JPS58161842A - Apparatus for measuring lens performance - Google Patents

Abstract

PURPOSE:To measure the performance of a lens easily and reliably, by aligning the optical axis of the lens to be measured and the optical axis of a light source by means of a position regulator and an angle regulator, and observing as well as picking up a magnified image formed through a detachable transparent member and a magnification objective lens and the like. CONSTITUTION:The optical axis of the light beam from a minute light source such as a laser through a light source optical system constituted by a prism 14 and the like and the optical axis of a lens 10 are aligned with each other and the lens 10 is focused by a linear regulator 2 which moves orthogonal triaxial moving tables 21, 23, 25 by means of micrometers 22, 24, 26, respectively. Moreover, the direction of the optical axis of the lens 10 is regulated by an angle regulator 4. In such an arrangement that a transparent plate is interposed between the lens 10 and its focal point, a magnified focal image corresponding to the lens performance is formed through a detachable transparent plate 32 having a predetermined thickness by the use of either of magnification objective lenses 30 and 31 which are different in magnification from each other. The magnified image is divided into two through a prism device 6, and one of the divided image parts is observed, while the other is picked up by a TV camera 7. By this arrangement, the lens can be easily and reliably regulated to its focal position for measuring the performance thereof.

Description

【発明の詳細な説明】 本発明はレンズ検査装置に関し、特に単体レンズ又はレ
ンズ系の性能、例えば結像状態、あるい祉その焦点の寸
法、形状さらに祉焦点距離、その他の性能を測定する装
置Ｋ１１ｌする。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a lens inspection device, and more particularly to a device for measuring the performance of a single lens or a lens system, such as the imaging state, the size and shape of its focal point, its focal length, and other performances. K11l.

レンズ焦点の直径は最小２電クセンＳｔであシ、仁の寸
法形状を正確に測定配置する仁とは生産レンズの母型決
定の際等に極めて重畳である。しかし、これに使用する
丸めに社、焦点像を高倍率顕微−で拡大する必要がある
が現在使用されている各１１４１ｉ材の組合せでは焦点
位置へ探索が著しく困―であり、実用性のあゐ検査装置
として使用可能のレンズ４１無測定装置は開発されてい
ない。The diameter of the focal point of the lens is at least 2 mm St, and the diameter of the lens, which accurately measures and arranges the size and shape of the lens, is extremely overlapping when determining the matrix of a production lens. However, it is necessary to magnify the focal image using a high-magnification microscope, but with the currently used combination of 1141i materials, it is extremely difficult to search for the focal position, making it impractical. A lens 41 non-measuring device that can be used as an inspection device has not been developed.

本発明の上鉤は上述の要求に応じられるレンズＪ１１１
１１Ｌ測定装置を提供するにある。The upper hook of the present invention is a lens J111 that can meet the above requirements.
To provide a 11L measuring device.

本発明の実施例によって、レーデ発振儀から供給される
赤外ｌ１ＩｉＩｔ棚定義置光軸に供給し、測定すべきレ
ンズを支持するレンズ保持装置をＸ　−Ｙ　ａ２方向に
賃イクロメータ調整装置によりて移＊ｉｉせてレンズ中
心を装置光軸上Ｏ所定点に一致させ、し／ズを角度方向
に回動させてレンズ光軸の方向を装置光軸に一敏させる
。顕微鏡装置には詞＊＊階で使用する丸めの広い視野Ｏ
低倍率対物レンズと、測定段階で使用するための高倍率
対物レンズとを有し、焦点像を拡大する。拡大され九焦
点偉紘螢光板にあてて赤外線を可視光Ｋｆｆｉ換して可
視監視装置として調整段階での毫二ター用とすると共に
半透過プリズムによって−ｍｔ反射してテレビカメラに
送ｐ１焦点像の寸法、形状をテレＣ１／、ンに表示し、
ディノタル化して記憶、演算、表示を行なう、ｌｌ１ｌ
定すべきレンズが透明板を透過した後に焦点上納ぶ構成
である時は、４＃４板と同質の材料の透明部材を測定す
べ自レンズと対物し／ズとの間に介挿する。According to the embodiment of the present invention, the lens holding device that supplies the infrared 11IiIt shelf-defined optical axis supplied from the Lehde oscillator and supports the lens to be measured is moved in the X-Y a2 direction by the micrometer adjustment device. *ii Align the center of the lens with a predetermined point on the optical axis of the device, and rotate the lens in the angular direction to bring the direction of the lens optical axis closer to the optical axis of the device. The microscope equipment has a rounded wide field of view used on the floor.
It has a low magnification objective lens and a high magnification objective lens for use in the measurement stage to magnify the focal image. The infrared rays are magnified and applied to a nine-focus fluorescent plate to convert into visible light (Kffi), which is used as a visible monitoring device for viewing in the adjustment stage, and reflected by a semi-transparent prism (-mt) to be transmitted to a television camera. Display the dimensions and shape on the TV C1/,
Digitalize to store, calculate, and display, ll1l
When the lens to be measured is configured to be placed on the focal point after passing through a transparent plate, a transparent member made of the same material as the 4#4 plate is inserted between the measuring lens and the objective lens.

上述によって、比較的簡単な＊＊０組合せによる実用性
０４いレンズ俳亀副室鋏鰺が得られ１調定過程は容易に
行ない得る。As described above, a practical lens can be obtained by a relatively simple combination of **0, and the adjustment process can be carried out easily.

