first matching layer. After the layer material melt is solidified, the spacer is made thicker by the thickness of the second matching layer, and then is placed between the solidified first matching layer material and one surface plate. The second matching layer material (molten) is solidified, and then the thus obtained 2
The object of the present invention is to obtain an ultrasonic probe by bonding a vibrator to a first matching layer of a sheet material made of matching layers using an adhesive made of the same material as the first matching layer.
すなわち、本発明は、所定の材料で所定の厚さの音響整
合層シートを作り、さらにこのシートの上に別の整合層
材料を必要な厚さに付加して２重層からなるシートを予
め作成し、これを振動子に合わせた所定の大きさに切断
して、振動子とシートの接着には、そのシートと同じ材
料をもって接着剤とすることにより、高品質の超音波探
触子を簡単に短時間で、しかも低コストで製造すること
を骨子としているものである。That is, in the present invention, an acoustic matching layer sheet of a predetermined thickness is made from a predetermined material, and another matching layer material is added to the required thickness on top of this sheet to prepare a double layer sheet in advance. Then, by cutting this into a predetermined size that matches the transducer, and using the same material as the sheet as an adhesive to bond the transducer and the sheet, it is easy to make a high-quality ultrasonic probe. The main idea is to manufacture the product in a short time and at low cost.
なお、本発明において使用する音響整合層シート材料、
振動子及び振動子と整合層との接着手段は、特別なもの
に限られることなく、周知のいずれのものでも採用する
ことが可能である。Note that the acoustic matching layer sheet material used in the present invention,
The vibrator and the adhesive means for bonding the vibrator and the matching layer are not limited to any special type, and any known type can be used.
以下、実施例により本発明の詳細な説明する。Hereinafter, the present invention will be explained in detail with reference to Examples.
まず、第１図に概略構成図で示しだように、例えばステ
ンレス環の定盤１の上に５ｍｍ厚程度で表面が鏡面研磨
されたフッ素樹脂板２を載せる。このフッ素樹脂板２は
、エポキシ系樹脂等の音響整合層が定盤１に接着してし
まって剥離困難となるのを防止するだめのものであって
一フ、素樹脂に限らず、整合層材料との接着力の弱い材
料ならばどのようなものでも適用することができる。つ
いで、この上に第１整合層として必要な厚さを持った例
えばステンレス環のスペーサー６を、図示ノ如く約５０
ｍｍ間隔で並べ、このスペーサー６の間に第１整合層材
料（例えばエピコート、エコボンド等エポキシ系樹脂に
タングステン粉末を混ぜたもの）４を流し込む。その後
、この上にやはり第１整合層材料４が接着しないフ、素
樹脂等の表面研磨板６を載せ、゛さらに重しとなる定盤
７を置いて、第１整合層材料４が固化するのを待つ。第
１整合層材料４の固化が終了する頃を見計らって、定盤
７及び鏡面研磨フッ素樹脂板２を取りはずし、スペーサ
ー３をそれよりも第２整合層の厚さ分だけ厚い寸法のも
のに取り換えて、前述と同様な工程でポリウレタン等の
第２整合層を第１整合層上に形成する。この場合、スペ
ーサー６を第２整合層分だけ厚い寸法のものに取り換え
る変わりに、第２整合層と同じ厚さのスペーサーを、第
１工程で使用したスペーサーの上忙重ねて設置するよう
にしてもよいことはもちろんである。First, as shown in the schematic diagram of FIG. 1, a fluororesin plate 2 having a mirror-polished surface and having a thickness of about 5 mm is placed on a surface plate 1 made of, for example, a stainless steel ring. This fluororesin plate 2 is intended to prevent the acoustic matching layer made of epoxy resin or the like from adhering to the surface plate 1 and becoming difficult to peel off. Any material can be used as long as it has a weak adhesion to other materials. Next, a spacer 6 made of, for example, a stainless steel ring having a thickness necessary as a first matching layer is placed on top of the spacer 6 at a thickness of about 50 mm as shown in the figure.
