JPS5812937A - Energy-saving type clean room - Google Patents
Energy-saving type clean roomInfo
- Publication number
- JPS5812937A JPS5812937A JP56111434A JP11143481A JPS5812937A JP S5812937 A JPS5812937 A JP S5812937A JP 56111434 A JP56111434 A JP 56111434A JP 11143481 A JP11143481 A JP 11143481A JP S5812937 A JPS5812937 A JP S5812937A
- Authority
- JP
- Japan
- Prior art keywords
- air
- clean room
- blow
- slit width
- outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)
- Ventilation (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、層流型クリーンルームの必要風量ヲ、層流型
クリーンルームの機能を損わないで、大ｒｌＪに低減す
るようにした省エネルギー型のクリーンルームに関する
。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an energy-saving clean room in which the required air volume of a laminar flow clean room is reduced to a large rlJ without impairing the function of the laminar flow clean room.
垂直方向または水平方向に層流式に気流を吹出す層流型
クリーンルームは、その吹出面のヤ面がら吹出速度か均
一となるように清浄空気を吹出し、吹田面と実質上同じ
面積を有する対向吸込面がら一様゛にこの空気を吸込む
ようにしたものであるが。A laminar flow clean room that blows air in a laminar manner vertically or horizontally blows out clean air so that the blowing speed is uniform across the back surface of the blowing surface, and a This air is drawn in uniformly from the suction surface.
通常その吹出気流の平均風速はＱ、５ｍ／Ｂ程度である
。Normally, the average wind speed of the blown air current is about Q, 5 m/B.
従来の層流型クリーンルームは、このよう゛にして、ク
リーンルーム空間の全体に層流を形成させ、全空間の清
浄度を冒めるようにしていた。In this way, the conventional laminar flow type clean room forms a laminar flow throughout the clean room space, thereby impairing the cleanliness of the entire space.
しかし、′このように約０．５ｒｎ／／Ｂの平均気流に
よって全面清浄化を図うても、実際にはこのクリーンル
ームの作業域、例えば手術場所、精密加工や薬品処理作
業台等は、このクリーンルームの全空間ノ一部領域であ
る場合か多く、この作業域の部分で清浄度を確保するこ
とか必要な場合か多い。However, even if the entire surface is cleaned with an average air flow of about 0.5rn//B, in reality, the working area of the clean room, such as the surgical area, precision processing and chemical processing workbench, etc. This is often a part of the entire clean room space, and it is often necessary to ensure cleanliness in this work area.
本発明は、この作業域での清浄度は確保しｄがら、全体
の風量を低域し、これによって駆動装置の省エネルギー
化を図ることを目的としてなされたもので、従来の層流
型クリーンルームに可変スリット巾吹出口を結合するこ
とによって特殊なこの目的を効果的に達成し′たもので
ある。この可変スリット巾吹出口の使用によって、風量
は訃来の６０〜８０９６程度に減少させることができ、
これによっても作業域においてて十分な清浄度を確保す
ることかできる。The present invention was made with the aim of lowering the overall air volume while ensuring cleanliness in this work area, thereby saving energy in the drive device. This special purpose is effectively achieved by combining a variable slit width outlet. By using this variable slit width outlet, the air volume can be reduced to about 60 to 8096 compared to before.
This also ensures sufficient cleanliness in the work area.