本発明を例示とした実施例並びに図面につｂて説明する
。The present invention will be described with reference to embodiments and drawings that illustrate the invention.

第１図は本発明によるレンズ焦点測定装置を示し、レー
デ装置１１直線調整装置２、角度調整装置３、レンズ支
持装置４、光学装置５、グリズム装置６、テレビカメラ
装置７、目視装置８の全部又は一部を使用し、レーザに
よって放射されえ赤外線を測定すべき１個のレンズ又は
レンズ系１０にあて、レンｔｌＯの形成する焦点を拡大
してテレビカメラ等によりて測定記鍮する。FIG. 1 shows a lens focus measuring device according to the present invention, which includes all of the Rade device 11 linear adjustment device 2, angle adjustment device 3, lens support device 4, optical device 5, grism device 6, television camera device 7, and viewing device 8. Alternatively, a portion of the infrared rays emitted by a laser may be applied to a single lens or lens system 10 to be measured, and the focal point formed by the lens tlO may be magnified and measured using a television camera or the like.

測定装置本体は防振装置付きの７レーム１１上に載せ、
外界の線動を線断して測定する。上述のすべての機ａは
図示しない制御、演算、増巾勢の回路装置、電源装置を
ｋいてフレーム１１上に取付ける。The measuring device body is placed on a 7 frame 11 equipped with a vibration isolator.
Measures linear motion in the outside world by cutting a line. All of the above-described machines (a) are equipped with control, arithmetic, amplifying circuit devices, and a power supply device (not shown) on the frame 11.

レーデ装置ｌ／ｆｉレーデ発振器１２、光学系１３、ｆ
９ズム装置１４から成シ、所要波長範囲の光束を光軸１
５に供給する。Rade device l/fi Rade oscillator 12, optical system 13, f
A beam of light in the required wavelength range is transmitted from the optical axis 1 to the optical axis 1.
Supply to 5.

直！Ｉ調整装＆２はフレームｌｌ上に固定し九架台２０
上に図の・左右方向に可動の２可動台２１を支持し、２
調整！イクロメータ２２によりてレンｒｌＯのピント位
置調整を行なう、２可動台２１に図に１角方向に可動と
してＸ可動台２３を支持Ｌ、Ｘｌｌ整マイクロメ−７２
４４Ｃよって図に直角方向の調整を行なう、Ｘ可動台２
３に１！Ｉｉ１の上下方向に可動としてＹ可動台２ｓを
支持し、Ｙ調整マイクロメータ２６によって上下方向の
調整を行なう、ＸＹ可動台２３．２５を動かすことによ
って、レン／１０の光軸を光軸１５に一致させる。straight! I fix the adjustment device & 2 on the frame ll and attach it to the 9 stand 20.
It supports two movable bases 21 that are movable in the left and right directions as shown in the figure above.
Adjust! The focus position of the lens rlO is adjusted by the micrometer 22.The X movable base 23 is supported on the 2 movable base 21 and is movable in one angular direction as shown in the figure.
44C makes adjustment in the direction perpendicular to the figure, X movable base 2
1 in 3! The optical axis of Len/10 is aligned with the optical axis 15 by moving the XY movable table 23.25, which supports the Y movable table 2s to move in the vertical direction of Ii1 and performs vertical adjustment using the Y adjustment micrometer 26. Match.

角ｔａｎ装置３とレンズ取付装置４とはレンズｌＯの光
軸の方向を装置光軸１６に一致させる装置であり、第２
．３図によって後述する通り、角ｆｌｌ１ｍ整装置３は
装置角調整のみを行なう、レンズ増付装置４を回転調整
自在として光軸の最大偏差を垂直面に一致させて角度１
１ｍ１１装置３によって俯仰角調整を行なうことによっ
て光軸の方向の修正を行なう。The angle tan device 3 and the lens mounting device 4 are devices for aligning the direction of the optical axis of the lens 10 with the device optical axis 16.
．． As will be described later with reference to FIG. 3, the angle full 1m adjustment device 3 only adjusts the device angle, and the lens extension device 4 is rotatably adjustable so that the maximum deviation of the optical axis coincides with the vertical plane and the angle 1m is adjusted.
The direction of the optical axis is corrected by adjusting the elevation angle using the 1m11 device 3.

光学装置５はレンズｌＯの結ぶ焦点を拡大するための装
置であり、対物レンズとして少なくとも２個使用し、低
倍率対物レンズ３０と高倍本対物レンズ３１　トを有ｔ
ル。低倍率レンズ３（ｌｊモニター用として直線ａｍ装
置１２、角度調整装置３の調整間に使用する。このレン
ズ３０は比較的広い範囲を力・譬−するため、焦点像を
認識するＯＦ１著しく谷鳥であり、モニター用として好
適である。The optical device 5 is a device for enlarging the focal point formed by the lens lO, and uses at least two objective lenses, including a low magnification objective lens 30 and a high magnification objective lens 31.
Le. Low magnification lens 3 (used for LJ monitor while adjusting the linear AM device 12 and angle adjustment device 3. This lens 30 is used for adjusting a relatively wide range, so the OF1 that recognizes the focal image is very sharp. Therefore, it is suitable for monitoring.

この後に高倍率レンｊｅ３１に切換えて所要の計測を行
なう。ピント、角度の微調整段階で使用するための中間
倍率の対物レンズを使用することもできる。Thereafter, the lens is switched to the high magnification lens je31 and required measurements are performed. It is also possible to use an intermediate magnification objective lens for use in the focus and angle fine adjustment stage.

