JPS58116521A - Manufacture of electrochromic display element - Google Patents

Manufacture of electrochromic display element

Info

Publication number
JPS58116521A
JPS58116521A JP56213677A JP21367781A JPS58116521A JP S58116521 A JPS58116521 A JP S58116521A JP 56213677 A JP56213677 A JP 56213677A JP 21367781 A JP21367781 A JP 21367781A JP S58116521 A JPS58116521 A JP S58116521A
Authority
JP
Japan
Prior art keywords
layer
electrochromic display
display element
coloring
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56213677A
Other languages
Japanese (ja)
Inventor
Tetsuzo Yoshimura
徹三 吉村
Masanori Watanabe
渡辺 正紀
Yoshiro Koike
善郎 小池
Kohei Kiyota
航平 清田
Masao Tanaka
正男 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56213677A priority Critical patent/JPS58116521A/en
Publication of JPS58116521A publication Critical patent/JPS58116521A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/15Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect
    • G02F1/153Constructional details
    • G02F1/1533Constructional details structural features not otherwise provided for

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)

Abstract

PURPOSE:To eliminate the natural coloring of an electrochromic display (ECD) element which uses an electrolyte containing transition metal including Li by vapor-depositing its EC layer under a high vacuum having a specific value or above while heating a substrate at specific temperature or above. CONSTITUTION:On the glass substrate 1, a transparent electrode 2, the EC layer 3 containing WO3, and an ion conductive layer made of a transition metal oxide containing Li (e.g. Li2WO4) as an electrolyte layer 4 are formed. On the layer 4, an electrode 5 of Au, etc., and a top WO3 layer 6 for air shielding are formed to obtain the ECD element. When said EC layer 3 is formed, the formation is carried out under a high vacuum having a >=10<-6>Torr degree of vacuum and the substrate 1 is heated at >=100 deg.C, e.g. 160 deg.C. The layer 4 is vapor-deposited at <=25 deg.C. Thus, Li in the layer 4 is diffused into the EC layer 3 and consequently residual coloring due to the trapping of Li in the layer caused by natural coloring is eliminated.

Description

【発明の詳細な説明】 (4)技術の分野 本発明はエレクトロタ0ミフ2表示素子の製造法に関し
、特に、イオン導電層がリチウA (Li )添加物を
含むエレクトロクロミック表示素子の製造法に関する。
DETAILED DESCRIPTION OF THE INVENTION (4) Field of Technology The present invention relates to a method for manufacturing an electrochromic display element, and more particularly to a method for manufacturing an electrochromic display element in which the ion conductive layer contains a lithium A (Li) additive. Regarding.

(6)技術の背景 電極間にエレクトロクロミック層と、電解質のイオン導
電層を設けたエレクトロクロミック表示素子が知られて
おり、電極間に選択的に電圧を印加して、所望の表示パ
ターンを得るようにしている。
(6) Background of the technology Electrochromic display elements are known in which an electrochromic layer and an ion-conductive layer of electrolyte are provided between electrodes, and a desired display pattern is obtained by selectively applying a voltage between the electrodes. That's what I do.

ロ 従来技術と問題点 第1図はエレクトロクロミック表示素子の構成を示し、
ガラス基板1上に透明電極2、酸化タングステン(WO
s )を含むエレクトロクロミック(EC)層3、電解
質性のイオン導電層4、対向電極5が積層される。
B. Prior art and problems Figure 1 shows the structure of an electrochromic display element.
A transparent electrode 2 and tungsten oxide (WO
An electrochromic (EC) layer 3 containing s), an electrolytic ion conductive layer 4, and a counter electrode 5 are laminated.

イオン導電層物質としてはLi を含む遷移金属酸化物
を添加した。電子及びホール又は電子の不透過性物質が
用いられる。
A transition metal oxide containing Li was added as the ion conductive layer material. Electron and hole or electron opaque materials are used.

このLi添加は、着色効果を高め、消色応答特性の高速
化のためである。従来EC層、電解質層祉、基板を室温
(25℃)に保ったまま真空[10Torr〜l OT
orrの下で蒸着法によ層形成していた。
The purpose of this Li addition is to enhance the coloring effect and speed up the decoloring response characteristics. Conventionally, the EC layer, electrolyte layer, and substrate were kept at room temperature (25°C) and vacuum [10 Torr~l OT
The layer was formed by a vapor deposition method under orr.