図面に従って本発明を゛具体的に説明すると、第１図は
本発明に従う垂直層流型クリーンルームを示しており、
可変スリット巾吹出口Ｎを吹出面１の１部の面２に取付
けである。第１図において、２０は気密構造体、２１は
高性能フィルター、２２は通気性の床、２′５は作業域
、２４は外気取入口、２５はプレフィルタ−１２６は風
量調整ダンパ、２７は空気調和器、２９は送風機、３０
は送風空気室、３１はクリーンルーム空間を示している
。また、第２図はクリーンルーム排気口３２および工程
排気装置３６を設けた以外は猿１図同様の垂直層流型ク
リーンルームを示している。送風機２９は吹出風量を任
意に制御できる送風機であり、例えば可変速送風機、可
変ピッチ送風機、入ロ案内羽根制御送風機などである。To explain the present invention in detail with reference to the drawings, FIG. 1 shows a vertical laminar flow clean room according to the present invention,
A variable slit width outlet N is attached to a surface 2 of a part of the outlet surface 1. In Fig. 1, 20 is an airtight structure, 21 is a high-performance filter, 22 is a breathable floor, 2'5 is a working area, 24 is an outside air intake port, 25 is a pre-filter, 126 is an air volume adjustment damper, and 27 is a Air conditioner, 29, blower, 30
31 indicates a blown air chamber, and 31 indicates a clean room space. Further, FIG. 2 shows a vertical laminar flow type clean room similar to FIG. 1 except that a clean room exhaust port 32 and a process exhaust device 36 are provided. The blower 29 is a blower whose blowing air volume can be arbitrarily controlled, and is, for example, a variable speed blower, a variable pitch blower, an intake guide vane control blower, or the like.
通気床２２から一様に床下空間に吸込まれた空気は、必
要量の外気と共に空気調和器２７に入り、送風機２９に
よって空気室６０を経て高性能フィルター２２が全面に
張り渡だされた吹出面１から等速の吹出気流としてり１
７−ンルーム空間３１内に吹出される。すなわち、吹出
面１の全面は、可変スリット巾吹出口Ｎが取付けられた
１部の而２であろうと、その他の面であろうとも、等速
の気流が吹出されるような構造を有しており、従来の層
流型クリーンルームの等速成出面構造そのものである。The air uniformly sucked into the underfloor space from the ventilation floor 22 enters the air conditioner 27 along with the required amount of outside air, and is passed through the air chamber 60 by the blower 29 to the blowing surface where the high performance filter 22 is stretched over the entire surface. From 1 to 1 as a constant velocity blowing air flow.
7- It is blown out into the room space 31. That is, the entire surface of the blowing surface 1 has a structure such that a uniform airflow is blown out, whether it is on the part 2 where the variable slit width blowing outlet N is attached or on other surfaces. This is exactly the uniform velocity generation surface structure of a conventional laminar flow clean room.
しかし、この吹田面１から吹出される清浄空気は、従来
必要とした０、５ｍ／Ａ程度の風速ヨリ’モ低下すセ、
０２〜０．３５ｍ／ｓの範囲にまで風速を落として運転
しても、作 ｉ／業域２３での清浄度は、可変ス
リット巾吹出口Ｎによって十分に確保ができ、かっこの
作業域２３以外の域においても塵埃の乱流拡散滞留は十
分に防がれる。これは、１部の面２から吹出される空気
だけを可変スリット巾吹出口Ｎによって収斂してからこ
れを作業域２３に向けて吹出すようにしたことによる。However, the clean air blown from this Suita surface 1 has a wind speed that is lower than the conventionally required wind speed of about 0.5 m/A.
Even if the wind speed is reduced to a range of 0.02 to 0.35 m/s, the cleanliness in the working area 23 can be sufficiently ensured by the variable slit width outlet N. Even in other areas, turbulent diffusion and retention of dust can be sufficiently prevented. This is because only the air blown out from one part of the surface 2 is converged by the variable slit width outlet N and then blown out toward the work area 23.
第６図は第１図または第２図の可変スリット巾吹出口Ｎ
の部分を拡大した断面図であり、第４図はこの可変スリ
ット巾吹出口Ｎの組立分解図である。これらの図に示し
たようにこの吹出口Ｎは、空気吹川面１における１部の
面２の吹出側に取付けられるノズルであって、吹出向と
実質上直角方向に吹田側に延びる側板３と４と、この側
板３と４の間において面２から吹出側に延びる傾斜板で
あって面２の開口面積よりも小さな開口面積のノズル口
５を形成する傾斜板６および７と、からなっている。そ
して、この側板３と４には、後で述べるが、傾斜板６の
角度可変係止穴１２が列設されている。なお、１１は弾
力性パツキン、２１はフィルターである。Figure 6 shows the variable slit width outlet N in Figure 1 or Figure 2.
