JPS57196799A - Manufacturing apparatus for beltlike silicon crystal - Google Patents

Manufacturing apparatus for beltlike silicon crystal

Info

Publication number
JPS57196799A
JPS57196799A JP8013581A JP8013581A JPS57196799A JP S57196799 A JPS57196799 A JP S57196799A JP 8013581 A JP8013581 A JP 8013581A JP 8013581 A JP8013581 A JP 8013581A JP S57196799 A JPS57196799 A JP S57196799A
Authority
JP
Japan
Prior art keywords
crystal
beltlike
rollers
die
pulled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8013581A
Other languages
Japanese (ja)
Other versions
JPS5932433B2 (en
Inventor
Masanaru Abe
Koji Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP8013581A priority Critical patent/JPS5932433B2/en
Publication of JPS57196799A publication Critical patent/JPS57196799A/en
Publication of JPS5932433B2 publication Critical patent/JPS5932433B2/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2404/00—Parts for transporting or guiding the handled material
    • B65H2404/10—Rollers
    • B65H2404/15—Roller assembly, particular roller arrangement
    • B65H2404/154—Rollers conveyor
    • B65H2404/1542—Details of pattern of rollers
    • B65H2404/15421—Chevron or herringbone configuration

Landscapes

  • Registering, Tensioning, Guiding Webs, And Rollers Therefor (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To stably manufacture a beltlike Si crystal having a uniform width by passing a beltlike Si crystal pulled up from molten Si with a capillary die through a pair of rollers havin specified grooves.
CONSTITUTION: A capillary die is partially immersed in molten high purity Si in a quartz crucible, and the molten Si is raised through a narrow slit in the die by capillarity and brought into contact with a seed crystal. A grown beltlike Si crystal is held between a pair of driving rollers 16a, 16b, and by rotating the rollers, the crystal is pulled up. At this time, spiral grooves 17 are cut in the surfaces of the rollers 16a, 16b in opposite directions on right and left sides with each central point P in the longitudinal direction as the border, and when the beltlike Si crystal passing through the rollers leans to the right or left, by the action of the grooves 17 the crystal is automatically moved to the central part of the rollers. Even if the surface temp. distribution of the die is not proper, a beltlike Si crystal having a desired width is pulled up stably.
COPYRIGHT: (C)1982,JPO&Japio
JP8013581A 1981-05-28 1981-05-28 Manufacturing equipment for band-shaped silicon crystals Expired JPS5932433B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8013581A JPS5932433B2 (en) 1981-05-28 1981-05-28 Manufacturing equipment for band-shaped silicon crystals

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8013581A JPS5932433B2 (en) 1981-05-28 1981-05-28 Manufacturing equipment for band-shaped silicon crystals

Publications (2)

Publication Number Publication Date
JPS57196799A true JPS57196799A (en) 1982-12-02
JPS5932433B2 JPS5932433B2 (en) 1984-08-08

Family

ID=13709797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8013581A Expired JPS5932433B2 (en) 1981-05-28 1981-05-28 Manufacturing equipment for band-shaped silicon crystals

Country Status (1)

Country Link
JP (1) JPS5932433B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017069107A1 (en) * 2015-10-20 2017-04-27 並木精密宝石株式会社 Sapphire single crystal and method for producing same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017069107A1 (en) * 2015-10-20 2017-04-27 並木精密宝石株式会社 Sapphire single crystal and method for producing same

Also Published As

Publication number Publication date
JPS5932433B2 (en) 1984-08-08

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