JPS5773606A - Detector for tip shape of fine body - Google Patents
Detector for tip shape of fine bodyInfo
- Publication number
- JPS5773606A JPS5773606A JP14901980A JP14901980A JPS5773606A JP S5773606 A JPS5773606 A JP S5773606A JP 14901980 A JP14901980 A JP 14901980A JP 14901980 A JP14901980 A JP 14901980A JP S5773606 A JPS5773606 A JP S5773606A
- Authority
- JP
- Japan
- Prior art keywords
- tip
- light
- shielding plate
- tip shape
- detected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2433—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring outlines by shadow casting
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE:To measure the tip shape of a fine body with high precision by irradiating a light-shielding plate, formed corresponding to an enlarged image of a sample, with laser parallel beam and by detecting the position of the obtained Fraunhofer diffraction line. CONSTITUTION:At the tip position of an enlarged image of a fine sample to be detected obtained on a screen, photoelectric converting elements are provided to generate electric signals corresponding to the tip shape, and a light-shielding plate is formed corresponding to the shape. Then, the position of a Fraunhofer diffraction line obtained by projecting laser parallel beam upon the light-shielding plate is detected by the photoelectric converting elements to detect the tip shape. For example, photoarrays 5 and 6 are arranged in the center of the enlarged image 1' of the tip and near it to generate signals which correspond to the gradient of the tip part, and then a movable iron piece 10 is driven through a solenoid 9 to made the attitude of the light-shielding plate 11 correspond to the said gradient; and the position of the Fraunhofer diffraction line A'' when a point A' is irradiated with laser beam is detected by a photoarray 19 to detect the tip shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14901980A JPS5773606A (en) | 1980-10-24 | 1980-10-24 | Detector for tip shape of fine body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14901980A JPS5773606A (en) | 1980-10-24 | 1980-10-24 | Detector for tip shape of fine body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5773606A true JPS5773606A (en) | 1982-05-08 |
Family
ID=15465887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14901980A Pending JPS5773606A (en) | 1980-10-24 | 1980-10-24 | Detector for tip shape of fine body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5773606A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5913218A (en) * | 1982-07-15 | 1984-01-24 | Nippon Kogaku Kk <Nikon> | Shaping device of spectacle frame |
| EP0899539A2 (en) * | 1997-08-27 | 1999-03-03 | Siemens Aktiengesellschaft | Method as well as device for obtaining information through at least one optical fibre end |
-
1980
- 1980-10-24 JP JP14901980A patent/JPS5773606A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5913218A (en) * | 1982-07-15 | 1984-01-24 | Nippon Kogaku Kk <Nikon> | Shaping device of spectacle frame |
| JPH0117130B2 (en) * | 1982-07-15 | 1989-03-29 | Nikon Kk | |
| EP0899539A2 (en) * | 1997-08-27 | 1999-03-03 | Siemens Aktiengesellschaft | Method as well as device for obtaining information through at least one optical fibre end |
| EP0899539A3 (en) * | 1997-08-27 | 2000-05-03 | Siemens Aktiengesellschaft | Method as well as device for obtaining information through at least one optical fibre end |
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