JPS5741714A - Position detecting and positioning method - Google Patents

Position detecting and positioning method

Info

Publication number
JPS5741714A
JPS5741714A JP11691680A JP11691680A JPS5741714A JP S5741714 A JPS5741714 A JP S5741714A JP 11691680 A JP11691680 A JP 11691680A JP 11691680 A JP11691680 A JP 11691680A JP S5741714 A JPS5741714 A JP S5741714A
Authority
JP
Japan
Prior art keywords
shift
scan
comparison
detected
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11691680A
Other languages
Japanese (ja)
Inventor
Yoshimi Yamashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11691680A priority Critical patent/JPS5741714A/en
Publication of JPS5741714A publication Critical patent/JPS5741714A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

PURPOSE:To reduce the positioning time, by forming a V-shaped detection mark on an object to be measured and thus securing the detection for the shift of position in both X and Y directions just through a scanning action. CONSTITUTION:A V-shaped detection mark 1 is formed on a semiconductor wafer. At the same time, a reference scan (starting point Q and scanning line 4) in case when the wafer is at a prescribed position to be positioned and before detecting actual shift of position, and thus a reference scanning signal 4 is obtained. If the scan to detect the shift of position is started at R for instance, the scan 2 produces a scenning signal 5. As a result, the shift of Y direction is detected by a comparison between the spaces G and F of both pulses, and the shift of X direction can be detected by a comparison between the center positions O' and O'' of both pulses respectively.
JP11691680A 1980-08-27 1980-08-27 Position detecting and positioning method Pending JPS5741714A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11691680A JPS5741714A (en) 1980-08-27 1980-08-27 Position detecting and positioning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11691680A JPS5741714A (en) 1980-08-27 1980-08-27 Position detecting and positioning method

Publications (1)

Publication Number Publication Date
JPS5741714A true JPS5741714A (en) 1982-03-09

Family

ID=14698829

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11691680A Pending JPS5741714A (en) 1980-08-27 1980-08-27 Position detecting and positioning method

Country Status (1)

Country Link
JP (1) JPS5741714A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6125786A (en) * 1984-07-11 1986-02-04 株式会社東芝 Conveyor
JPS61100817A (en) * 1984-10-22 1986-05-19 Canon Inc Positioning method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6125786A (en) * 1984-07-11 1986-02-04 株式会社東芝 Conveyor
JPS61100817A (en) * 1984-10-22 1986-05-19 Canon Inc Positioning method

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