JPS578402B2 - - Google Patents

Info

Publication number: JPS578402B2
Authority: JP; Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP741415A

Other languages

Japanese (ja)

Other versions

JPS5099357A (en

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1973-12-28

Filing date

1973-12-28

Publication date

1982-02-16

1973-12-28 Application filed filed Critical

1973-12-28 Priority to JP741415A priority Critical patent/JPS578402B2/ja

1975-08-07 Publication of JPS5099357A publication Critical patent/JPS5099357A/ja

1982-02-16 Publication of JPS578402B2 publication Critical patent/JPS578402B2/ja

Status Expired legal-status Critical Current

Links

Landscapes

Instruments For Measurement Of Length By Optical Means (AREA)
Length Measuring Devices By Optical Means (AREA)
Optical Transform (AREA)

JP741415A 1973-12-28 1973-12-28 Expired JPS578402B2 (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP741415A JPS578402B2 (en)	1973-12-28	1973-12-28

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP741415A JPS578402B2 (en)	1973-12-28	1973-12-28

Publications (2)

Publication Number	Publication Date
JPS5099357A JPS5099357A (en)	1975-08-07
JPS578402B2 true JPS578402B2 (en)	1982-02-16

Family

ID=11500836

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP741415A Expired JPS578402B2 (en)	1973-12-28	1973-12-28

Country Status (1)

Country	Link
JP (1)	JPS578402B2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5333649A (en) *	1976-09-09	1978-03-29	Handotai Kenkyu Shinkokai	Method of and apparatus for detecting distance
JPS6167513U (en) *	1984-10-09	1986-05-09
JPH07104135B2 (en) *	1986-10-27	1995-11-13	日本電信電話株式会社	Measuring method of minute gap and its measuring device
JPS63128218A (en) *	1986-11-18	1988-05-31	Toyobo Co Ltd	Distance measuring method
JP3779357B2 (en) *	1995-10-06	2006-05-24	良規平岩	Confocal scanning optical microscope

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3738754A (en) *	1970-03-20	1973-06-12	Thomson Csf	Optical contacting systems for positioning and metrology systems

1973
- 1973-12-28 JP JP741415A patent/JPS578402B2/ja not_active Expired

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3738754A (en) *	1970-03-20	1973-06-12	Thomson Csf	Optical contacting systems for positioning and metrology systems

Also Published As

Publication number	Publication date
JPS5099357A (en)	1975-08-07

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