The first matching layer material (for example, a mixture of tungsten powder and epoxy resin such as Epikote and Ecobond) 4 is poured between the spacers 6 at intervals of mm. After that, a surface polishing plate 6 made of base resin or the like is placed on top of this to prevent the first matching layer material 4 from adhering, and a surface plate 7 is placed as a weight to solidify the first matching layer material 4. wait for. When the first matching layer material 4 has finished solidifying, remove the surface plate 7 and the mirror-polished fluororesin plate 2, and replace the spacer 3 with one that is thicker by the thickness of the second matching layer. Then, a second matching layer made of polyurethane or the like is formed on the first matching layer in the same process as described above. In this case, instead of replacing the spacer 6 with one that is thicker than the second matching layer, a spacer with the same thickness as the second matching layer is placed on top of the spacer used in the first step. Of course it's a good thing.
さて、流し込んだ第２整合層材料５が固化した後、定盤
１及び７．鏡面研磨フッ素樹脂板２及び６、そしてスペ
ーサー３を取りはずすと、第２図に示したような、第１
整合層材料４と第２整合層材料５とが一体接合した２重
整合層シートが得られる。そこで、これを振動子に必要
な大きさに切暫し、第１整合層材料と同じ材料を用いて
、２重整合層材料の第１整合層側と振動子とを接着し、
超音波探触子を形成する。このとき、第１整合層材料と
同じ材料を用いて第１整合層と振動子とを接着する理由
は、接着層に他の音響インピーダンスのものが入らない
ようにするためである。Now, after the poured second matching layer material 5 has solidified, the surface plates 1 and 7. When the mirror-polished fluororesin plates 2 and 6 and the spacer 3 are removed, the first
A double matching layer sheet is obtained in which the matching layer material 4 and the second matching layer material 5 are integrally joined. Therefore, this was cut to the size required for the vibrator, and using the same material as the first matching layer material, the first matching layer side of the double matching layer material and the vibrator were bonded.
Form an ultrasound probe. At this time, the reason why the first matching layer and the vibrator are bonded using the same material as the first matching layer material is to prevent objects of other acoustic impedance from entering the adhesive layer.
以上説明したように、本発明によれば、以下の効果を得
ることができる。As explained above, according to the present invention, the following effects can be obtained.
（ａ） 従来法において９０％以上の整合層用材料を
研磨によって捨てていたのが、１０％程度の量に抑える
ことができる。(a) In the conventional method, more than 90% of the material for the matching layer was discarded by polishing, but the amount can be reduced to about 10%.
（ｂ）従来法に比して、研磨工程が省略されるかわりに
接着工程を必要とすることになるが、製造時間にして差
引き１０分以上の短縮が可能となる。(b) Compared to the conventional method, the polishing step is omitted and an adhesion step is required, but the manufacturing time can be reduced by more than 10 minutes.
ノ
（ｃ）研磨による方法では困難な、５０μｍ弱程度０厚
さの整合層でも製造可能となる。(c) It becomes possible to manufacture a matching layer with a zero thickness of about 50 μm, which is difficult to achieve with the polishing method.
第１図は、本発明の超音波探触子の製造方法における２
重音響整合層の形成工程を示した概略構成図、第２図は
、２重整合層シートの構成図である。
１．７ 定盤
２．６ 鏡面研磨フッ素樹脂板
３ スペーサー ４ 第１整合層材料５ 第２整合
層材料
代理人 弁理士 秋 １）収 喜
笛１１ｉｌ
第２圓FIG. 1 shows 2 in the method of manufacturing an ultrasound probe of the present invention.
