JPS57197838A - Semiconductor flip chip element - Google Patents
Semiconductor flip chip elementInfo
- Publication number
- JPS57197838A JPS57197838A JP56080885A JP8088581A JPS57197838A JP S57197838 A JPS57197838 A JP S57197838A JP 56080885 A JP56080885 A JP 56080885A JP 8088581 A JP8088581 A JP 8088581A JP S57197838 A JPS57197838 A JP S57197838A
- Authority
- JP
- Japan
- Prior art keywords
- melting point
- point metal
- bump electrode
- solder
- window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/11—Manufacturing methods
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01022—Titanium [Ti]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01024—Chromium [Cr]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/014—Solder alloys
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Abstract
PURPOSE:To prevent the outflow of solder at the thermo compression bonding of a bump electrode, by filling the concave part formed on the surface of high melting point metal with a semiconductor flip chip element bump electrode with low melting point metal serving as solder. CONSTITUTION:After a surface protecting film 4 is adhered on an Al wiring 3 connected to an Si substrate 1 by an Si oxide film 2 window 2a on the Si substrate 1, a window 4a is provided on this surface protecting film 4 to form a bump electrode on this window part. The bump electrode forms a base metallic layer 5 constituted of three layers of Ti-Cu-Ni or Cr-Cu-Ni, etc. with a high melting point metal 9 of Au, etc. by electroplating with a photoresist as a mask thereon. Thereat, an electrodeposition condition is controlled to raise the fringe thereof 9a in abnormal growth next for the electrodeposition of low melting point metal 10 of Sn, etc. serving as solder within the fringe 9a.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56080885A JPS57197838A (en) | 1981-05-29 | 1981-05-29 | Semiconductor flip chip element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56080885A JPS57197838A (en) | 1981-05-29 | 1981-05-29 | Semiconductor flip chip element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57197838A true JPS57197838A (en) | 1982-12-04 |
Family
ID=13730792
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56080885A Pending JPS57197838A (en) | 1981-05-29 | 1981-05-29 | Semiconductor flip chip element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57197838A (en) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4950623A (en) * | 1988-08-02 | 1990-08-21 | Microelectronics Center Of North Carolina | Method of building solder bumps |
US5108950A (en) * | 1987-11-18 | 1992-04-28 | Casio Computer Co., Ltd. | Method for forming a bump electrode for a semiconductor device |
US5289631A (en) * | 1992-03-04 | 1994-03-01 | Mcnc | Method for testing, burn-in, and/or programming of integrated circuit chips |
US5767010A (en) * | 1995-03-20 | 1998-06-16 | Mcnc | Solder bump fabrication methods and structure including a titanium barrier layer |
US5793116A (en) * | 1996-05-29 | 1998-08-11 | Mcnc | Microelectronic packaging using arched solder columns |
US5892179A (en) * | 1995-04-05 | 1999-04-06 | Mcnc | Solder bumps and structures for integrated redistribution routing conductors |
US5990472A (en) * | 1997-09-29 | 1999-11-23 | Mcnc | Microelectronic radiation detectors for detecting and emitting radiation signals |
US6388203B1 (en) | 1995-04-04 | 2002-05-14 | Unitive International Limited | Controlled-shaped solder reservoirs for increasing the volume of solder bumps, and structures formed thereby |
US7495326B2 (en) | 2002-10-22 | 2009-02-24 | Unitive International Limited | Stacked electronic structures including offset substrates |
US8674494B2 (en) | 2011-08-31 | 2014-03-18 | Samsung Electronics Co., Ltd. | Semiconductor package having supporting plate and method of forming the same |
-
1981
- 1981-05-29 JP JP56080885A patent/JPS57197838A/en active Pending
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5108950A (en) * | 1987-11-18 | 1992-04-28 | Casio Computer Co., Ltd. | Method for forming a bump electrode for a semiconductor device |
US4950623A (en) * | 1988-08-02 | 1990-08-21 | Microelectronics Center Of North Carolina | Method of building solder bumps |
US5289631A (en) * | 1992-03-04 | 1994-03-01 | Mcnc | Method for testing, burn-in, and/or programming of integrated circuit chips |
US5374893A (en) * | 1992-03-04 | 1994-12-20 | Mcnc | Apparatus for testing, burn-in, and/or programming of integrated circuit chips, and for placing solder bumps thereon |
US5381946A (en) * | 1992-03-04 | 1995-01-17 | Mcnc | Method of forming differing volume solder bumps |
US6222279B1 (en) | 1995-03-20 | 2001-04-24 | Mcnc | Solder bump fabrication methods and structures including a titanium barrier layer |
US5767010A (en) * | 1995-03-20 | 1998-06-16 | Mcnc | Solder bump fabrication methods and structure including a titanium barrier layer |
US6392163B1 (en) | 1995-04-04 | 2002-05-21 | Unitive International Limited | Controlled-shaped solder reservoirs for increasing the volume of solder bumps |
US6388203B1 (en) | 1995-04-04 | 2002-05-14 | Unitive International Limited | Controlled-shaped solder reservoirs for increasing the volume of solder bumps, and structures formed thereby |
US5892179A (en) * | 1995-04-05 | 1999-04-06 | Mcnc | Solder bumps and structures for integrated redistribution routing conductors |
US6329608B1 (en) | 1995-04-05 | 2001-12-11 | Unitive International Limited | Key-shaped solder bumps and under bump metallurgy |
US6389691B1 (en) | 1995-04-05 | 2002-05-21 | Unitive International Limited | Methods for forming integrated redistribution routing conductors and solder bumps |
US5793116A (en) * | 1996-05-29 | 1998-08-11 | Mcnc | Microelectronic packaging using arched solder columns |
US5990472A (en) * | 1997-09-29 | 1999-11-23 | Mcnc | Microelectronic radiation detectors for detecting and emitting radiation signals |
US7495326B2 (en) | 2002-10-22 | 2009-02-24 | Unitive International Limited | Stacked electronic structures including offset substrates |
US8674494B2 (en) | 2011-08-31 | 2014-03-18 | Samsung Electronics Co., Ltd. | Semiconductor package having supporting plate and method of forming the same |
US9412720B2 (en) | 2011-08-31 | 2016-08-09 | Samsung Electronics Co., Ltd. | Semiconductor package having supporting plate and method of forming the same |
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