JPS5814589A - Blower for laser light generating device - Google Patents
Blower for laser light generating deviceInfo
- Publication number
- JPS5814589A JPS5814589A JP11070581A JP11070581A JPS5814589A JP S5814589 A JPS5814589 A JP S5814589A JP 11070581 A JP11070581 A JP 11070581A JP 11070581 A JP11070581 A JP 11070581A JP S5814589 A JPS5814589 A JP S5814589A
- Authority
- JP
- Japan
- Prior art keywords
- blower
- main body
- piping
- bypass passage
- lubricating oil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
本発明はレーザ光発生装置用プロアに係り、特にブロア
駆動用モータに軸受用潤滑油給油装置を備えたブロアに
関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a blower for a laser beam generator, and more particularly to a blower having a blower drive motor equipped with a bearing lubricating oil supply device.
第１図は従来の炭酸ガスレーザ光発生装置の１例を示し
たものである。放電管１の両端には電極２．３が配設さ
れ、放電管１の内部にはＣＯ２゜Ｎ、、Ｈｅの混合ガス
から成るＶ−ザ媒体４が充填さｎている。電極２．３間
でグロー放電５を発生させると、ＣＯ，ガスを励起状態
として誘導放出によりレーザ光が発生する。放電管１の
両側には両端に鏡６．７を有する室が接続されており、
前記放電管１内に発生したＶ−ザ光はこ扛ら伊６゜７間
で往復反射し、増幅されて一部が祷６を通してレーザ光
８として外部に取出さ扛る。＠７が設けられている室に
は熱交換器９を介してブロア１０の吸込側が接続さ扛、
このブロア１０の排気側は配管１１により伊６が設けら
れている室に接続している。グロー放電により熱せらｆ
ｔ、；ｘ放電管１内のレーザ媒体４は熱交換器９で冷却
さｌｒした後、ブロア１０により再び放電管１内へ送り
込１ｎる。FIG. 1 shows an example of a conventional carbon dioxide laser beam generator. Electrodes 2.3 are disposed at both ends of the discharge tube 1, and the inside of the discharge tube 1 is filled with a V-ther medium 4 consisting of a mixed gas of CO2, N, and He. When glow discharge 5 is generated between electrodes 2 and 3, laser light is generated by stimulated emission with CO and gas in an excited state. A chamber having mirrors 6.7 at both ends is connected to both sides of the discharge tube 1.
The V-laser light generated in the discharge tube 1 is reflected back and forth between the two sides, is amplified, and a part of it passes through the tube 6 and is taken out as a laser beam 8 to the outside. The suction side of a blower 10 is connected to the chamber where @7 is provided via a heat exchanger 9,
The exhaust side of this blower 10 is connected by a pipe 11 to the chamber in which the pipe 6 is provided. Heat wave f due to glow discharge
t,;x The laser medium 4 in the discharge tube 1 is cooled by the heat exchanger 9 and then fed into the discharge tube 1 again by the blower 10.
第２図は上記ブロア１０の詳細断面図である。FIG. 2 is a detailed sectional view of the blower 10.
駆動用モータ１２の出力軸１３の先端には羽根車１４が
取付けである。この羽根車１４の先端部付近のケーシン
グには吸込口１５が設けら扛、外周部付近のケーシング
には排気口１６が設けら扛ている。前記出力軸長３は軸
受１７ａ、１７ｂにより支承さｎ１軸受１７ａと羽根車
１４との間の出力軸外周にはラビリンス１８が装置され
ている。An impeller 14 is attached to the tip of the output shaft 13 of the drive motor 12. A suction port 15 is provided in the casing near the tip of the impeller 14, and an exhaust port 16 is provided in the casing near the outer periphery. The output shaft length 3 is supported by bearings 17a and 17b, and a labyrinth 18 is provided on the outer periphery of the output shaft between the n1 bearing 17a and the impeller 14.
ま次、世力軸１３内部には軸方向に伸びる孔が形成〜さ
扛ており、軸受１７ａ、１７ｂ付近上部には給油口１９
ａ、１９ｂが前記孔と連通している。Next, a hole extending in the axial direction is formed inside the power shaft 13, and an oil filler port 19 is provided at the upper part near the bearings 17a and 17b.
a and 19b communicate with the hole.