プリズム装置５Ｆｉ−示の例では対物レンズからテレビ
カメラまでの光学系の中間に介挿した半透過ｆ　１７ズ
ムとし、透過赤外ｍは図示しない螢光板に投射されて螢
光を生じ、目視装置８によって目視可能となる０反射赤
外線Ｆ１更に拡大されてテレビカメラ７に供給されて図
示しないテレビジ冒ン及び又は演算処理装置にデータを
供給して測定、記録、表示する。In the example shown in the prism device 5Fi, a semi-transparent f17 prism is inserted in the middle of the optical system from the objective lens to the television camera, and the transmitted infrared light m is projected onto a fluorescent plate (not shown) to generate fluorescent light, which can be used as a viewing device. The reflected infrared rays F1, which are made visible by 8, are further magnified and supplied to the television camera 7, and the data is supplied to a television set and/or an arithmetic processing unit (not shown) for measurement, recording, and display.

本発明によって、レンズｌＯの焦点を所要、の合成樹脂
板、あるいはガラス板等、例えば透明アクリル板を透過
させて結ばせる場合は同じ光学的特性の透明部材３２を
光学装置５０対物レンｔ３１の前に着脱自在に取付ける
０例えばこの透明部材３２を対物レンズ３１に着脱自在
に蝶着することのできる鏡筒体（図示しない）Ｋ１１着
し、この鏡筒体を対物レンズ３１Ｋｍ着して取付けるこ
とによシ構成する。しかして、必ＩＫ応じ比特性の透明
部材３２を予め用意しておくことにより、レンズ１０の
性能測定に応じ九透明部材３２と交換しつつ実施する仁
とができる。According to the present invention, when the focal point of the lens 1O is to be focused by passing through a required synthetic resin plate or glass plate, for example, a transparent acrylic plate, a transparent member 32 having the same optical characteristics is placed in front of the objective lens t31 of the optical device 50. For example, the transparent member 32 is attached to a lens barrel (not shown) K11 that can be detachably hinged to the objective lens 31, and this lens barrel is attached to the objective lens 31Km. Configure everything. By preparing in advance the transparent member 32 with the necessary IK ratio characteristics, it is possible to replace the transparent member 32 with the same transparent member 32 depending on the performance measurement of the lens 10.

赤外線テレビカメラ装置自体轄既知てあ夛、赤外線ピノ
コンの使用によりて波長２ｐｗａｊでの赤外線に対して
＃１定可能感１″を有し、願黴鍾テレビ装置に組合せて
テレピノ曹ンによる表示を行なうと共に信号を中央演算
処Ｓ装置、記憶処理装置に供給して所要のデータとして
処理する。赤外線Ｆｉ斃熟熱効果ある丸め、自動感度制
御回路等ｏｓｍＷＡ路を使用して撮像管の焼付防止を行
なう。The infrared television camera device itself has a known technology, and by using an infrared pinocon, it has a #1 fixed sensitivity of 1'' for infrared rays at a wavelength of 2pwaj, and when combined with a television set, it can be used for display using a telepinocon. At the same time, the signal is supplied to the central processing unit and storage processing unit to be processed as required data.Infrared ray Fi rounding with thermal effect, automatic sensitivity control circuit, etc. are used to prevent image pickup tube burn-in. Let's do it.

［２，３図Ｆｉ！［１図に示した角ｆ−調整置３とレン
ズ保持装置１１４との詳細を示す、こ０１１１１４　Ｏ
基板４１は前述のＹｌｌ！１可動台２５の附属係止具に
よって可動台２５の１１内１面に軸着４２をはぼ光軸１
５に一致させて取付部る。[Figures 2 and 3 Fi! [Details of the angle f-adjustment device 3 and lens holding device 114 shown in FIG.
The substrate 41 is the aforementioned Yll! The optical axis 1 is attached to one surface of the movable base 25 by the attached locking tool of the movable base 25.
Match the mounting part to 5.

基板４１に形成したジャーナル４３．４４に精密軸受４
５．４６を介して軸４７を回転自在に支持し、軸４７を
同着した腕４８に一体とし九傾動板４９に取付ねじ５０
を設ける。傾動板４９の腕４８とは反対ＩＮＫ突出１１
Ｓ５１を設け、マイクロメータ５２をねじこむ、−ｖイ
クロメータ５２の端部５３Ｆｉ板４９の孔５４を通って
突出し、基板４１の凹み５５内のが一ル５６に接触する
ｅマイクロメータ５２のゼロ位置ては基板４１と傾動板
４９０間が図に示す通シ離間し、所要の俯仰角調整を行
なうことが可能である。Precision bearings 4 are mounted on journals 43 and 44 formed on the substrate 41.
5.46, the shaft 47 is rotatably supported, the shaft 47 is integrally attached to the arm 48, and the mounting screw 50 is attached to the nine tilting plate 49.
will be established. The INK protrusion 11 opposite to the arm 48 of the tilting plate 49
S51 is provided and the micrometer 52 is screwed into it, -v the end 53 of the micrometer 52 protrudes through the hole 54 of the Fi plate 49, and the zero position of the micrometer 52 is in contact with the hole 56 in the recess 55 of the substrate 41; In this case, the base plate 41 and the tilting plate 490 are spaced apart from each other as shown in the figure, and the required angle of elevation can be adjusted.

