JPS5734012A - Purifying method of chlorosilane - Google Patents
Purifying method of chlorosilaneInfo
- Publication number
- JPS5734012A JPS5734012A JP10398580A JP10398580A JPS5734012A JP S5734012 A JPS5734012 A JP S5734012A JP 10398580 A JP10398580 A JP 10398580A JP 10398580 A JP10398580 A JP 10398580A JP S5734012 A JPS5734012 A JP S5734012A
- Authority
- JP
- Japan
- Prior art keywords
- chlorosilane
- aluminum chloride
- polymer containing
- resultant mixture
- organic compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Silicon Compounds (AREA)
Abstract
PURPOSE: To separate and remove phosphorus compounds contained in chlorosilane effectively, by adding a specific cyclic organic compound or a polymer containing phenol and aluminum chloride to the chlorosilane, and distilling the resultant mixture.
CONSTITUTION: An organic compound expressed by formula I or II (X is hydroxy, alkoxy, nitro or saturated aliphatic acyloxy; Y is H, alkyl or aldehyde group), e.g. phenol or hydroxycyclohexane, or a polymer containing phenol, e.g. the compound expressed by formula III (n is 1W5) and aluminum chloride are added to crude chlorosilane, and the resultant mixture is then distilled to remove phosphorus compounds, particularly phosphorus oxychloride, contained therein and afford purified chlorosilane suitable for preparing the semiconductor silicon.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10398580A JPS5734012A (en) | 1980-07-29 | 1980-07-29 | Purifying method of chlorosilane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10398580A JPS5734012A (en) | 1980-07-29 | 1980-07-29 | Purifying method of chlorosilane |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5734012A true JPS5734012A (en) | 1982-02-24 |
Family
ID=14368599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10398580A Pending JPS5734012A (en) | 1980-07-29 | 1980-07-29 | Purifying method of chlorosilane |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5734012A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012056621A1 (en) * | 2010-10-27 | 2012-05-03 | 信越化学工業株式会社 | Method for purifying chlorosilanes |
| WO2020153342A1 (en) | 2019-01-22 | 2020-07-30 | 株式会社トクヤマ | Method for producing refined chlorosilane |
-
1980
- 1980-07-29 JP JP10398580A patent/JPS5734012A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012056621A1 (en) * | 2010-10-27 | 2012-05-03 | 信越化学工業株式会社 | Method for purifying chlorosilanes |
| JP2012091960A (en) * | 2010-10-27 | 2012-05-17 | Shin-Etsu Chemical Co Ltd | Method for purifying chlorosilanes |
| CN103201218A (en) * | 2010-10-27 | 2013-07-10 | 信越化学工业株式会社 | Method for purifying chlorosilanes |
| US9126838B2 (en) | 2010-10-27 | 2015-09-08 | Shin-Etsu Chemical Co., Ltd. | Method for purifying chlorosilanes |
| WO2020153342A1 (en) | 2019-01-22 | 2020-07-30 | 株式会社トクヤマ | Method for producing refined chlorosilane |
| CN113302153A (en) * | 2019-01-22 | 2021-08-24 | 株式会社德山 | Method for producing purified chlorosilanes |
| KR20210114413A (en) | 2019-01-22 | 2021-09-23 | 가부시키가이샤 도쿠야마 | Method for producing purified chlorosilanes |
| US20220073358A1 (en) * | 2019-01-22 | 2022-03-10 | Tokuyama Corporation | Method for Producing Refined Chlorosilane |
| EP3901090A4 (en) * | 2019-01-22 | 2022-09-21 | Tokuyama Corporation | Method for producing refined chlorosilane |
| TWI811520B (en) * | 2019-01-22 | 2023-08-11 | 日商德山股份有限公司 | Process for producing purified chlorosilanes |
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