JPS58112907U - X-ray film thickness device - Google Patents

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は軸合せ用具図でａは上面図、ｂは正面図、第２
図はこの考案による螢光Ｘ線装置の構成図である。 １・・・・・・螢光板、２・・・・・・螢光板台、３・
・・・・・Ｘ線管、４・・・・・・フリメータ、５・・
・・・・光学スコープ。Figure 1 is a diagram of the alignment tool, where a is a top view, b is a front view, and
The figure is a configuration diagram of a fluorescent X-ray apparatus according to this invention. 1... Fluorescent plate, 2... Fluorescent plate stand, 3.
...X-ray tube, 4...Furimeter, 5...
...optical scope.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] Ｘ線を試料に照射して発生した螢光Ｘ線を検出する事に
より試料の膜厚を測定する装置において螢光板を斜めに
傾いた状態に保持する螢光板台上に、斜めに係いた状態
で垂直上方より見て多重のある決まった間隔をもった同
心円同心円中心を通る相互に等角度をもった２本の十字
線が描かれている螢光板を前記螢光板台上に装置した軸
合せ用具を備え、この軸合せ用具で、試料の測定点を決
める光学スコープの光軸とＸ線管よりのＸ線軸を一致せ
しめるようにしたことを特徴とするＸ線膜厚装置。In a device that measures the film thickness of a sample by irradiating the sample with X-rays and detecting the fluorescent X-rays generated, the fluorescent plate is held at an angle. A fluorescent plate on which two cross lines are drawn at equal angles to each other passing through the centers of multiple concentric circles with a fixed interval when viewed from vertically upward is arranged on the fluorescent plate stand. 1. An X-ray film thickness apparatus comprising a tool, and the alignment tool aligns the optical axis of an optical scope for determining a measurement point on a sample with the X-ray axis from an X-ray tube.