レンズ保持装置１４を傾動板４９の孔５０にねじこむ。The lens holding device 14 is screwed into the hole 50 of the tilting plate 49.

レンズ保持装置４の支持部材６１の取付部６２に外ねじ
を有し、孔５０の内ねじに係合する。The mounting portion 62 of the support member 61 of the lens holding device 4 has an external thread, which engages with the internal thread of the hole 50 .

支持部側６１の一ロ６３と回動部材６４の軸６５との間
は精密軸受装置６６によって＃ｌぼ遊びのない相対回動
可能に支承する０回動部材６４の支持部６７にレンズ保
持部材６８を止めねじ６９等によって取外可能に取付け
る。レンズ保持部材６８は各種型式に応じ九人々のレン
ズマウントとし、内ねじ７０に単体レンズ保持具又はレ
ンズ系の外ねじを取付ける。The lens is held on the support portion 67 of the rotation member 64, which is supported by a precision bearing device 66 for relative rotation with no play between the one end 63 of the support portion side 61 and the shaft 65 of the rotation member 64. The member 68 is removably attached using a set screw 69 or the like. The lens holding member 68 has nine lens mounts according to various types, and a single lens holder or an external thread of a lens system is attached to the internal thread 70.

使用に際して、マイクロメータ５２によって１板４１と
傾動板４９との相対角度をゼロとし、図示しないレンズ
又はレンズ系をレンズ保持部材６８の内ねじ７０に取付
ける。基板４１を紹１図のＹｌｌ１１整可動台２５の前
面に象付ける。ｘ、ｙ。In use, the relative angle between the first plate 41 and the tilting plate 49 is set to zero using the micrometer 52, and a lens or lens system (not shown) is attached to the internal thread 70 of the lens holding member 68. The board 41 is visualized on the front of the Yll11 adjustment movable table 25 in Figure 1. x, y.

ＺＶＳｍを行なり九後に支持部材６１と傾動部材６４と
を相対回動させて最大角度偏差の方向を光軸を含む１１
１面に一致さぜる。ここでマイクロメータ６２によって
俯仰角調整を行なって測定光軸１５にレンズ光軸を一致
させる。この方法によって、一方向の角度調整だけで測
定すべきレンズ系の光軸角１誤差を修正することが出来
る。尚、支持部材６１と回動部材６４との間の相対回動
Ｆｉ機械的又社ステップモータ等によって制御する事も
出来る。After performing ZVSm, the supporting member 61 and the tilting member 64 are rotated relative to each other, and the direction of the maximum angular deviation is set to 11 including the optical axis.
Match the first page. Here, the elevation angle is adjusted using the micrometer 62 to align the lens optical axis with the measurement optical axis 15. With this method, it is possible to correct one error in the optical axis angle of the lens system to be measured by adjusting the angle in only one direction. Incidentally, the relative rotation between the support member 61 and the rotation member 64 can also be controlled mechanically or by a step motor or the like.

第１Ｋレンズ１Ｇを取付けな込状態で各機器の心出し、
調整１を行ない、レーザ発振器１２からの赤外線がレン
ズ系１３．！リズム１４を静て正確に光軸１５Ｋａ−ｐ
て進行するようにする。これを例えば目視装置８の螢光
板上に確認する。Centering each device with the 1st K lens 1G installed,
Adjustment 1 is performed, and the infrared rays from the laser oscillator 12 are transmitted to the lens system 13. ! Rhythm 14 quietly and accurately optical axis 15Ka-p
so that it progresses. This is confirmed, for example, on a fluorescent plate of the viewing device 8.

次にレンズ取付装置４を角ｆｌ＃整装置３のマウントに
取付け、レンズ１０をレンズ取付１１＆４に支持させる
。マウントに対する締付力ＩＩＩＩ＃ｉトルクレンチに
よって所定締付力とし、弛み又は歪みによる誤差を防ぐ
。Next, the lens attachment device 4 is attached to the mount of the angle fl# adjustment device 3, and the lens 10 is supported by the lens attachments 11 & 4. Tightening force for the mount III #i Use a torque wrench to set the specified tightening force to prevent errors due to loosening or distortion.

次に、光学！ｉｉ跋５０対物レンズを低倍率レンズ３０
、例えば５倍とし、レーデ装置１２又は図示しないノ譬
イロタト光装置を使用してｘｙｚｍ整マイクロメータ２
４．２６．２２の粗調整を行ない、ｊ！に角度調整装置
３の俯仰角調整の粗調整を行なうＯ 次にレーデ装置ｌを使用し、ＩＩ！５ａｌｌ！Ｈｉｆｏ
ｘｙｚｌＢｙ整マイクロメータ及び角ｆｌｌｌｌｉｉｌ
Ｉ装置の微調整を行なりて、測定すべ暑レンズ１００光
軸を装置の光軸１５に一致させる。この時は所要に応じ
て低倍率対物レンズ３０又は中間倍率対物レンズを使用
し、最後に高倍率対物レンズを使用して確認する。Next, optics! ii 50 objective lens with low magnification lens 30
, for example, by using an xyzm adjustment micrometer 2 using a radar device 12 or an analogous optical device (not shown).
4. Perform the rough adjustment of 26.22 and j! Perform coarse adjustment of the elevation angle adjustment of the angle adjustment device 3. Next, use the radar device l, and II! 5all! Hifo
xyzlBy adjustable micrometer and angle flllliil
The optical axis of the measuring lens 100 is made to coincide with the optical axis 15 of the apparatus by making fine adjustments to the I apparatus. At this time, a low magnification objective lens 30 or an intermediate magnification objective lens is used as required, and finally a high magnification objective lens is used for confirmation.

