JPS5769748A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5769748A JPS5769748A JP14546480A JP14546480A JPS5769748A JP S5769748 A JPS5769748 A JP S5769748A JP 14546480 A JP14546480 A JP 14546480A JP 14546480 A JP14546480 A JP 14546480A JP S5769748 A JPS5769748 A JP S5769748A
- Authority
- JP
- Japan
- Prior art keywords
- film
- shortcircuit
- disconnection
- glass
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76819—Smoothing of the dielectric
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Local Oxidation Of Silicon (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To prevent the disconnection and shortcircuit of a semiconductor device by thermally setting a film without heating a metallic wire under the film to the film as an interlayer insulating film formed by spincoating glass or chemical liquid phase growth by energy beam emitted. CONSTITUTION:An aluminum wire 3 is patterned on an SiO2 film 2 on an Si substrate 1. A PSG film 4 is covered thereon. Then, a film (CLD film) 5 by a chemical liquid phase growth or spincoat glass is formed, and carbon dioxide gas laser of wavelength of 10.5mum is emitted to the overall surface. The surface is thermally set by this emission, but the heat does not reach the lower layer. Thus, the respective layers in the multilayer structure of the IC can be flattened to prevent the disconnection and shortcircuit.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14546480A JPS5769748A (en) | 1980-10-17 | 1980-10-17 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14546480A JPS5769748A (en) | 1980-10-17 | 1980-10-17 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5769748A true JPS5769748A (en) | 1982-04-28 |
Family
ID=15385837
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14546480A Pending JPS5769748A (en) | 1980-10-17 | 1980-10-17 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5769748A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5249311A (en) * | 1975-10-20 | 1977-04-20 | Midori Kurasawa | Dyeing method of creped paper |
JPS5280779A (en) * | 1975-12-27 | 1977-07-06 | Fujitsu Ltd | Production of simiconductor device |
-
1980
- 1980-10-17 JP JP14546480A patent/JPS5769748A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5249311A (en) * | 1975-10-20 | 1977-04-20 | Midori Kurasawa | Dyeing method of creped paper |
JPS5280779A (en) * | 1975-12-27 | 1977-07-06 | Fujitsu Ltd | Production of simiconductor device |
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