JPS58169853A - Target of rotating anode x-ray tube - Google Patents
Target of rotating anode x-ray tubeInfo
- Publication number
- JPS58169853A JPS58169853A JP5108582A JP5108582A JPS58169853A JP S58169853 A JPS58169853 A JP S58169853A JP 5108582 A JP5108582 A JP 5108582A JP 5108582 A JP5108582 A JP 5108582A JP S58169853 A JPS58169853 A JP S58169853A
- Authority
- JP
- Japan
- Prior art keywords
- target
- graphite
- plates
- metallic
- ray tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
- H01J35/108—Substrates for and bonding of emissive target, e.g. composite structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/083—Bonding or fixing with the support or substrate
- H01J2235/084—Target-substrate interlayers or structures, e.g. to control or prevent diffusion or improve adhesion
Abstract
Description
【発明の詳細な説明】
本発明はＸ線管に係シ、特に、回転陽極形Ｘ４１管の大
容量化に好適な陽極ターゲットに関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an X-ray tube, and more particularly to an anode target suitable for increasing the capacity of a rotating anode type X41 tube.
Ｘ線管の陽極ターゲットは陰極からの電子照射により高
温に加熱されるので高融点の金属が使用される。、また
、Ｘ線の出力は原子番号に比例して大きくなるから、Ｘ
線管のターゲットには原子番号の大きいものが使用され
る。The anode target of an X-ray tube is heated to a high temperature by electron irradiation from the cathode, so a metal with a high melting point is used. , Also, since the output of X-rays increases in proportion to the atomic number,
Targets with high atomic numbers are used for the ray tube targets.
従来、ターゲット材料として、タングステンやモリブデ
ンあるいはモリブデンにタングステンを彊りあわせたも
のが使用されている。しかし、これらの材料は比重が大
きいため、回転陽極形のＸ線管では回転陽極を支持して
いる玉軸受に作用する荷重が増大するため、大形化、す
なわち、熱容量の増大が困難である。したがって、ター
ゲットの大形化に対しては比重の小さな材料に上記した
金属を張り合せた熱容量の大きなターゲットが使用され
はじめた。Conventionally, tungsten, molybdenum, or a combination of molybdenum and tungsten has been used as a target material. However, because these materials have a high specific gravity, the load acting on the ball bearings that support the rotating anode increases in rotating anode-type X-ray tubes, making it difficult to increase the size, that is, increase the heat capacity. . Therefore, in order to increase the size of targets, targets with large heat capacity, which are made by laminating the above metals onto materials with low specific gravity, have begun to be used.
第１図は公知の張り合せターゲラ）１示すもので、比重
の小さな材料としてグラファイト３が用いられ、グラフ
ァイト３に金属板（タングステン）２會張り合せてター
ゲットｌが構成されている。FIG. 1 shows a known laminated target (1) in which graphite (3) is used as a material with low specific gravity, and two metal plates (tungsten) are laminated to graphite (3) to form a target (1).
ここで、８面は陰極からの電子衝撃を受ける部分で、タ
ーゲットｌ＃ｉ回転軸４にナツト５で締結されて＾る。Here, the 8th surface is a part that receives electron impact from the cathode, and is fastened to the target l#i rotating shaft 4 with a nut 5.
また、この金属板２はグラファイト３にＣＶＤ法（化学
蒸着法）によるか鑞接台などにより張り合せられる。The metal plate 2 is attached to the graphite 3 by CVD (chemical vapor deposition) or by a soldering stand.
しかし、と記した張り合せターゲットは熱容量が大きく
、かつ、輻射による熱放散性は良いが、高温に金属板２
が加熱されるとグラファイト３と金属板２の熱膨張係数
が異なるため、接合部で剥離することがある。ま九、タ
ーゲットｌは通常φ１００＠ＩＩのものが多用されてい
るが、φ１５０ｍに大径化するとグラファイトの強度が
小さいため、１１００００ｒｐ で使用すると遠心荷１
ｉに耐えられなくなり破壊することがある。さらに、金
属板２ｔグラフアイト３にＣＶＤ法により張り合せた−
のＦｉＣＶＤに長時間を要し、かつ、高価なガス會多量
必要とするので金属製のターゲットに比較し、製作コス
トが高い欠点がある。また、蝋接合の場合、一様な接合
が困難であり、密着強度のばらつきが大きい欠点がある
。However, although the bonded target described above has a large heat capacity and good heat dissipation through radiation, the metal plate 2
When heated, the graphite 3 and the metal plate 2 have different coefficients of thermal expansion, so they may peel off at the joint. Nine, the target l is usually φ100@II, but when the diameter is increased to φ150m, the strength of graphite is low, so when used at 110,000 rpm, the centrifugal load 1
It may not be able to withstand i and may be destroyed. Furthermore, it was laminated to a metal plate 2t Graphite 3 by CVD method.