また、駆動用モータの固定子外周部と外殻を形成してい
るケーシングとの間には空間２０が設けらｒている。更
に、このケーシングの底部には潤滑″ニニ；！７二：二
富ニー、１゜ＫＩＡｉ。７回転さするため、レーザ媒体
４は吸込口１５より入り羽根車１４を経て排気口１６へ
と導びか扛る。Further, a space 20 is provided between the outer circumference of the stator of the drive motor and the casing forming the outer shell. Furthermore, the bottom of this casing is lubricated with "!72: Futomi Knee, 1° KIAi. To rotate 7 times, the laser medium 4 enters through the suction port 15, passes through the impeller 14, and is guided to the exhaust port 16. Bikaru.
軸受１７ａ、１７ｂには、遠心力により出力軸１３内部
の孔を通して吸上げられた潤滑油２１が、給油口１９ａ
、１・９ｂを経て供給される。この際潤滑油２１の蒸気
が羽根車’１４の方へ流出するのをラビリンス１８が防
止している。Lubricating oil 21 sucked up through the hole inside the output shaft 13 by centrifugal force is supplied to the bearings 17a and 17b through the oil supply port 19a.
, 1.9b. At this time, the labyrinth 18 prevents the vapor of the lubricating oil 21 from flowing out toward the impeller '14.
ところで、上記のような従来構造のブロア１０において
は、下記のような不具合を生ずることが、 判明した。By the way, it has been found that the blower 10 having the conventional structure described above has the following problems.
即ち、Ｖ−ザ光発生装置内をＩＱ””ｌ’ｏｒｒ程度筐
で真空ポンプ（図示せず）により排気して、レーザ媒体
２を交換する場合、ブロア１０と吸込口１５及び排気口
１６により接続さ扛るレーザ光発生装置本体と、モータ
１２の空間２０はコンダクタンスの小さいラビリンス１
８を通じて連通されるととになる。このため、レーザ装
置本体内部の圧力低下速度に比較して、空間２０の圧力
低下は極端に遅くなる。このため、空間２０よりレー
１ザ装置本体内部へ向かう圧力差系中じて、潤滑油２
１が羽根車１４の方へ流出する。従って、再びレーザ装
置本体内にレーザ媒体４を充填した時、潤滑油２１がレ
ーザ媒体４中へ混入して、レーザ発振特性を著しく阻害
する欠点が生じる。That is, when replacing the laser medium 2 by evacuating the inside of the V-laser light generator with a vacuum pump (not shown) in a housing of about IQ''l'orr, the blower 10, suction port 15, and exhaust port 16 The space 20 between the connected laser beam generator main body and the motor 12 is a labyrinth 1 with small conductance.
It becomes connected through 8. Therefore, the pressure drop in the space 20 is extremely slow compared to the pressure drop speed inside the laser device main body. Therefore, from the space 20,
1. Lubricating oil 2.
1 flows out toward the impeller 14. Therefore, when the laser medium 4 is again filled into the laser device main body, the lubricating oil 21 is mixed into the laser medium 4, resulting in a drawback that the laser oscillation characteristics are significantly impaired.
本発明の目的は上記の欠点に鑑み、レーザ装置本体にラ
ビリンス部を通して潤滑油が混入することを防止したレ
ーザ光発生装置用ブロアを提供することにある。SUMMARY OF THE INVENTION In view of the above drawbacks, an object of the present invention is to provide a blower for a laser light generating device that prevents lubricating oil from entering the laser device main body through the labyrinth portion.
本発明は、駆動用モータの外周部付近にある空間部と、
ブロアの吸込口の近傍とを配管により連通して、前記空
間部とレーザ光発生装置本体内部とをラビリンス部を迂
回して連通し、駆動用モータの空間部よりレーザ装置本
体内部へ向かう圧力差が生ずることを防止したものであ
る。The present invention provides a space portion near the outer periphery of the drive motor;
The vicinity of the suction port of the blower is connected through piping, and the space and the inside of the laser beam generator main body are communicated by bypassing the labyrinth part, thereby creating a pressure difference from the space of the drive motor toward the inside of the laser device main body. This prevents this from occurring.
以下本発明のレーザ光発生装置用ブロアの一実施例を従
来と同部品は同符号で示し第３図により説明する。An embodiment of the blower for a laser beam generator according to the present invention will be described below with reference to FIG. 3, in which the same parts as those of the conventional blower are denoted by the same reference numerals.
