JPS5719647A - Inspecting device for sample of face plate - Google Patents
Inspecting device for sample of face plateInfo
- Publication number
- JPS5719647A JPS5719647A JP9387580A JP9387580A JPS5719647A JP S5719647 A JPS5719647 A JP S5719647A JP 9387580 A JP9387580 A JP 9387580A JP 9387580 A JP9387580 A JP 9387580A JP S5719647 A JPS5719647 A JP S5719647A
- Authority
- JP
- Japan
- Prior art keywords
- light
- luminous flux
- beltlike
- reflects
- point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
PURPOSE:To highly precisely detect a convex fault at a less energy consumption, by a method wherein a device is provided with a means which produces a cylindrical beltlike luminous flux from a dispersion light from a light source, and with a toroidal reflector which reflects the luminous flux at right angles and collects light into a point at the center. CONSTITUTION:A dispersion light 27A from a light 27 is produced into a cylindrical beltlike luminous flux 29 by means of a means 29. A toroidal reflector 28 reflects a beltlike luminous flux 29c approximately at right angles, and the luminous flux 29C is collected into a point 30 at the center. A plate sample 1 is supported in parallel to a light collecting path 30A at a support plate 32 at a light collecting point 20. A convex fault 3 on the surface of the face plate sample 1 reflects the light in a light collecting path 28A, produces a scattered light 3a, and an objective lens 7 and a TV camera 8 and other detecting means detect the scattered light. Through the installation of a parabolic concave mirror particularly at a light collecting system in an illuminating source, light from the light source can be collected over the full circumference, and thus, a light collecting effeciency can be improved and wide scattered light can be obtained even from a minute fault.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9387580A JPS5719647A (en) | 1980-07-11 | 1980-07-11 | Inspecting device for sample of face plate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9387580A JPS5719647A (en) | 1980-07-11 | 1980-07-11 | Inspecting device for sample of face plate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5719647A true JPS5719647A (en) | 1982-02-01 |
Family
ID=14094636
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9387580A Pending JPS5719647A (en) | 1980-07-11 | 1980-07-11 | Inspecting device for sample of face plate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5719647A (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59200908A (en) * | 1983-04-28 | 1984-11-14 | Hitachi Ltd | Method and apparatus for lighting wafer |
JPS6042001U (en) * | 1983-08-26 | 1985-03-25 | 財団法人鉄道総合技術研究所 | Test equipment for electric vehicle control equipment |
JPS6199845A (en) * | 1984-10-22 | 1986-05-17 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | Optical defect detector |
JPS62191741A (en) * | 1986-02-18 | 1987-08-22 | Kobe Steel Ltd | Method for detecting surface flaw |
JPS62261045A (en) * | 1986-05-06 | 1987-11-13 | Hitachi Electronics Eng Co Ltd | Surface inspecting device |
WO1993013406A1 (en) * | 1988-11-18 | 1993-07-08 | Taro Sato | Apparatus for discriminating defects in an optical recording medium and method thereof |
EP0650043A1 (en) * | 1993-10-25 | 1995-04-26 | Jasco Corporation | Optical system for high-sensitivity reflectivity measurement equipment |
WO1999066314A1 (en) * | 1998-06-16 | 1999-12-23 | Orbotech Ltd. | Illuminator for inspecting substantially flat surfaces |
JP2017530408A (en) * | 2014-09-25 | 2017-10-12 | ライカ マイクロシステムズ シーエムエス ゲゼルシャフト ミット ベシュレンクテル ハフツングLeica Microsystems CMS GmbH | Mirror device |
-
1980
- 1980-07-11 JP JP9387580A patent/JPS5719647A/en active Pending
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59200908A (en) * | 1983-04-28 | 1984-11-14 | Hitachi Ltd | Method and apparatus for lighting wafer |
JPH0151121B2 (en) * | 1983-04-28 | 1989-11-01 | Hitachi Ltd | |
JPS6042001U (en) * | 1983-08-26 | 1985-03-25 | 財団法人鉄道総合技術研究所 | Test equipment for electric vehicle control equipment |
JPS6199845A (en) * | 1984-10-22 | 1986-05-17 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | Optical defect detector |
JPS62191741A (en) * | 1986-02-18 | 1987-08-22 | Kobe Steel Ltd | Method for detecting surface flaw |
JPS62261045A (en) * | 1986-05-06 | 1987-11-13 | Hitachi Electronics Eng Co Ltd | Surface inspecting device |
WO1993013406A1 (en) * | 1988-11-18 | 1993-07-08 | Taro Sato | Apparatus for discriminating defects in an optical recording medium and method thereof |
EP0650043A1 (en) * | 1993-10-25 | 1995-04-26 | Jasco Corporation | Optical system for high-sensitivity reflectivity measurement equipment |
US5483350A (en) * | 1993-10-25 | 1996-01-09 | Kazuhiro Kawasaki | Optical system for infrared spectroscopy having an aspherical concave mirror |
WO1999066314A1 (en) * | 1998-06-16 | 1999-12-23 | Orbotech Ltd. | Illuminator for inspecting substantially flat surfaces |
GB2357577A (en) * | 1998-06-16 | 2001-06-27 | Orbotech Ltd | Illuminator for inspecting substantially flat surfaces |
GB2357577B (en) * | 1998-06-16 | 2003-08-20 | Orbotech Ltd | Illuminator for inspecting substantially flat surfaces |
JP2017530408A (en) * | 2014-09-25 | 2017-10-12 | ライカ マイクロシステムズ シーエムエス ゲゼルシャフト ミット ベシュレンクテル ハフツングLeica Microsystems CMS GmbH | Mirror device |
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