JPS5788354A - X-ray analysing apparatus - Google Patents

X-ray analysing apparatus

Info

Publication number
JPS5788354A
JPS5788354A JP55164464A JP16446480A JPS5788354A JP S5788354 A JPS5788354 A JP S5788354A JP 55164464 A JP55164464 A JP 55164464A JP 16446480 A JP16446480 A JP 16446480A JP S5788354 A JPS5788354 A JP S5788354A
Authority
JP
Japan
Prior art keywords
sample
rays
detector
ray
spectral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55164464A
Other languages
Japanese (ja)
Other versions
JPH0136061B2 (en
Inventor
Teruji Hirai
Gen Date
Fukuo Zenitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP55164464A priority Critical patent/JPS5788354A/en
Publication of JPS5788354A publication Critical patent/JPS5788354A/en
Publication of JPH0136061B2 publication Critical patent/JPH0136061B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
    • G01N23/2076—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions for spectrometry, i.e. using an analysing crystal, e.g. for measuring X-ray fluorescence spectrum of a sample with wavelength-dispersion, i.e. WDXFS
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To make the analysis of the whole wide area of a large-sized sample efficiently, by relatively moving a spectral crystal in parallel with a sample and many cylindrical slits and also, an X-ray spectral part consisting of an X-ray detector, with the sample. CONSTITUTION:A spectroscope is constituted by arranging one straight line (x) on the surface of sample, a spectral crystal 3 and slits 41 on one supposed Rowland. Fluorescence X-rays are radiated from a sample 2 by irradiating X-rays from an X-ray source 1 and the fluorescence X-rays are separated into their spectral components by the spectroscope. Here, on occasion of measuring the concentration distribution of sulfur in a section of steel material, a position of a slit 4 is regulated suitably so that the characteristic X-rays of sulfur are made incident to a detector 5. The output of the detector 5 is read successively to store in a memory. When the data of the one line (x) on the surface of the sample are finished to collect, the sample 2 is moved at a prescribed distance in the direction at a right angles to the line (x) and the data are collected again. Hereby, the analysis of the whole surface of the sample is carried out in a short time by one-dimensional scanning.
JP55164464A 1980-11-21 1980-11-21 X-ray analysing apparatus Granted JPS5788354A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55164464A JPS5788354A (en) 1980-11-21 1980-11-21 X-ray analysing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55164464A JPS5788354A (en) 1980-11-21 1980-11-21 X-ray analysing apparatus

Publications (2)

Publication Number Publication Date
JPS5788354A true JPS5788354A (en) 1982-06-02
JPH0136061B2 JPH0136061B2 (en) 1989-07-28

Family

ID=15793666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55164464A Granted JPS5788354A (en) 1980-11-21 1980-11-21 X-ray analysing apparatus

Country Status (1)

Country Link
JP (1) JPS5788354A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63139300A (en) * 1986-12-02 1988-06-11 科学技術庁無機材質研究所長 Scanning x-ray diffraction microscope with one-dimensional position sensor
JPS63139298A (en) * 1986-12-01 1988-06-11 科学技術庁無機材質研究所長 Simple type one-dimensional scanning x-ray diffraction microscope with monochromator
JPS63139238A (en) * 1986-12-01 1988-06-11 Natl Inst For Res In Inorg Mater Simple one-dimensional scanning x-ray diffraction microscope
JPS63139299A (en) * 1986-12-02 1988-06-11 科学技術庁無機材質研究所長 One-dimensional scanning x-ray diffraction microscope
JPH05264479A (en) * 1992-01-27 1993-10-12 Philips Gloeilampenfab:Nv X-ray analyzer
WO2018211664A1 (en) * 2017-05-18 2018-11-22 株式会社島津製作所 X-ray spectrometer
WO2019230376A1 (en) * 2018-05-31 2019-12-05 キヤノン株式会社 Identification device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63139298A (en) * 1986-12-01 1988-06-11 科学技術庁無機材質研究所長 Simple type one-dimensional scanning x-ray diffraction microscope with monochromator
JPS63139238A (en) * 1986-12-01 1988-06-11 Natl Inst For Res In Inorg Mater Simple one-dimensional scanning x-ray diffraction microscope
JPS63139300A (en) * 1986-12-02 1988-06-11 科学技術庁無機材質研究所長 Scanning x-ray diffraction microscope with one-dimensional position sensor
JPS63139299A (en) * 1986-12-02 1988-06-11 科学技術庁無機材質研究所長 One-dimensional scanning x-ray diffraction microscope
JPH05264479A (en) * 1992-01-27 1993-10-12 Philips Gloeilampenfab:Nv X-ray analyzer
WO2018211664A1 (en) * 2017-05-18 2018-11-22 株式会社島津製作所 X-ray spectrometer
WO2019230376A1 (en) * 2018-05-31 2019-12-05 キヤノン株式会社 Identification device
JP2019211252A (en) * 2018-05-31 2019-12-12 キヤノン株式会社 Identification device

Also Published As

Publication number Publication date
JPH0136061B2 (en) 1989-07-28

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