JPS57200567A - Photo engraving method - Google Patents
Photo engraving methodInfo
- Publication number
- JPS57200567A JPS57200567A JP8492181A JP8492181A JPS57200567A JP S57200567 A JPS57200567 A JP S57200567A JP 8492181 A JP8492181 A JP 8492181A JP 8492181 A JP8492181 A JP 8492181A JP S57200567 A JPS57200567 A JP S57200567A
- Authority
- JP
- Japan
- Prior art keywords
- metal plate
- photoresist film
- pattern
- prescribed shape
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
Abstract
PURPOSE: To form precisely a prescribed shape, by forming a photoresist film on a metal plate surface to be engraved, exposing and developing it, and immersing the metal plate in a chromic acid solution before it is baked.
CONSTITUTION: After a metal plate is pretreated, a photoresist is applied throughout the surface to form a photoresist film on it, and a mask having a pattern for obtaining a prescribed shape is placed on the photoresist film. The it is exposed to an ultraviolet light from an extra-high voltage mercury lamp as a light source, and is developed using a developing solution. At this time, according to the pattern the unrequired parts of the photoresist film are removed. Then the metal plate is immersed in a chromic acid solution (having a concentration of about 10wt%) for about 30sec. to prevent etched pits from being formed, and is heated to perform the postbaking. Further it is etched to obtain a lead frame having a prescribed shape in conformity with the pattern of the mask.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8492181A JPS57200567A (en) | 1981-06-04 | 1981-06-04 | Photo engraving method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8492181A JPS57200567A (en) | 1981-06-04 | 1981-06-04 | Photo engraving method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57200567A true JPS57200567A (en) | 1982-12-08 |
Family
ID=13844166
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8492181A Pending JPS57200567A (en) | 1981-06-04 | 1981-06-04 | Photo engraving method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57200567A (en) |
-
1981
- 1981-06-04 JP JP8492181A patent/JPS57200567A/en active Pending
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