FIG. 4 is an exploded view of the variable slit width outlet N. As shown in these figures, the air outlet N is a nozzle attached to the air outlet side of a part of the surface 2 of the air blowing surface 1, and is connected to a side plate 3 that extends toward the Suita side in a direction substantially perpendicular to the air outlet direction. 4, and inclined plates 6 and 7, which are inclined plates extending from the surface 2 to the blowing side between the side plates 3 and 4, and forming a nozzle opening 5 having an opening area smaller than the opening area of the surface 2. There is. As will be described later, angle variable locking holes 12 for the inclined plate 6 are arranged in a row in the side plates 3 and 4. Note that 11 is an elastic packing, and 21 is a filter.
傾斜板６および７は、１部の面２を通過する空気を、速
度を速めかつ方向を変えて吹出すように、傾斜を有する
。より具体的には、傾斜板６と７は相互に曲率が異る曲
面板からなっており、ノズル口５の向きが面２からの吹
出方向とは偏向するようにしである。このため、傾斜板
７は面２の開口面積の大部分を塞ぐような割合で面２の
吹出側に張り出しており、この張り出しの程度は少なく
とも面２の中央を超えｈ部分までとしておくとよい。The inclined plates 6 and 7 have an inclination so that the air passing through a portion of the surface 2 is blown out at a higher speed and in a different direction. More specifically, the inclined plates 6 and 7 are curved plates having mutually different curvatures, and the direction of the nozzle opening 5 is deviated from the blowing direction from the surface 2. For this reason, the inclined plate 7 protrudes toward the air outlet side of the surface 2 in such a proportion that it closes most of the opening area of the surface 2, and it is preferable that the extent of this overhang exceeds at least the center of the surface 2 to a portion h. .
そして、この傾斜板７の張り出した面は急、に向きを反
転して、ノズル口５の方向がこの傾斜板７自身の側に傾
（ようにしである。他方、傾斜板６は傾斜板７のような
特殊な曲面を有しておら゛ず、ゆるやかなカーブを有し
ている。Then, the projecting surface of this inclined plate 7 suddenly reverses its direction, so that the direction of the nozzle opening 5 is inclined toward this inclined plate 7 itself. It does not have a special curved surface like that, but has a gentle curve.
この両頭斜板６と７は、側板３と４に接続される。すな
わち、側板３と４に設けられたボルト穴にボルトを挿入
すると共に、このボルトを両頭斜板６と７に設けられた
ボルト係止孔または溝１３〜１６に通して、両者の接続
が行なわれる。The double-ended swash plates 6 and 7 are connected to the side plates 3 and 4. That is, by inserting bolts into bolt holes provided in the side plates 3 and 4, and passing these bolts through bolt locking holes or grooves 13 to 16 provided in the double-ended swash plates 6 and 7, the connection between the two is performed. It will be done.
そのさい、側板３および４においては、傾斜板６が面２
に対する接合点（パツキン１１の存在位置）を中心にし
である程度回転しても、これを係止できるような幅をも
つ広い面積にしてあり、この部分に角度可変係止穴１２
が列設または溝状に設けである。これによって、傾斜板
６はその取付角を自由に調整できるようになっており、
この取付角の調整によって、ノズル口５からの吹出気流
の速度と方向が制御ヤきる。実際の組立にあだ、つては
、予め側板工２．４と、傾斜板６，７とを接合してから
、この組立品をクリーンルーム吹出面の適切゛な個所に
取付け、そのノズル口５の調整は取付後においても自由
に行なうことができる。At that time, in the side plates 3 and 4, the inclined plate 6 is
It has a wide area that can be locked even if it rotates to some extent around the joint point (position where the packing 11 exists), and the variable angle locking hole 12 is provided in this part.
are arranged in rows or in grooves. As a result, the mounting angle of the inclined plate 6 can be freely adjusted.
By adjusting this mounting angle, the speed and direction of the airflow blown out from the nozzle port 5 can be controlled. During the actual assembly, first join the side plate work 2.4 and the inclined plates 6, 7, and then install this assembly at an appropriate location on the clean room air outlet surface. Adjustments can be made freely even after installation.