ところがイオン導電層4中のLiが10層3中へ拡散し
、自然着色を生じ又、10層3中に存在するLl トラ
ップのため残留着色が生じるという欠点があった (至)発明の目的 本発明祉上記従来の欠点に鑑みLi拡散による自然着色
及びEC層中のLi  )ラップによる残留着色を解消
しうるエレクトロクロミック表示素子の製造法を提供す
ることを目的とする。
However, Li in the ion conductive layer 4 diffuses into the 10 layer 3, causing natural coloring, and residual coloring occurs due to Ll traps present in the 10 layer 3. SUMMARY OF THE INVENTION In view of the above-mentioned conventional drawbacks, an object of the present invention is to provide a method for manufacturing an electrochromic display element that can eliminate natural coloring due to Li diffusion and residual coloring due to Li wrapping in the EC layer.

(ト)発明の構成 そして仁の目的は本発明によればリチウム(Li )を
含む遷移金属酸化物が少なくとも1種類含有された電解
質を用いたエレクトロクロミック表示素子の製造法にお
いて、エレクトロクロミック層の形成を10  Tor
r以上の高真空中で蒸着によシ行っ九ことを特徴とする
エレクトロクロミック表示素子の製造法を提供すること
により達成される。
(G) Structure and object of the invention According to the present invention, in a method for manufacturing an electrochromic display element using an electrolyte containing at least one type of transition metal oxide including lithium (Li), an electrochromic layer is formed. Formation at 10 Tor
This is achieved by providing a method for manufacturing an electrochromic display element, characterized in that vapor deposition is carried out in a high vacuum of r or more.

(ロ)発明の実施例 以下図面を参照しながら本発明の実施例をi#述する。(b) Examples of the invention Embodiments of the present invention will be described below with reference to the drawings.

ta1図により説明する。電解質層として、Li、WO
4、EC層とし一’r wo、 を用いた。
This will be explained using the ta1 diagram. As an electrolyte layer, Li, WO
4. The following was used as the EC layer.

まず、ガラス基板lを用意し、この上に酸化インジ’y
 ム(Int Ox ) KxX (Sn )t )’
−プして形成したこの透明電極2を設け、さらにこの上
にWo3層3を400 OA’の層厚に、次イテコノ上
K L i t WO4414f 2500 A’層厚
に形成する。そして、L lz WOa層4上に電極層
5として、金(Au)を150OA”O層厚に形成し、
最後に外気通弊のためwo8層6を300 OA’の層
厚に形成した。
First, a glass substrate l is prepared, and indium oxide is placed on it.
(Int Ox) KxX (Sn)t)'
This transparent electrode 2 is provided, and a Wo3 layer 3 is formed thereon to a thickness of 400 OA', and then a Wo3 layer 3 is formed thereon to a thickness of 2500 A'. Then, gold (Au) is formed as an electrode layer 5 on the L lz WOa layer 4 to a thickness of 150OA"O,
Finally, a WO8 layer 6 was formed to a thickness of 300 OA' for ventilation of outside air.

これらガラス基板上のWOs層、Li、WO,層、Au
層、および遮弊用wo3層は真空蒸着にょ層形成した。
WOs layer, Li, WO, layer, Au on these glass substrates
The WO3 layer and the WO3 shielding layer were formed by vacuum evaporation.

第2図は真空蒸着時における真空度と、自然着色#1度
との関係を示す図であって、真空度が10  Torr
以下の場合自然着色111f/ri極めて低くなってい
る。
Figure 2 is a diagram showing the relationship between the degree of vacuum during vacuum evaporation and natural coloring #1 degree, when the degree of vacuum is 10 Torr.
Natural coloration 111f/ri is extremely low in the following cases.

第3図および第4図は電極2,5間に一3vの電圧を印
加したとき、および両電極2.5間を短絡したときの消
色特性を示す。
FIGS. 3 and 4 show the decoloring characteristics when a voltage of -3 V is applied between the electrodes 2 and 5, and when both electrodes 2.5 are short-circuited.

これらの図において、添字A−Cは次の蒸着条件を示す
In these figures, subscripts A-C indicate the following deposition conditions.

A:真空度が10  Torr、WOs層形成時の基板
温度160℃、L i 2 WO4層形成時の基板温度
25℃の下での蒸着。
A: Vapor deposition at a vacuum degree of 10 Torr, a substrate temperature of 160° C. when forming the WOs layer, and a substrate temperature of 25° C. when forming the Li 2 WO4 layer.

B:真空度が1.0  Torr、WOs層およびL 
i 2WO,層形成時の基板温度25℃の下での蒸着O C:真!!I!&が10  TorrXWOs層および
Li2WO4層形成時の基板!度25℃の下での蒸着。
B: Vacuum degree is 1.0 Torr, WOs layer and L
i 2WO, evaporation at a substrate temperature of 25°C during layer formation O C: True! ! I! & is 10 TorrXWOs layer and Li2WO4 layer formation substrate! Deposition under 25 degrees Celsius.