ζこで調整を終了し、テレビカメラ７を作動して測定を
行なう。レーデ発振器１２からの赤外線はレンズ系１３
を通り反射鏡又はプリズム１４で反射されて光軸１５に
沿って進行する。赤外ａＦｉレンレン０’ｉ−通って、
測定すべきレンズの表面仕上部に基づく偏差に応じ丸形
状と直径とを有する焦点を結ぶ。レンズ１００光軸は直
ｍ胸１ｕｉｔｚ・角度調！１！Ｉｔ３の各マイクロメー
タによって微調整され、ｚｗＩ４整マイクロメータ２２
によりて焦点位置上音せるため、焦点の寸法形状は純粋
にレンズ自体の固有の偏差に基づくものが得られる。焦
点直径の最小は約１ミクロンである。尚、ｘ、ｙ調整マ
イクロメータ２４．２６による最小ｌ１ｉｉ！１寸法は
約０．０５ｊクロンとすることが可能である。At this point, the adjustment is completed, and the television camera 7 is activated to take measurements. The infrared rays from the Rade oscillator 12 are transmitted to the lens system 13.
, is reflected by a reflecting mirror or prism 14 , and travels along an optical axis 15 . Through the infrared aFi Renren 0'i-,
A focus having a round shape and diameter is determined depending on the deviation based on the surface finish of the lens to be measured. Lens 100 optical axis is straight chest 1uitz, angle adjustment! 1! It is finely adjusted by each micrometer of It3, and zwI4 adjustment micrometer 22
Therefore, the size and shape of the focal point can be determined purely based on the inherent deviation of the lens itself. The minimum focal diameter is about 1 micron. In addition, the minimum l1ii! by x, y adjustment micrometer 24.26! One dimension can be approximately 0.05j chrons.

レンズ１０によって集光された焦Ａｔ１光学装置ｓｔ通
って拡大され、半道遥ｆ９ズム６で反射されＩ！に光学
装置によって拡大されてテレビカメラ装置゛７によって
撮影される。The light is focused by the lens 10, passes through the focal At1 optical device st, is expanded, is reflected by the half-way f9 beam 6, and is reflected by the I! The image is then magnified by an optical device and photographed by a television camera device 7.

レンズｌＯの焦点を所要の合成樹脂板例えばアクリル板
等を経て結ばせる構造である場合には、上述の微調整段
階で透明部材３２を装着して焦点ａ認を行なう、透明部
材３２の材質と厚さとは実際に使用するアクリル板等と
同等のものを使用する。これによって実用間の倫が得ら
れる。If the structure is such that the focal point of the lens lO is connected via a required synthetic resin plate, such as an acrylic plate, the material of the transparent member 32 and the material of the transparent member 32, which is attached at the above-mentioned fine adjustment stage to perform focus a confirmation, may be used. The thickness used is the same as that of the acrylic board that will actually be used. This will give you a sense of practicality.

尚測定装置の光軸に供給する光束としてはレーザー光線
に限られず、測定するレンズ性能における測定の目的に
対応した光源からの光束を選択しつつ実施する等、可視
光その他の光線によシ寮施することができる。The light beam supplied to the optical axis of the measuring device is not limited to laser beams, but it is also possible to use visible light or other light beams, such as selecting a light beam from a light source that corresponds to the purpose of the measurement based on the lens performance to be measured. can do.

第４図は他の寮施例による性能測定装置を示し、第１図
と同じ符号によって同様の部品又は部分を示す・ 第１図の装置は光１１Ｍ置を内蔵するレンズ装置７０の
レンズ系１０の焦点調定装置であり、菖１図のレーザ装
置１［使用しない。FIG. 4 shows a performance measuring device according to another dormitory embodiment, in which similar parts or parts are denoted by the same reference numerals as in FIG. 1. The device of FIG. It is a focusing device, and the laser device 1 in Fig. 1 is not used.

絡４図の場合は第５．６図に示す角度調整装置７１を使
用して俯仰角と左右偏角の調整を行ない、第７図に示す
取付装置７２にレンズ装置７０ｆ：取付ける。In the case of Fig. 4, the angle of elevation and left/right declination are adjusted using the angle adjustment device 71 shown in Fig. 5.6, and the lens device 70f is attached to the mounting device 72 shown in Fig. 7.

第５．６図に示す角度調整装ｆ１１７１自体は既知の構
造であシ、可動台２５に対する取付面７３を有し、上面
に円筒面７４１形成し九第１の部材７５と、下面に円筒
面７６を有し上面に取付面７７ｔ−有する第２の部材７
８との組合せを互に直角方向に２組取付けて第１の回動
装置７９と第２の回動装置８０を形成し、調整ノブ８１
．８２によりて所要角に位置を調整固足する。これによ
って最上の取付ｉｎ８３Ｆｉ任意の方向生することがで
きる。The angle adjustment device f1171 itself shown in FIG. 5.6 has a known structure, and has a mounting surface 73 for the movable base 25, a cylindrical surface 741 formed on the upper surface, a cylindrical surface 741 on the lower surface, and a cylindrical surface on the lower surface. 76 and a mounting surface 77t on the upper surface of the second member 7
8 are attached at right angles to each other to form a first rotation device 79 and a second rotation device 80, and the adjustment knob 81
．． 82 to adjust the position to the required angle and fix it. This allows the best mounting in83Fi to be installed in any direction.

