JPS53148393A - Positioning method - Google Patents
Positioning methodInfo
- Publication number
- JPS53148393A JPS53148393A JP6365277A JP6365277A JPS53148393A JP S53148393 A JPS53148393 A JP S53148393A JP 6365277 A JP6365277 A JP 6365277A JP 6365277 A JP6365277 A JP 6365277A JP S53148393 A JPS53148393 A JP S53148393A
- Authority
- JP
- Japan
- Prior art keywords
- center position
- positioning method
- shfit
- symmetry
- minimized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To enable to detect the center position with the shfit amount, by performing a pair of beam scannings in symmetry and with opposite direction relating to the expected center position of mark, and shifting one signal on the time axis so that the difference of the obtained signals is minimized.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6365277A JPS53148393A (en) | 1977-05-31 | 1977-05-31 | Positioning method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6365277A JPS53148393A (en) | 1977-05-31 | 1977-05-31 | Positioning method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53148393A true JPS53148393A (en) | 1978-12-23 |
JPS5646256B2 JPS5646256B2 (en) | 1981-10-31 |
Family
ID=13235486
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6365277A Granted JPS53148393A (en) | 1977-05-31 | 1977-05-31 | Positioning method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53148393A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57106130A (en) * | 1980-12-24 | 1982-07-01 | Jeol Ltd | Detecting method for mark |
JPS57119672U (en) * | 1981-01-21 | 1982-07-24 | ||
JPS6010725A (en) * | 1983-06-30 | 1985-01-19 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | System for arraying scanning beam in pattern |
US4822170A (en) * | 1986-04-30 | 1989-04-18 | Commissariat A L'energie Atomique | Sensor for the contactless linear measurement of the distance of a target by backscattered radiation |
-
1977
- 1977-05-31 JP JP6365277A patent/JPS53148393A/en active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57106130A (en) * | 1980-12-24 | 1982-07-01 | Jeol Ltd | Detecting method for mark |
JPS57119672U (en) * | 1981-01-21 | 1982-07-24 | ||
JPS6010725A (en) * | 1983-06-30 | 1985-01-19 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | System for arraying scanning beam in pattern |
US4822170A (en) * | 1986-04-30 | 1989-04-18 | Commissariat A L'energie Atomique | Sensor for the contactless linear measurement of the distance of a target by backscattered radiation |
Also Published As
Publication number | Publication date |
---|---|
JPS5646256B2 (en) | 1981-10-31 |
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