JPS57175250A - Sensitive element for gas and humidity - Google Patents

Sensitive element for gas and humidity

Info

Publication number
JPS57175250A
JPS57175250A JP56060024A JP6002481A JPS57175250A JP S57175250 A JPS57175250 A JP S57175250A JP 56060024 A JP56060024 A JP 56060024A JP 6002481 A JP6002481 A JP 6002481A JP S57175250 A JPS57175250 A JP S57175250A
Authority
JP
Japan
Prior art keywords
humidity
electrodes
electrode
gas
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56060024A
Other languages
Japanese (ja)
Inventor
Yoshiharu Komine
Takao Sawada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP56060024A priority Critical patent/JPS57175250A/en
Publication of JPS57175250A publication Critical patent/JPS57175250A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)

Abstract

PURPOSE:To measure both gas and humidity by one small-sized element, by using one hand of humidity sensitive or gas sensitive material as an element substrate and providing porous surface electrodes on both faces of the substrate and then, separating one surface electrode into two pieces and moreover, providing the gas sensitive or humidity sensitive material on the substrate putting between this separated electrode. CONSTITUTION:For example, porous electrodes 2a, 2b made of RuO2 are formed on the surface of a humidity sensitive porous substrate 1 made of TiO2 etc. and an electrode 2c is provided on the back with the same material and then, lead wires 4, 5, 6 are connected with each electrode. Next, gas sensitive porous ceramics 3 made of SnO2 group, ZnO2 group etc. is provided putting a part of the electrodes 2a, 2b upon the ceramics 3. At the time of detecting the humidity by this element, the electrodes 2a, 2b are made in the same electric potential and electric resistance between the electrodes 2a, 2b and the electrode 2c are measured. At the time of measuring combustible gas etc., the element is kept at 200-400 deg.C and the electric resistance between the lead wires 4 and 5 is measured. Thus, a small-sized highly reliable element being easy to arrange is obtained.
JP56060024A 1981-04-21 1981-04-21 Sensitive element for gas and humidity Pending JPS57175250A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56060024A JPS57175250A (en) 1981-04-21 1981-04-21 Sensitive element for gas and humidity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56060024A JPS57175250A (en) 1981-04-21 1981-04-21 Sensitive element for gas and humidity

Publications (1)

Publication Number Publication Date
JPS57175250A true JPS57175250A (en) 1982-10-28

Family

ID=13130079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56060024A Pending JPS57175250A (en) 1981-04-21 1981-04-21 Sensitive element for gas and humidity

Country Status (1)

Country Link
JP (1) JPS57175250A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5992848U (en) * 1982-12-15 1984-06-23 株式会社奈良電機研究所 Humidity detection element
JPS6117945A (en) * 1984-07-04 1986-01-25 Chino Works Ltd Humidity element

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54156690A (en) * 1978-05-31 1979-12-10 Matsushita Electric Ind Co Ltd Humidity sensing element

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54156690A (en) * 1978-05-31 1979-12-10 Matsushita Electric Ind Co Ltd Humidity sensing element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5992848U (en) * 1982-12-15 1984-06-23 株式会社奈良電機研究所 Humidity detection element
JPS6117945A (en) * 1984-07-04 1986-01-25 Chino Works Ltd Humidity element

Similar Documents

Publication Publication Date Title
JPS6465426A (en) Platinum temperature sensor
JPS57175250A (en) Sensitive element for gas and humidity
JPS5679246A (en) Method and apparatus for detecting oxygen concentration
JPS5734446A (en) Nultifunctional detecting element and multifunctional detector
JPS56164949A (en) Multifunction detector
JPS5244692A (en) Ion activity measuring electrode
JPS646804A (en) Strain gauge sensor
JPS6443753A (en) Oxygen sensor
JPS5566745A (en) Psychroelement
JPS56164950A (en) Gas detector
JPS5552925A (en) Standard type pressure sensor
JPS55166032A (en) Gas detecting element and gas detecting method
JPS57135350A (en) Element for gas detection apparatus
JPS57110949A (en) Moisture sensing element
JPS5756744A (en) Hygrometer
JPS5689045A (en) Relative humidity sensor
JPS55122161A (en) Device for measuring velocity of wind
JPS5757252A (en) Sensor
JPS58166249A (en) Humidity, temperature and gas sensitive element
SU1403740A1 (en) Foil sensor for measuring parameters of development of surface cracks
JPS646831A (en) Sensor
SE8301264D0 (en) SET AND DEVICE TO INDICATE EXISTENCE OF LEADING MATERIALS IN A MEDIUM
JPS6472002A (en) Electrostatic capacity strain gauge
JPS5712357A (en) Sensitive element of humidity
JPS6459052A (en) Moisture sensitive element material