第3図、第4図から明らかなよう[10’Torrの真
空下でWOj層、L i 2 WO4層の形成を行えば
残留着色は低減される0 さらに、WOI層形成時に基板加熱を行えは、残留着色
は更に低減することが判る。
As is clear from FIGS. 3 and 4, residual coloring can be reduced if the WOj layer and Li 2 WO 4 layer are formed under a vacuum of 10'Torr. Furthermore, it is not possible to heat the substrate when forming the WOI layer. , it can be seen that the residual coloring is further reduced.

このように自然着色、残留着色が低減する理由は、EC
層中に存在するLi  )ラップレベルが低減するため
であると考えられる。
The reason why natural coloring and residual coloring are reduced is that EC
This is thought to be due to a reduction in the Li (Li) wrap level present in the layer.

第5図(a)は両電極2,5間に第5図(b)に示す駆
動波形を印加した場合の表示部の着色濃度へ〇、Dを示
すものである。このような受渡駆動では本来その平均化
作用により着色濃度は添字Aで示す曲線のように零に近
いはずであるが、添字B、Cで示すように時間とともに
着色濃度が増大する。
FIG. 5(a) shows the coloring density of the display section when the driving waveform shown in FIG. 5(b) is applied between both electrodes 2 and 5. In such a transfer drive, the coloring density should originally be close to zero as shown by the curve indicated by subscript A due to the averaging effect, but the coloring density increases with time as shown by subscripts B and C.

これは条件B、Cの場合、EC層中のLiトラップレベ
ルのためであると考えられる。
This is considered to be due to the Li trap level in the EC layer in the case of conditions B and C.

Q 発明の詳細 な説明したように本発明によれば、電解質層としてLi
 を含むエレクトロクロミック表示素子は自然着色がな
く、かつ残留着色の少なくなる。
Q As described in detail, according to the present invention, Li is used as the electrolyte layer.
An electrochromic display element containing the above has no natural coloring and has less residual coloring.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図扛エレクトロクロミック表示素子の構成図、第2
図は真空度と自然着色との関係図、第3図、および第4
図は消色特性図、第5図は着色変化を示す図である。 1:基板、2:透明電極、3:EC物質層、4:電解質
層、5:電極。 7 l  プ 寥 2 名 具 9曳 (To rr ) 第 3 粘 P合間(mS) 第4 粘 時 間 (Sン 第 5 V
Figure 1: Configuration diagram of the electrochromic display element, Figure 2:
The diagram shows the relationship between vacuum degree and natural coloring, Figures 3 and 4.
The figure is a decoloring characteristic diagram, and FIG. 5 is a diagram showing coloring changes. 1: Substrate, 2: Transparent electrode, 3: EC material layer, 4: Electrolyte layer, 5: Electrode. 7 l Pump 2 Megu 9 Torr (Torr) 3rd viscosity P interval (mS) 4th viscosity time (Sn 5th V

Claims (1)

【特許請求の範囲】 一<1>  vチウム(Li )を含む遷移金属酸化物
が少なくとも1種類含有された電解質を用いたエレクト
ロクロミック表示素子の製造法において、エレクトロク
ロミック層の形成を1O−6Torr以上の高真空中で
蒸着により行ったことを特徴とするエレクトロクロミッ
ク表示素子の製造法。 (2)前記、エレク)oクロミック層の形成時に100
℃以上の基板加熱を行ったことを特徴とする特許請求の
範1iJI(1)項に記載のエレクトロクロミック表示
素子の製造法。
[Scope of Claims] 1<1> In a method for manufacturing an electrochromic display element using an electrolyte containing at least one transition metal oxide containing v tium (Li), the electrochromic layer is formed at 1O-6 Torr. A method for producing an electrochromic display element, characterized in that it is carried out by vapor deposition in a high vacuum as described above. (2) 100% when forming the chromic layer (above)
The method for manufacturing an electrochromic display element according to claim 1iJI(1), characterized in that the substrate is heated to a temperature of .degree. C. or higher.
JP56213677A 1981-12-29 1981-12-29 Manufacture of electrochromic display element Pending JPS58116521A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56213677A JPS58116521A (en) 1981-12-29 1981-12-29 Manufacture of electrochromic display element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56213677A JPS58116521A (en) 1981-12-29 1981-12-29 Manufacture of electrochromic display element

Publications (1)

Publication Number Publication Date
JPS58116521A true JPS58116521A (en) 1983-07-11

Family

ID=16643137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56213677A Pending JPS58116521A (en) 1981-12-29 1981-12-29 Manufacture of electrochromic display element

Country Status (1)

Country Link
JP (1) JPS58116521A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013525860A (en) * 2010-04-30 2013-06-20 ビュー, インコーポレイテッド Electrochromic devices

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013525860A (en) * 2010-04-30 2013-06-20 ビュー, インコーポレイテッド Electrochromic devices

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