第７図は第４図の取付装置７２に光源付きレンズ装置７
０を取付けた状１Ｉｌｔ−示す。FIG. 7 shows a lens device 7 with a light source attached to the mounting device 72 in FIG. 4.
1Ilt- is shown with 0 attached.

取付装置７２の基板８５は第５．６図の°角度調整装置
７１の取付面８３に散村可能とする。基板８５上に２個
の支持部材８６を取付け、推力支持が−ル８７を介して
レンＪＰ装置７０のノーウジンダ８８の隅部に接触させ
てレンズＭｔ７０を支持する。心出しが−ル８９によっ
てハウジング８８の中心位置を定め、当て板９０．９１
によって側方位置を定める。これＫよってレンズ装置７
０ｔｌｌ付装置７２の基板８５の面に取付ける。光源に
対して電気を供給するための端子９２を示す。The base plate 85 of the mounting device 72 can be disposed on the mounting surface 83 of the angle adjustment device 71 shown in FIG. 5.6. Two support members 86 are mounted on the substrate 85, and the thrust support is brought into contact with the corner of the nozzle 88 of the lens JP device 70 via a loop 87 to support the lens Mt70. The center position of the housing 88 is determined by the centering rule 89, and the centering plate 90.91
Determine the lateral position by Therefore, the lens device 7
It is attached to the surface of the substrate 85 of the 0tll attaching device 72. A terminal 92 is shown for supplying electricity to the light source.

第４〜７図に示した実施例の作動を説明する。The operation of the embodiment shown in FIGS. 4 to 7 will be explained.

角度調整装置７１の取付面７３をＹ調整装置の可動台２
５に取付け、取付面８３には取付装置７２の基板８５を
職付ける。光源内蔵のレンズ装置７０ｔ−取付装置７２
の推力〆−ル８７、心出しゲール８９、当て板９１．９
２によって取付ける。The mounting surface 73 of the angle adjustment device 71 is attached to the movable base 2 of the Y adjustment device.
5, and the board 85 of the mounting device 72 is attached to the mounting surface 83. Lens device 70t with built-in light source - mounting device 72
Thrust closing rule 87, centering gale 89, backing plate 91.9
Install by 2.

次に光源に端子９２から電気を供給し、光源からのレー
ザ光はレンズｌＯによって焦点を結ぶ。Next, electricity is supplied to the light source from the terminal 92, and the laser light from the light source is focused by the lens lO.

第１に低倍率対物レンズ３０によって焦点位置を目視装
置、８　Ｋ導（、ＸＹ調整は可動台２３．２５を動かし
て調整し、焦点の光軸１５方向の位置はＺ１１ｉｉ１整
可動台２１’ｉ動かして調整する０次に角度調整装置の
組７９．８０を調整してレンズ装置７０の光軸の方向を
装置光軸１５の方向に一致させる。市販の角度間１１装
置は角度ＩＩＩＩＩｌすればレンｒｌＯの光軸の方向が
変化すると同時にレンズの中心位置も移動するため、微
調ｌｉｄ際してＸＹ＠＠マイクロメータ２４．２６によ
る調整を必要とする。゛ 図示のレンズ装置７０はアクリル板を透過して焦点を結
ばせる構成であるため、同質の材料から成る透明部材３
２を高倍率対物レン、ｅ３１の前面に所要の距離として
かぶせ、所要に応じて２調整マ゛イクロメータ２２によ
って焦点位置を微調整する。First, the focal position is determined by a visual inspection device using the low magnification objective lens 30, and the XY adjustment is made by moving the movable base 23. The angle adjustment device set 79, 80 is adjusted by moving to align the direction of the optical axis of the lens device 70 with the direction of the device optical axis 15.A commercially available angle-to-angle 11 device adjusts the lens by adjusting the angle III. As the direction of the optical axis of rlO changes, the center position of the lens also moves, so adjustment using XY@@micrometers 24 and 26 is required for fine adjustment.゛The illustrated lens device 70 transmits light through an acrylic plate. Since the structure focuses the transparent member 3 made of the same material,
2 is placed over the front surface of the high magnification objective lens e31 at a required distance, and the focal position is finely adjusted using the 2 adjustment micrometer 22 as required.

この彼の焦点測定、記鎌、表示Ｆｉ第１図についての説
明と同様である。This is similar to his explanation of focus measurement, recording sickle, and display Fi in FIG.

本発明による装置は単体のレンズ又はレンズ系の結像性
能測定装置として使用することもでき、光源装置まで組
込んだ光学系装置用の結像性能測定装置として使用する
こともできる。更にルンズ系又はレンズ装置が透明板を
透過して焦点を結ばせる用途に使、用する時は同質Ｏ材
料から成る透明部材を置いて実用上の焦点寸法を検査す
ることができる。　ｌ！に、　レンズ系の実用焦点距離
測定装置として使用することも可能である。The device according to the present invention can be used as an imaging performance measuring device for a single lens or a lens system, and can also be used as an imaging performance measuring device for an optical system device including a light source device. Furthermore, when a lens system or a lens device is used for focusing by passing through a transparent plate, a transparent member made of a homogeneous O material can be placed to inspect the practical focal size. l! Additionally, it can also be used as a practical focal length measuring device for lens systems.

