JPS5729032A - Production of electrode for electrochromic display device - Google Patents

Production of electrode for electrochromic display device

Info

Publication number
JPS5729032A
JPS5729032A JP10454280A JP10454280A JPS5729032A JP S5729032 A JPS5729032 A JP S5729032A JP 10454280 A JP10454280 A JP 10454280A JP 10454280 A JP10454280 A JP 10454280A JP S5729032 A JPS5729032 A JP S5729032A
Authority
JP
Japan
Prior art keywords
film
electrode
photoresist
exposed
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10454280A
Other languages
Japanese (ja)
Inventor
Tadanori Hishida
Hiroshi Kuwagaki
Kozo Yano
Tomio Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP10454280A priority Critical patent/JPS5729032A/en
Publication of JPS5729032A publication Critical patent/JPS5729032A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect
    • G02F1/153—Constructional details
    • G02F1/1533—Constructional details structural features not otherwise provided for

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

PURPOSE:To eliminate the superposed parts of an electrochromic (EC) film and an insulation film by laminating an electrode, an EC material and a photoresist layer on a substrate, and performing patterning of the electrode and patterning of the EC display separately then forming the insulation layer on the electrodes. CONSTITUTION:After a transparent conductive film 2 is formed on a glass substrate 1, an EC material (WO3 or the like) film 3 is formed thereon, and further photoresist 9 is coated on the film 3 and is exposed and developed, whereby the film 3 is etched to the shape of electrode lead-out patterns. Next, with the film 3 as a mask, the film 2 is dry etched by gaseous CF4. Next, display electrode patterns are exposed on the photoresist 9, and are developed to etch the EC film 3, followed by washing. Next, an insulation film 8 is formed over the entire surface of the substrate 1 by vapor deposition or the like of SiO2, after which the photoresist 9 is removed with acetone or the like by ultrasonic cleaning and the SiO2 film 8 thereon is also removed. In this way, the superior EC display device wherein the conductive film 2 is not exposed to electrolyte and the occurrence of decoloring owing to overlapping of the film 8 and the EC layer 3 is obviated, is obtained.
JP10454280A 1980-07-29 1980-07-29 Production of electrode for electrochromic display device Pending JPS5729032A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10454280A JPS5729032A (en) 1980-07-29 1980-07-29 Production of electrode for electrochromic display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10454280A JPS5729032A (en) 1980-07-29 1980-07-29 Production of electrode for electrochromic display device

Publications (1)

Publication Number Publication Date
JPS5729032A true JPS5729032A (en) 1982-02-16

Family

ID=14383371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10454280A Pending JPS5729032A (en) 1980-07-29 1980-07-29 Production of electrode for electrochromic display device

Country Status (1)

Country Link
JP (1) JPS5729032A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003001288A2 (en) * 2001-06-26 2003-01-03 Ntera Limited Displays for high resolution images and methods for producing same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003001288A2 (en) * 2001-06-26 2003-01-03 Ntera Limited Displays for high resolution images and methods for producing same
WO2003001288A3 (en) * 2001-06-26 2004-04-08 Ntera Ltd Displays for high resolution images and methods for producing same

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