JPS578402B2 - - Google Patents
Info
- Publication number
- JPS578402B2 JPS578402B2 JP741415A JP141574A JPS578402B2 JP S578402 B2 JPS578402 B2 JP S578402B2 JP 741415 A JP741415 A JP 741415A JP 141574 A JP141574 A JP 141574A JP S578402 B2 JPS578402 B2 JP S578402B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP741415A JPS578402B2 (en) | 1973-12-28 | 1973-12-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP741415A JPS578402B2 (en) | 1973-12-28 | 1973-12-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5099357A JPS5099357A (en) | 1975-08-07 |
JPS578402B2 true JPS578402B2 (en) | 1982-02-16 |
Family
ID=11500836
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP741415A Expired JPS578402B2 (en) | 1973-12-28 | 1973-12-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS578402B2 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5333649A (en) * | 1976-09-09 | 1978-03-29 | Handotai Kenkyu Shinkokai | Method of and apparatus for detecting distance |
JPS6167513U (en) * | 1984-10-09 | 1986-05-09 | ||
JPH07104135B2 (en) * | 1986-10-27 | 1995-11-13 | 日本電信電話株式会社 | Measuring method of minute gap and its measuring device |
JPS63128218A (en) * | 1986-11-18 | 1988-05-31 | Toyobo Co Ltd | Distance measuring method |
JP3779357B2 (en) * | 1995-10-06 | 2006-05-24 | 良規 平岩 | Confocal scanning optical microscope |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3738754A (en) * | 1970-03-20 | 1973-06-12 | Thomson Csf | Optical contacting systems for positioning and metrology systems |
-
1973
- 1973-12-28 JP JP741415A patent/JPS578402B2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3738754A (en) * | 1970-03-20 | 1973-06-12 | Thomson Csf | Optical contacting systems for positioning and metrology systems |
Also Published As
Publication number | Publication date |
---|---|
JPS5099357A (en) | 1975-08-07 |