駆動用モータ１２の出力軸１３の先端に羽根車１４が取
付けらｎｌ この羽根車１４によりレーザ媒体を吸込口
１５から吸込み排気口１６へ排出する従来例と略同様の
構造を有している。従来例と異、なる所は、駆動用モー
タ１２の固定子外周部に設けらｎている空間２０と吸込
口１５とは配管２２、オイルミストトラップ２３、配管
２４を通して連通さ扛るバイパス通路が設けらｔている
所にある。このパイ・パス通路を形成する配′管部分の
コンダクタンスはラビリンス１８におけるコンダクタン
スに比較して十分大きく取ってあり、また、バイパス通
路にはオイルミス））ラップ２３が挿入さ【ているため
、このバイパス通路を通じて潤滑油２１の蒸気がＶ−ザ
光装置本体部に流入することを防止している。An impeller 14 is attached to the tip of the output shaft 13 of the drive motor 12. This impeller 14 has a structure substantially similar to the conventional example in which the impeller 14 takes in the laser medium from the suction port 15 and discharges it to the exhaust port 16. The difference from the conventional example is that the space 20 provided on the outer periphery of the stator of the drive motor 12 and the suction port 15 are connected through a pipe 22, an oil mist trap 23, and a pipe 24, and there is a bypass passage. It is located where it is set up. The conductance of the piping section forming this pie-pass passage is set to be sufficiently larger than the conductance in the labyrinth 18, and since the oil-missing wrap 23 is inserted in the bypass passage, this This prevents the vapor of the lubricating oil 21 from flowing into the main body of the V-za optical device through the bypass passage.
本実施例によｎば、駆動用モータ１２の空間２０と、吸
込口１５とを配管２２、オイルミストトラップ２３、配
管２４より成るコンダクタンスの大きなバイパス通路に
より連通することにより、レーザ媒体交換時にラビリン
ス１８の両端に生ずる圧力差を解消する効果がある。こ
のため、潤滑油２１が圧力差によってＶ−ザ光発生装置
本体内部に流入することがなくなり、安定したレーザ発
振特性をレーザ光発生装置を持友せる効果がある。According to this embodiment, the space 20 of the drive motor 12 and the suction port 15 are communicated with each other through a bypass passage with a large conductance consisting of a pipe 22, an oil mist trap 23, and a pipe 24. This has the effect of eliminating the pressure difference that occurs between the two ends of 18. Therefore, the lubricating oil 21 is prevented from flowing into the main body of the V-laser light generator due to the pressure difference, and the laser light generator can maintain stable laser oscillation characteristics.
なお、本実施例では、ブロア１０が運転状態にある時に
は、排気口１６は吸込口１５よりブロアの圧力ヘッド分
だけ高い圧力となっている。それ故、羽根車１４の裏面
の空間２５（この部分の圧力は排気口１６における圧力
に等しい）は駆動用モータ１２の空間２０（この部分の
圧力はバイパス通路により吸込口１５の圧力と等しい）
より高い圧力になるため、レーザ媒体は極く僅かである
がうビリンス１８を通して空間２０へと流入する。従っ
て、逆に潤滑油２１の蒸気の空間２５への流入を完全に
防止し、レーザ光発生装置本体へ潤滑油２１の蒸気が流
入することを完全に防止している。In this embodiment, when the blower 10 is in operation, the pressure in the exhaust port 16 is higher than that in the suction port 15 by the pressure head of the blower. Therefore, the space 25 on the back side of the impeller 14 (the pressure in this part is equal to the pressure at the exhaust port 16) is the space 20 of the driving motor 12 (the pressure in this part is equal to the pressure in the suction port 15 due to the bypass passage).
Due to the higher pressure, the laser medium flows into the space 20 through the bilinse 18 only slightly. Therefore, on the contrary, the vapor of the lubricating oil 21 is completely prevented from flowing into the space 25, and the vapor of the lubricating oil 21 is completely prevented from flowing into the main body of the laser beam generator.
以上記述した如く本発明のレーザ光発生装置用ブロアに
よｒしば、レーザ装置本体にラビリンス部を通して潤滑
油が混入することを防止することができる効果を有する
ものである。As described above, the blower for a laser beam generating device of the present invention has the effect of preventing lubricating oil from entering the laser device main body through the labyrinth portion.
