JPS5748462A - Grinding attachment for modifying automatically form - Google Patents

Grinding attachment for modifying automatically form

Info

Publication number
JPS5748462A
JPS5748462A JP55119863A JP11986380A JPS5748462A JP S5748462 A JPS5748462 A JP S5748462A JP 55119863 A JP55119863 A JP 55119863A JP 11986380 A JP11986380 A JP 11986380A JP S5748462 A JPS5748462 A JP S5748462A
Authority
JP
Japan
Prior art keywords
base plate
uniform pattern
work
judge
rotated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55119863A
Other languages
Japanese (ja)
Other versions
JPS5815265B2 (en
Inventor
Junji Watanabe
Eiichi Tsukada
Toshiro Karaki
Mitsuo Kajita
Fumikazu Ohira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP55119863A priority Critical patent/JPS5815265B2/en
Publication of JPS5748462A publication Critical patent/JPS5748462A/en
Publication of JPS5815265B2 publication Critical patent/JPS5815265B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)

Abstract

PURPOSE: To provide a base plate having an approximately uniform pattern over the whole surface of the base plate by automatically detecting the pattern embossed on a work surface to judge a form to be worked for grinding the base plate.
CONSTITUTION: Patterns in the proximities of outer periphery and center of a base plate 1 in a measuring station III are measured by the use of a picture taking lens 10, light source 11 and eyepiece 12 with a circular table 4 being rotated. The result is calculated to judge shears of the respective portions of the base plate 1 from the uniform pattern and determine portions to be ground thicker than those in the base plate 1. A base plate holding stage 16 is operated to be specifically slanted, and the circular table 4 is rotated to approach a work stage I for a predetermined work so that the base plate having an approximately uniform pattern over the whole surface thereof is provided.
COPYRIGHT: (C)1982,JPO&Japio
JP55119863A 1980-09-01 1980-09-01 Automatic shape correction polishing equipment Expired JPS5815265B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55119863A JPS5815265B2 (en) 1980-09-01 1980-09-01 Automatic shape correction polishing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55119863A JPS5815265B2 (en) 1980-09-01 1980-09-01 Automatic shape correction polishing equipment

Publications (2)

Publication Number Publication Date
JPS5748462A true JPS5748462A (en) 1982-03-19
JPS5815265B2 JPS5815265B2 (en) 1983-03-24

Family

ID=14772129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55119863A Expired JPS5815265B2 (en) 1980-09-01 1980-09-01 Automatic shape correction polishing equipment

Country Status (1)

Country Link
JP (1) JPS5815265B2 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3221395A1 (en) * 1982-06-05 1983-12-08 Werner Gerhard 6113 Babenhausen Lang Double-spindle grinding machine
JPS6125760A (en) * 1984-07-09 1986-02-04 Toshiba Corp Grinding method and device
JPS6171955A (en) * 1984-09-12 1986-04-12 Toshiba Corp Grinding method and its device
JPS61226253A (en) * 1985-03-30 1986-10-08 Mitsubishi Metal Corp Automatic parallel-surface grinder
JPS6251461A (en) * 1985-08-30 1987-03-06 Brother Ind Ltd Manufacture of printing head
US6161055A (en) * 1993-05-17 2000-12-12 Laser Measurement International Inc. Method of determining tool breakage
JP2007331106A (en) * 1995-05-23 2007-12-27 Nova Measuring Instruments Ltd Polishing method for measuring station, polishing machine, and wafer, and optical measuring method for wafer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5542738A (en) * 1978-09-20 1980-03-26 Toshiba Corp Abrasive grain processing device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5542738A (en) * 1978-09-20 1980-03-26 Toshiba Corp Abrasive grain processing device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3221395A1 (en) * 1982-06-05 1983-12-08 Werner Gerhard 6113 Babenhausen Lang Double-spindle grinding machine
JPS6125760A (en) * 1984-07-09 1986-02-04 Toshiba Corp Grinding method and device
JPH0558859B2 (en) * 1984-07-09 1993-08-27 Tokyo Shibaura Electric Co
JPS6171955A (en) * 1984-09-12 1986-04-12 Toshiba Corp Grinding method and its device
JPH0575548B2 (en) * 1984-09-12 1993-10-20 Tokyo Shibaura Electric Co
JPS61226253A (en) * 1985-03-30 1986-10-08 Mitsubishi Metal Corp Automatic parallel-surface grinder
JPS6251461A (en) * 1985-08-30 1987-03-06 Brother Ind Ltd Manufacture of printing head
US6161055A (en) * 1993-05-17 2000-12-12 Laser Measurement International Inc. Method of determining tool breakage
JP2007331106A (en) * 1995-05-23 2007-12-27 Nova Measuring Instruments Ltd Polishing method for measuring station, polishing machine, and wafer, and optical measuring method for wafer

Also Published As

Publication number Publication date
JPS5815265B2 (en) 1983-03-24

Similar Documents

Publication Publication Date Title
JPS5436682A (en) Automatic centering device
DK530576A (en) PROCEDURE FOR GRINDING THE SURFACE OF A WORKPIECE AND SUCTION GRINDING MACHINE FOR PERFORMING THE PROCEDURE
JPS5748462A (en) Grinding attachment for modifying automatically form
JPS5619052A (en) Pattern correcting device
JPS5282412A (en) Cleaning method for magnetic magnetic
JPS546186A (en) Wire-cut processing method and apparatus
JPS532773A (en) Machine tool
JPS5388728A (en) Method of forming pattern
JPS55154733A (en) Method of correcting defective mask
JPS55158505A (en) Knifed mark inspector
JPS51141112A (en) Floating face plate for transportation
JPS51124454A (en) Surface coarseness measuring method and equipment
JPS5285084A (en) Base support
JPS5439285A (en) Laser processing device
JPS5424380A (en) Work clamping device for machining tools
JPS5382492A (en) Surface inspecting method
JPS53116579A (en) Automatic aligning apparatus
JPS543587A (en) Inspecting apparatus
JPS5429181A (en) Device for indexing ring-shaped blank in press
JPS53117873A (en) Jig for processing dynamic-pressure generating surface
JPS5210993A (en) Method of automatic grinding of the surface of elbow and apparatus the reof
JPS52139460A (en) Measurement for curved surface
JPS55106729A (en) Shape steel machining device
JPS51133895A (en) Laser machining
JPS5487187A (en) Pattern matching method