この可変スリット巾吹出口Ｎの取付数および位置はクリ
ーンルームの規模や作業域２５の大きさや位置の変動に
応じて適当に定めることができる。The number and position of the variable slit width outlets N can be appropriately determined depending on the size of the clean room and the size and position of the work area 25.
つまり、層流型クリーンルーム自体の基本構造には何ら
変更を要することなぐ、可変スリット巾吹田口Ｎを作業
域２３に応じ＜ｉ付け、送風機２９の吐出量を、この可
変スリット巾吹出口無しの場合の６０〜８０ｙ）程度に
低下させればよい。このように送風機２９の吐出量を低
下させても作業域２６での清浄度は十分に確保すること
ができ、かつ室内塵埃粒子の主制御頭載外への乱流拡散
滞留も、可変スリット巾吹出口Ｎの存在しない他の面か
らの吹出気流によって十分に防ぐことかできる。In other words, without requiring any changes to the basic structure of the laminar flow clean room itself, the variable slit width Suita outlet N is assigned <i according to the working area 23, and the discharge amount of the blower 29 is adjusted to the variable slit width Suita outlet N. What is necessary is to reduce it to about 60-80y). In this way, even if the discharge amount of the blower 29 is reduced, the cleanliness in the work area 26 can be sufficiently ensured, and the turbulent diffusion and accumulation of indoor dust particles outside the main control head can be prevented by the variable slit width. This can be sufficiently prevented by blowing air from another surface where the blower outlet N is not present.
このようにして、本発明のクリーンルームは、目的区域
の清浄度を従来の層流型クリーンルーム通りに確保しな
がら、これら従来のものか必要とした約０．５ ｍｙＢ
（７）平均気流ヲ０．３〜０．４ ｍ／程度まで下げる
ことを可能にしたもので、クリーンルーム全体としての
平均風速を２０〜４０％程度低減せしめることができる
。通常、動力費は風量比の三乗に概ね比例するから、本
発明のクリーンルームの動力費は従来のものより５０〜
７０％節減することかできることになり、極めて省エネ
ルギーか達成される。しかも、本発明に従う可変スリッ
ト巾吹出口Ｎは構造および組立が簡単で、その吹出方向
も自由に変えることができるから、作業域の大きさや位
置変更に対しても対処か容易であり、 パ既存
クリーンルームの省エネルギー運転への変更が容易にな
し得るものである。In this way, the clean room of the present invention maintains the cleanliness of the target area at the same level as conventional laminar flow clean rooms, while maintaining a cleanliness level of approximately 0.5 myB, which was required compared to conventional laminar flow clean rooms.
(7) It is possible to lower the average air flow to about 0.3 to 0.4 m/m, which can reduce the average wind speed of the entire clean room by about 20 to 40%. Normally, the power cost is approximately proportional to the cube of the air volume ratio, so the power cost of the clean room of the present invention is 50 to 50% lower than that of the conventional one.
This means that it is possible to save 70% or more, and extremely energy saving is achieved. Moreover, the variable slit width outlet N according to the present invention is simple in structure and assembly, and the blowing direction can be changed freely, so it is easy to deal with changes in the size and position of the work area. Changes to energy-saving operation of clean rooms can be easily made.
第１図は本発明のクリーンルームの一実施例を示す全体
図、第２図は同様に他の実施例を示す全体図、第３図は
第１図の可変スリット巾吹出日の部分拡大断面図、第４
図は第６図の可変スＩＪ ｙ ）１１］吹出口の組立分
解図である。
１・・・吹出面
２・・・吹出面の一部の面
３．４・・・側板
５・・・ノズル口
６．７・・・傾斜板
１２・・・角度可変係止穴
２１・・・高性能フィルター
２２・・・通気床
２３・・・作業域
２７・・・空気調和器
２９・・・送風機
３１・・・クリーンルーム空間
出 願 人 高砂熱学工業株式会社
代理人 和田憲賀FIG. 1 is an overall view showing one embodiment of the clean room of the present invention, FIG. 2 is an overall view similarly showing another embodiment, and FIG. 3 is a partial enlarged sectional view of the variable slit width blowout day of FIG. 1. , 4th
The figure is an exploded view of the variable air outlet shown in FIG. 6. 1...Blowout surface 2...Part of the blowout surface 3.4...Side plate 5...Nozzle port 6.7...Slanted plate 12...Angle variable locking hole 21...・High performance filter 22... Ventilation floor 23... Working area 27... Air conditioner 29... Blower 31... Clean room space Applicant: Takasago Thermal Engineering Co., Ltd. Agent Kenga Wada
Claims (2)
の面において、この１部の面から吹出される空気を収斂
するための可変スリット巾吹田口を、その吹出方向をル
ーム空間の特定作業域に向けて設置したことを特徴とす
る省エネルギー型クリーンルーム。(1) On one of the air blowing surfaces of a laminar flow clean room, a variable slit width Suita mouth is used to converge the air blown from this one surface, and its blowing direction is specified in the room space. An energy-saving clean room characterized by being installed facing the work area.
