JPS5737640A - System for varying draft of air in clean room - Google Patents
System for varying draft of air in clean roomInfo
- Publication number
- JPS5737640A JPS5737640A JP11440680A JP11440680A JPS5737640A JP S5737640 A JPS5737640 A JP S5737640A JP 11440680 A JP11440680 A JP 11440680A JP 11440680 A JP11440680 A JP 11440680A JP S5737640 A JPS5737640 A JP S5737640A
- Authority
- JP
- Japan
- Prior art keywords
- air
- clean room
- dust
- draft
- room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Central Air Conditioning (AREA)
- Ventilation (AREA)
Abstract
PURPOSE:To prevent excessive purification of air in a clean room and to thereby save the power required for driving fans, by detecting the necessary draft of air in the clean room automatically through checking of dust conditions in the clean room. CONSTITUTION:Air in a clean room 1 is sampled by a dust sensor 8, and an electric signal indicating the dust conditions in the room 1 is given to a dust counter 9. The counter 9 checks the dust conditions in the room 1 and gives an electric signal to a microcomputor 10, which in turn judges whether the draft of air in the clean room 1 is to be increased or decteased and affords an instruction signal to an air supply means 2. In response to the instruction signal, fans 5 feed air through a duct 3 at a required draft rate and issues the same from outlet ports 4 into the clean room 1.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11440680A JPS5737640A (en) | 1980-08-20 | 1980-08-20 | System for varying draft of air in clean room |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11440680A JPS5737640A (en) | 1980-08-20 | 1980-08-20 | System for varying draft of air in clean room |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5737640A true JPS5737640A (en) | 1982-03-02 |
Family
ID=14636879
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11440680A Pending JPS5737640A (en) | 1980-08-20 | 1980-08-20 | System for varying draft of air in clean room |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5737640A (en) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5833930U (en) * | 1981-08-27 | 1983-03-05 | 株式会社朝日工業社 | Dust monitor for clean room or clean unit |
JPS59183231A (en) * | 1983-04-01 | 1984-10-18 | Shinwa Boeki Kk | Indoor air purifier |
JPS60164141A (en) * | 1984-02-06 | 1985-08-27 | Takasago Thermal Eng Co Lts | Clean room device with simultaneous controlling mechanism for cleanness and room pressure |
JPS60172329A (en) * | 1984-01-13 | 1985-09-05 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | Control of concentration of fine particulate contaminant in dustless chamber environment |
JPS60216139A (en) * | 1984-04-11 | 1985-10-29 | Kajima Corp | Controlling system of air conditioning in clean room |
JPS62134542A (en) * | 1985-12-07 | 1987-06-17 | Hitachi Electronics Eng Co Ltd | Data processing system of fine particle detector |
JPS63180032A (en) * | 1987-01-20 | 1988-07-25 | Nec Kyushu Ltd | Clean room |
JPH03160262A (en) * | 1989-11-20 | 1991-07-10 | Fujita Corp | Controlling method for air in clean space |
JPH0427365U (en) * | 1990-06-27 | 1992-03-04 | ||
JPH0650892U (en) * | 1992-12-24 | 1994-07-12 | 貫六 奥村 | Oval drafter |
-
1980
- 1980-08-20 JP JP11440680A patent/JPS5737640A/en active Pending
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5833930U (en) * | 1981-08-27 | 1983-03-05 | 株式会社朝日工業社 | Dust monitor for clean room or clean unit |
JPH0127081Y2 (en) * | 1981-08-27 | 1989-08-14 | ||
JPS59183231A (en) * | 1983-04-01 | 1984-10-18 | Shinwa Boeki Kk | Indoor air purifier |
JPS60172329A (en) * | 1984-01-13 | 1985-09-05 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | Control of concentration of fine particulate contaminant in dustless chamber environment |
JPS60164141A (en) * | 1984-02-06 | 1985-08-27 | Takasago Thermal Eng Co Lts | Clean room device with simultaneous controlling mechanism for cleanness and room pressure |
JPS60216139A (en) * | 1984-04-11 | 1985-10-29 | Kajima Corp | Controlling system of air conditioning in clean room |
JPS62134542A (en) * | 1985-12-07 | 1987-06-17 | Hitachi Electronics Eng Co Ltd | Data processing system of fine particle detector |
JPH0577017B2 (en) * | 1985-12-07 | 1993-10-25 | Hitachi Electr Eng | |
JPS63180032A (en) * | 1987-01-20 | 1988-07-25 | Nec Kyushu Ltd | Clean room |
JPH03160262A (en) * | 1989-11-20 | 1991-07-10 | Fujita Corp | Controlling method for air in clean space |
JPH0427365U (en) * | 1990-06-27 | 1992-03-04 | ||
JPH0650892U (en) * | 1992-12-24 | 1994-07-12 | 貫六 奥村 | Oval drafter |
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