従って本発明による装置は広い用途に使用可能であシ、
比較的簡単な構造で極めて正確な測定を行なり得る。Therefore, the device according to the invention can be used in a wide range of applications.
Extremely accurate measurements can be made with a relatively simple structure.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明によるレンズ焦点測定装置の第１の実施
例の側面図、第２図は第１図の装置の角Ｗ調整装置とレ
ンズ保持装置との一部断面とした拡大側面図、第３図は
第２図の１２Ｉｌｌ１面図、第４囚はレンズ２０１１足
装置の第２の実施例の側面図、第５図は第４図の装置の
角度調整装置の拡大側面図、第６図ｉｊ第５図の平面図
、第７図は第４図のｉａ置の取付装置とレンズ装置の拡
大平面図である。 ｌ・・・レーザ装置、２・・・直線調整装置、３．７１
・・・角度調整装置、４・・・レンズ支持装置、５・・
・光学装置、６・・・プリズム装置、７・・・テレビカ
メラ装置、８・・・目視装置、１０・・・測定すべきレ
ンズ、１１・・・フレーム、１２・・・レーザ発振器、
１５一光軸、２０・・・架台、２１，２３．２５・・・
可動台、２２　、２４゜２６．５２・・・調整マイクロ
メータ、３０，３１・・・対愉しンＸ１３２・・・透明
部材、４１．８５・・・基板、４５．４６．６８・・・
軸受、４９・・・傾動板、７０・・・レンズ装置、７２
・・・取付装置、７３．８３・・・取付面、７９．８０
・・・回動装置、８６・・・支持部材、８７・・・支持
コール、８８・・・ハウジング。 ３ 暑 第５図 ３ ／６　　　　／６　　　／） 第６図 ８６　　肌　　　ＢＢ　　　　　　８７　　　１１７図
手続補正書（１兜） 昭和５７年９月７日 特許庁長Ｔｊ１若　杉　和　失敗 ｌ　事件の表示 昭和５７年特　　計願第４５１１、 発明の名称 ２・　レンズ性能測定装置 ３、　補正をする者 事件との関係　特許出願人 （１所　東京゛都渋谷区幡ケ谷２丁目４３番２号社 取締仮社長　北　　村　　茂　　男 ４、代理人 ８　補正の内容 （１）　　明ａ書第４頁第１０行目の「直径は最小２ミ
クロン程度」との記載管「直径は２ミクロン機度」と補
正する。1 is a side view of a first embodiment of a lens focus measuring device according to the present invention; FIG. 2 is an enlarged side view, partially in section, of the angle W adjustment device and lens holding device of the device in FIG. 1; 3 is a top view of 12Ill in FIG. 2, the fourth figure is a side view of the second embodiment of the lens 2011 foot device, FIG. 5 is an enlarged side view of the angle adjustment device of the device in FIG. ij is a plan view of FIG. 5, and FIG. 7 is an enlarged plan view of the mounting device and lens device in the ia position of FIG. 4. l...Laser device, 2...Line adjustment device, 3.71
... Angle adjustment device, 4... Lens support device, 5...
- Optical device, 6... Prism device, 7... Television camera device, 8... Visual device, 10... Lens to be measured, 11... Frame, 12... Laser oscillator,
15 one optical axis, 20... mount, 21, 23.25...
Movable base, 22, 24° 26.52... Adjustment micrometer, 30, 31... Opposite X132... Transparent member, 41.85... Substrate, 45.46.68...
Bearing, 49... Tilting plate, 70... Lens device, 72
... Mounting device, 73.83 ... Mounting surface, 79.80
... Rotating device, 86... Support member, 87... Support call, 88... Housing. 3 Heat Figure 5 3 /6 /6 /) Figure 6 86 Skin BB 87 Figure 117 Procedural Amendment (1 helmet) September 7, 1980 Patent Office Commissioner Tj1 Kazu Wakasugi Failure l Display of case 1988 Special Request Application No. 4511, Title of Invention 2/ Lens Performance Measuring Device 3, Relationship with the Person Who Makes the Amendment Case Patent Applicant (1 location: 2-43-2 Hatagaya, Shibuya-ku, Tokyo, Company Regulatory Interim President Shigeru Kitamura) Man 4, Agent 8 Contents of amendment (1) The statement "The diameter is at least 2 microns" in the 10th line of page 4 of the Memorandum of Indication A will be corrected to "The diameter is about 2 microns."

Claims (6)

