JPS5776739A - Electron/ion source - Google Patents
Electron/ion sourceInfo
- Publication number
- JPS5776739A JPS5776739A JP15215380A JP15215380A JPS5776739A JP S5776739 A JPS5776739 A JP S5776739A JP 15215380 A JP15215380 A JP 15215380A JP 15215380 A JP15215380 A JP 15215380A JP S5776739 A JPS5776739 A JP S5776739A
- Authority
- JP
- Japan
- Prior art keywords
- electron
- ion source
- ion
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15215380A JPS5776739A (en) | 1980-10-31 | 1980-10-31 | Electron/ion source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15215380A JPS5776739A (en) | 1980-10-31 | 1980-10-31 | Electron/ion source |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5776739A true JPS5776739A (en) | 1982-05-13 |
JPS637423B2 JPS637423B2 (en) | 1988-02-16 |
Family
ID=15534176
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15215380A Granted JPS5776739A (en) | 1980-10-31 | 1980-10-31 | Electron/ion source |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5776739A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021528815A (en) * | 2018-06-20 | 2021-10-21 | ボード オブ トラスティーズ オブ ミシガン ステート ユニバーシティ | Single beam plasma source |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS514496A (en) * | 1974-05-27 | 1976-01-14 | Philips Nv |
-
1980
- 1980-10-31 JP JP15215380A patent/JPS5776739A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS514496A (en) * | 1974-05-27 | 1976-01-14 | Philips Nv |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021528815A (en) * | 2018-06-20 | 2021-10-21 | ボード オブ トラスティーズ オブ ミシガン ステート ユニバーシティ | Single beam plasma source |
Also Published As
Publication number | Publication date |
---|---|
JPS637423B2 (en) | 1988-02-16 |
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