FIG. 2 is a schematic diagram showing the formation process of a double acoustic matching layer, and FIG. 2 is a diagram of a double matching layer sheet. 1.7 Surface plate 2.6 Mirror-polished fluororesin plate 3 Spacer 4 First matching layer material 5 Second matching layer material Agent Patent attorney Aki 1) Collection Kibue 11il Second circle
Claims (1)
定盤間で第１整合層材料融液を固化した後、前記スペー
サーを、それよりも第２整合層分だけ厚い寸法のものと
してから、固化した第１整合層材料と一方の定盤との間
で第２整合層材料融液を固化し、次いで、このようにし
て得られた２層の整合層からなるシート材の第１整合層
と振動子とを、第１整合層と同じ材質の接着剤を用いて
接着することを特徴とする超音波探触子の製造方法。After solidifying the first matching layer material melt between surface plates facing each other via a spacer having the same thickness as the first matching layer, the spacer is set to be thicker than the spacer by the second matching layer. Then, the melt of the second matching layer material is solidified between the solidified first matching layer material and one surface plate, and then the first of the sheet material consisting of the two matching layers thus obtained is A method for manufacturing an ultrasonic probe, comprising bonding a matching layer and a transducer using an adhesive made of the same material as the first matching layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5471382A JPS58171665A (en) | 1982-04-01 | 1982-04-01 | Production of ultrasonic probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5471382A JPS58171665A (en) | 1982-04-01 | 1982-04-01 | Production of ultrasonic probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58171665A true JPS58171665A (en) | 1983-10-08 |
| JPH049000B2 JPH049000B2 (en) | 1992-02-18 |
Family
ID=12978440
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5471382A Granted JPS58171665A (en) | 1982-04-01 | 1982-04-01 | Production of ultrasonic probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58171665A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60112399A (en) * | 1983-11-22 | 1985-06-18 | Nec Corp | Method for producing ultrasonic probe |
| JP2009528783A (en) * | 2006-03-02 | 2009-08-06 | ビジュアルソニックス インコーポレイテッド | Ultrasonic matching layer and transducer |
| US9502023B2 (en) | 2013-03-15 | 2016-11-22 | Fujifilm Sonosite, Inc. | Acoustic lens for micromachined ultrasound transducers |
| US10265047B2 (en) | 2014-03-12 | 2019-04-23 | Fujifilm Sonosite, Inc. | High frequency ultrasound transducer having an ultrasonic lens with integral central matching layer |
-
1982
- 1982-04-01 JP JP5471382A patent/JPS58171665A/en active Granted
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60112399A (en) * | 1983-11-22 | 1985-06-18 | Nec Corp | Method for producing ultrasonic probe |
| US10478859B2 (en) | 2006-03-02 | 2019-11-19 | Fujifilm Sonosite, Inc. | High frequency ultrasonic transducer and matching layer comprising cyanoacrylate |
| JP2009528783A (en) * | 2006-03-02 | 2009-08-06 | ビジュアルソニックス インコーポレイテッド | Ultrasonic matching layer and transducer |
| JP2012130780A (en) * | 2006-03-02 | 2012-07-12 | Visualsonics Inc | Ultrasonic matching layer and transducer |
| US8343289B2 (en) | 2006-03-02 | 2013-01-01 | Visualsonics Inc. | High frequency ultrasonic transducer and matching layer comprising cyanoacrylate |
| JP2013153540A (en) * | 2006-03-02 | 2013-08-08 | Visualsonics Inc | Ultrasonic matching layer and transducer |
| US8847467B2 (en) | 2006-03-02 | 2014-09-30 | Fujifilm Sonosite, Inc. | High frequency ultrasonic transducer and matching layer comprising cyanoacrylate |
| US9520119B2 (en) | 2006-03-02 | 2016-12-13 | Fujifilm Sonosite, Inc. | High frequency ultrasonic transducer and matching layer comprising cyanoacrylate |
| US9502023B2 (en) | 2013-03-15 | 2016-11-22 | Fujifilm Sonosite, Inc. | Acoustic lens for micromachined ultrasound transducers |
| US10013969B2 (en) | 2013-03-15 | 2018-07-03 | Fujifilm Sonosite, Inc. | Acoustic lens for micromachined ultrasound transducers |
| US10770058B2 (en) | 2013-03-15 | 2020-09-08 | Fujifilm Sonosite, Inc. | Acoustic lens for micromachined ultrasound transducers |
| US10265047B2 (en) | 2014-03-12 | 2019-04-23 | Fujifilm Sonosite, Inc. | High frequency ultrasound transducer having an ultrasonic lens with integral central matching layer |
| US11083433B2 (en) | 2014-03-12 | 2021-08-10 | Fujifilm Sonosite, Inc. | Method of manufacturing high frequency ultrasound transducer having an ultrasonic lens with integral central matching layer |
| US11931203B2 (en) | 2014-03-12 | 2024-03-19 | Fujifilm Sonosite, Inc. | Manufacturing method of a high frequency ultrasound transducer having an ultrasonic lens with integral central matching layer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH049000B2 (en) | 1992-02-18 |
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