実質上直角方向に延びる側板３，４と、この側板３と４
との間において吹出面から吹出側に互いに近接するよう
に傾斜して配置された傾斜板６および７と、からなって
おり、かつこの傾斜板６と７の少なくとも一方が側板３
と４に対して傾斜角を自在に変えられるような係止構造
を有したものである特許請求の範囲第１項記載のクリー
ンルーム。(2) The variable slit width outlet has side plates 3 and 4 extending from the outlet surface in a direction substantially perpendicular to the outlet direction, and these side plates 3 and 4.
and inclined plates 6 and 7 arranged so as to be inclined from the outlet surface to the outlet side, and at least one of the inclined plates 6 and 7 is connected to the side plate 3.
4. The clean room according to claim 1, wherein the clean room has a locking structure that allows the angle of inclination to be freely changed with respect to the angles of inclination of the clean room.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56111434A JPS5812937A (en) | 1981-07-16 | 1981-07-16 | Energy-saving type clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56111434A JPS5812937A (en) | 1981-07-16 | 1981-07-16 | Energy-saving type clean room |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5812937A true JPS5812937A (en) | 1983-01-25 |
Family
ID=14561088
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56111434A Pending JPS5812937A (en) | 1981-07-16 | 1981-07-16 | Energy-saving type clean room |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5812937A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS625032A (en) * | 1985-07-01 | 1987-01-12 | Taikisha Ltd | Clean room |
| US5015425A (en) * | 1984-11-22 | 1991-05-14 | Hitachi, Ltd. | Manufacturing apparatus |
| JP2018513343A (en) * | 2015-04-20 | 2018-05-24 | シネクシス・リミテッド・ライアビリティ・カンパニーＳｙｎｅｘｉｓ ＬＬＣ | Clean room containing dilute hydrogen peroxide (DHP) gas and method of using the same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52108648A (en) * | 1976-03-05 | 1977-09-12 | Svenska Flaektfabriken Ab | Exhausting system for cooking method of guiding air stream produced from airrpermeable surface* particularly perforated surface and apparatus for carrying out the same method |
-
1981
- 1981-07-16 JP JP56111434A patent/JPS5812937A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52108648A (en) * | 1976-03-05 | 1977-09-12 | Svenska Flaektfabriken Ab | Exhausting system for cooking method of guiding air stream produced from airrpermeable surface* particularly perforated surface and apparatus for carrying out the same method |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5015425A (en) * | 1984-11-22 | 1991-05-14 | Hitachi, Ltd. | Manufacturing apparatus |
| JPS625032A (en) * | 1985-07-01 | 1987-01-12 | Taikisha Ltd | Clean room |
| JP2018513343A (en) * | 2015-04-20 | 2018-05-24 | シネクシス・リミテッド・ライアビリティ・カンパニーＳｙｎｅｘｉｓ ＬＬＣ | Clean room containing dilute hydrogen peroxide (DHP) gas and method of using the same |
| JP2021183902A (en) * | 2015-04-20 | 2021-12-02 | シネクシス・リミテッド・ライアビリティ・カンパニーSynexis LLC | Clean rooms having dilute hydrogen peroxide (dhp) gas and methods of use thereof |
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