【特許請求の範囲】[Claims] （１）レンズの性能を測定する装置てありて、光源より
の光束を測定装置光軸に供給する装置と、測定すべきレ
ンズの中心を上記光軸上の所定位置に一致させるための
レンズ位置調整装置と、測定すべきレンズの光軸の方向
を上記装置光軸に一致させる角度調整装置と、上記測定
すべきレンズを透通し九光束路中に着脱自在に介装する
所要の材質と厚さとを有する透明部材と、上記レンズの
性能を検出する九めの倍率対物レンズを有する光学装置
と、この光学装置によって拡大された像を表示する表示
装置とを備えることを特徴とするレンズ性能測定装置。(1) A device for measuring the performance of a lens, including a device for supplying a light beam from a light source to the optical axis of the measuring device, and a lens position for aligning the center of the lens to be measured with a predetermined position on the optical axis. An adjustment device, an angle adjustment device that aligns the direction of the optical axis of the lens to be measured with the optical axis of the device, and a required material and thickness for penetrating the lens to be measured and removably interposing it in the nine beam path. A lens performance measurement method characterized by comprising: a transparent member having a diameter, an optical device having a ninth magnification objective lens for detecting the performance of the lens, and a display device displaying an image magnified by the optical device. Device. （２）　　レンズの性能を測定する装置であって、赤外
線を測定装置光軸に供給する装置と、測定すべきレンｊ
ｅの中心を、上記光軸上の所定位置に一致させる丸めの
レンズ位置調１１鋏置と、＃ｌＩＩ足すべ自レンズの光
軸の方向を、上記光軸に一致させる角度調整装置と、上
記測定すべをレンズを透過した光束路中に着脱自在に介
装する所要の材質と厚さとを有する透明部材と、上記レ
ンズの性能を検出する丸めの、倍率対物レンズを有する
光学装置と、この光学装置を介して得られる上記レンズ
の像を撮倫する撮像装置とを備えることを特徴とするレ
ンズ性能測定装置。(2) A device for measuring the performance of a lens, which includes a device that supplies infrared rays to the optical axis of the measuring device and a lens to be measured.
a rounded lens positioning device 11 that aligns the center of e with a predetermined position on the optical axis; an angle adjustment device that aligns the direction of the optical axis of the #lII foot lens with the optical axis; A transparent member having a desired material and thickness that is detachably inserted into the path of a light beam transmitted through a lens for measurement, an optical device having a round magnification objective lens for detecting the performance of the lens, and this optical device. A lens performance measuring device comprising: an imaging device that captures an image of the lens obtained through the device. （３）　　レンズの性能を測定する装置であって、赤外
線を測定装置光軸に供給する装置と、測定すべきレンズ
の中心を、上記光軸上の所定位置に一致させるためのレ
ンズ位置調整−置と、測定すべきレンズの光軸の方向を
、上記光軸に一致させる角質調整装置と、上記測定すべ
龜レンズを透過した光束路中に着脱自在に介装する所要
の材質也厚さとを有する透明部材と、上記レンズの性能
を検出する友めの倍率対物レンズを有する光学装置と、
この光学装置を介して得られる上記レンズの像を半透過
プリズムによって分光する分光装置と、仁の分光装置に
よって分光され九一方の像を可視瞭に変換して表示する
可視監視装置と、他方の像を撮像する撮像装置とを備え
る仁とを特徴とするレンズ性能測定装置・(3) A device for measuring the performance of a lens, which includes a device that supplies infrared rays to the optical axis of the measuring device, and a lens position adjustment for aligning the center of the lens to be measured with a predetermined position on the optical axis. a keratin adjusting device that aligns the direction of the optical axis of the lens to be measured with the optical axis, and a required material and thickness to be removably interposed in the path of the light beam transmitted through the lens to be measured. an optical device having a companion magnification objective lens for detecting the performance of the lens;
A spectroscopic device that spectrally separates the image of the lens obtained through this optical device using a semi-transparent prism, a visible monitoring device that converts one image into a visible image that is separated by the Jin spectroscopic device and displays it, and the other. A lens performance measuring device and a lens performance measuring device comprising: an imaging device that captures an image of （４）　　上記レンズ位置調整装を祉レンズをＸ軸方向
に動かすためのＸ軸調整装置と、レンズをＹ軸方向に動
かすためのＹ軸調整装置と、レンズを光軸方向に動かす
丸めＯ２軸調整装置とから構成したことを特徴とする特
許請求ＯＳｍＳｍ第１第、第２え轄第３項記載のレンズ
性能１１定装置。(4) The above lens position adjustment device is equipped with an X-axis adjustment device for moving the lens in the X-axis direction, a Y-axis adjustment device for moving the lens in the Y-axis direction, and a rounded O2 axis for moving the lens in the optical axis direction. 3. A device for determining lens performance according to claim 3 of the first and second patent claims, characterized in that the device comprises an adjustment device. （５）上記角度調整装置は基板と、基板に対して角度調
整可能Ｏ支持とした傾動板と、傾動板Ｋ１ｍ定すべ自し
ンズ七回動可能に支持するレンズ支持部材とから構成し
たことを特徴とする特許請求の範囲第１項＃第２項また
は篤３項記戦のレンズ性能測定装置。(5) The above angle adjustment device is composed of a substrate, a tilting plate supported in an angle adjustable manner with respect to the substrate, and a lens support member supporting the tilting plate K1m so as to be rotatable in a predetermined direction. A lens performance measuring device characterized by claim 1, item 2, or item 3. （６）　　上記光学装置はレンズの像上検出する丸めの
低倍率対物レンズとレンズの像を拡大する高倍率対物ｖ
：／ｙｅま九は／および両レンズの切換装置とから構成
し九０とを特徴とする特許請求の範囲第１項、第２項ま
九Ｆｉ第３項記載Ｏレンズ性能測（７）上記撮像装置社
赤外線撮像装置によ）構成したことｔｅ黴とする特許請
求の範１１１１Ｅ２項または第３項記載のレンズ性能測
定装置。(6) The above optical device consists of a round low-magnification objective lens that detects the image on the lens and a high-magnification objective lens that magnifies the lens image.
:/yeM9 is comprised of/and a switching device for both lenses; The lens performance measuring device according to claim 1111E2 or 3, which is constructed using an infrared imaging device manufactured by Imaging Equipment Co., Ltd.