FiCVD takes a long time and requires a large amount of expensive gas, so it has the disadvantage of high manufacturing cost compared to metal targets. Furthermore, in the case of solder bonding, it is difficult to achieve uniform bonding, and there is a drawback that there are large variations in adhesion strength.
本発明の目的は熱容量が大きく、高強度安価な陽極ター
ゲット？提供するＫある。Is the purpose of the present invention an anode target with large heat capacity, high strength, and low cost? There is K to offer.
本発明の特徴はグラファイト全体管金属板で覆い金属板
相互の接合は拡散接合法ｔ１金属板とグラファイトの接
合には鑞接金倉併用したことにある。The feature of the present invention is that the entire graphite tube is covered with a metal plate and the metal plates are joined together by diffusion bonding method t1.The metal plate and the graphite are joined together using a solder welding method.
第２図は本発明によるターゲットの実施例管示す。ター
ゲットｌは金轡板２ａ、２ｂ及びグラファイト３で構成
される。′を九、金属板２ａと２ｂはグラファイト３全
体を覆い、ターゲラ）１の外周ｔの部分で拡散接合か蝋
付けにより張り合わせる。FIG. 2 shows an exemplary tube of a target according to the invention. The target l is composed of metal plates 2a, 2b and graphite 3. 9, the metal plates 2a and 2b cover the entire graphite 3, and are pasted together at the outer periphery t of the target layer 1 by diffusion bonding or brazing.
第３図は他の実施例を示す。グラファイト３と金属板２
ａ、２ｂを接合するために、中間に金属層６會設けたも
のである。この場合、金属層は、めらかしめ、ＣＶＤ法
により薄くつけておき、この金属層６と金属板２ａ、２
ｂとを接合する。さらに、ターゲット外周部は上記の方
法により金属板？相互に接合する。FIG. 3 shows another embodiment. Graphite 3 and metal plate 2
In order to join a and 2b, six metal layers are provided in the middle. In this case, the metal layer is smoothed and thinly applied by the CVD method, and the metal layer 6 and the metal plates 2a, 2
b. Furthermore, the outer periphery of the target is made from a metal plate using the above method. Join each other.
本発明によれば、ターゲット全体の機械的強度が増大す
るため、高速回転においても従来のような剥離及び破壊
が起こらない。また、ターゲットの大径化ができるので
、Ｘ線出力を増大させることができるなどの効果がある
。According to the present invention, the mechanical strength of the entire target is increased, so that peeling and breakage as in the prior art do not occur even during high-speed rotation. Furthermore, since the diameter of the target can be increased, the X-ray output can be increased.
さらに、回転軸にターゲットを強固に締結でき、かつタ
ーゲット全体が金属板で覆われているので組立作業時に
破損する心配がない。また、従来のＣＶＤ法による金属
板接合に比較し、接合時間の大幅な短縮ができるので製
作コストが安価となる。Furthermore, since the target can be firmly fastened to the rotating shaft and the entire target is covered with a metal plate, there is no risk of damage during assembly work. Furthermore, compared to metal plate joining using the conventional CVD method, the joining time can be significantly shortened, resulting in lower manufacturing costs.
嬉１図は従来のターゲットの断面図、８２図及び第３図
は本発明の実施例の断面図である。
ｌ・・・ターゲット、２．２ａ、２ｂ・・・金属板、３
・・・グラファイト、４・・・回転軸、５・・・ナツト
、６・・・金属層。
早 ｌ 日
第 ３ 月Figure 1 is a sectional view of a conventional target, and Figures 82 and 3 are sectional views of an embodiment of the present invention. l...Target, 2.2a, 2b...Metal plate, 3
...Graphite, 4...Rotating shaft, 5...Nut, 6...Metal layer. Early 1st day of 3rd month
Claims (1)
ァイトで構成し、かつ、このグラファイト全体を金属板
で覆ったことを特徴とする回転陽極Ｘ線管のターゲット
。1. A rotating anode X-ray tube target characterized in that the anode target is made of graphite and the entire graphite is covered with a metal plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5108582A JPS58169853A (en) | 1982-03-31 | 1982-03-31 | Target of rotating anode x-ray tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5108582A JPS58169853A (en) | 1982-03-31 | 1982-03-31 | Target of rotating anode x-ray tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58169853A true JPS58169853A (en) | 1983-10-06 |
Family
ID=12876973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5108582A Pending JPS58169853A (en) | 1982-03-31 | 1982-03-31 | Target of rotating anode x-ray tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58169853A (en) |
-
1982
- 1982-03-31 JP JP5108582A patent/JPS58169853A/en active Pending
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