第１図は従来の炭酸ガスレーザ光発生装置の１例を示し
た概略構成図、第２図は第１図のブロアの詳細を示した
断面図、第３図は本発明に係るレーザ光発生装置用ブロ
アの一実施例を示した縦断面図である。
１・・・放電管、２．３・・・電極、４・・・レーザ媒
体、６゜７・・・鐘、９・・・熱交換器、１０・・・ブ
ロア、１２・・・駆動用モータ、１３・！・出力軸、１
４・・・羽根車、１５・・・吸込口、１６・・・排気口
、１７ａ、１７ｂ・・・軸受、１８・・・ラビリンス、
１９ａ、１９ｂ・・・給油口、２０．２５・・・空間、
２１・・・潤滑油、２２．２４・・・第１図
■
第２図
垢３図FIG. 1 is a schematic configuration diagram showing an example of a conventional carbon dioxide laser beam generator, FIG. 2 is a sectional view showing details of the blower in FIG. 1, and FIG. 3 is a laser beam generator according to the present invention. FIG. 2 is a vertical cross-sectional view showing an embodiment of a commercial blower. DESCRIPTION OF SYMBOLS 1...Discharge tube, 2.3...Electrode, 4...Laser medium, 6°7...Bell, 9...Heat exchanger, 10...Blower, 12...For driving Motor, 13!・Output shaft, 1
4... Impeller, 15... Suction port, 16... Exhaust port, 17a, 17b... Bearing, 18... Labyrinth,
19a, 19b... Fuel filler port, 20.25... Space,
21...Lubricating oil, 22.24...Fig. 1 ■ Fig. 2 Diagram 3
Claims (1)
車を回転させる駆動用モータを備え、該モータの軸受に
は潤滑油給油装置によって常時潤滑油が給油さ扛るレー
ザ光発生装置用ブロアにおいて、レーザ媒体の吸込口に
、前記モータの回転軸シール部を介して連通ずる前記モ
ータの内部空間と、前記吸込口近傍とを配管より成るバ
イパス通路で連通したことを特徴とするレーザ光発生装
置用プロア。 ２、バイパス通路に油蒸気凝縮装置を挿入したことを特
徴とする特許請求の範囲第１項記載のレーザ光発生装置
用プロア。[Scope of Claims] 1. A driving motor that rotates an impeller that circulates a laser medium of an L/- laser beam generator is provided, and a bearing of the motor is constantly supplied with lubricating oil by a lubricating oil supply device. In the blower for a laser beam generator, an internal space of the motor, which communicates with the laser medium suction port via a rotary shaft seal portion of the motor, and a vicinity of the suction port are communicated by a bypass passage made of piping. A proa for a laser beam generator characterized by: 2. The prower for a laser beam generator according to claim 1, characterized in that an oil vapor condensing device is inserted into the bypass passage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11070581A JPS5814589A (en) | 1981-07-17 | 1981-07-17 | Blower for laser light generating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11070581A JPS5814589A (en) | 1981-07-17 | 1981-07-17 | Blower for laser light generating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5814589A true JPS5814589A (en) | 1983-01-27 |
Family
ID=14542361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11070581A Pending JPS5814589A (en) | 1981-07-17 | 1981-07-17 | Blower for laser light generating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5814589A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62273492A (en) * | 1986-03-07 | 1987-11-27 | エレクトリシテ ドウ フランス−セルヴイス ナシヨナル− | Check valve gear for pressurized water type reactor |
| US4729724A (en) * | 1985-09-30 | 1988-03-08 | Kraftwerk Union Aktiengesellschaft | Blower for propelling a continuous gas stream with inflatable gas seals |
| WO1989012921A1 (en) * | 1988-06-24 | 1989-12-28 | Fanuc Ltd | Laser oscillator |
| JPH021193A (en) * | 1988-03-03 | 1990-01-05 | Fanuc Ltd | Laser oscillating device |
| WO1991005384A1 (en) * | 1989-10-04 | 1991-04-18 | Fanuc Ltd | Turbo blower for laser and laser oscillator using the same |
| US5114320A (en) * | 1989-12-27 | 1992-05-19 | Leybold Ag | Blower or pump with capillary filter for replenishment of oil separated by vacuum pump |
-
1981
- 1981-07-17 JP JP11070581A patent/JPS5814589A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4729724A (en) * | 1985-09-30 | 1988-03-08 | Kraftwerk Union Aktiengesellschaft | Blower for propelling a continuous gas stream with inflatable gas seals |
| JPS62273492A (en) * | 1986-03-07 | 1987-11-27 | エレクトリシテ ドウ フランス−セルヴイス ナシヨナル− | Check valve gear for pressurized water type reactor |
| JPH021193A (en) * | 1988-03-03 | 1990-01-05 | Fanuc Ltd | Laser oscillating device |
| WO1989012921A1 (en) * | 1988-06-24 | 1989-12-28 | Fanuc Ltd | Laser oscillator |
| WO1991005384A1 (en) * | 1989-10-04 | 1991-04-18 | Fanuc Ltd | Turbo blower for laser and laser oscillator using the same |
| US5114320A (en) * | 1989-12-27 | 1992-05-19 | Leybold Ag | Blower or pump with capillary filter for replenishment of oil separated by vacuum pump |
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