JPS57172305A - Automatic focusing method - Google Patents

Automatic focusing method

Info

Publication number
JPS57172305A
JPS57172305A JP5721481A JP5721481A JPS57172305A JP S57172305 A JPS57172305 A JP S57172305A JP 5721481 A JP5721481 A JP 5721481A JP 5721481 A JP5721481 A JP 5721481A JP S57172305 A JPS57172305 A JP S57172305A
Authority
JP
Japan
Prior art keywords
pattern
focusing
decided
allowable range
response speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5721481A
Other languages
Japanese (ja)
Inventor
Keiichi Okamoto
Yasuhiko Hara
Yukio Uto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5721481A priority Critical patent/JPS57172305A/en
Publication of JPS57172305A publication Critical patent/JPS57172305A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals
    • G02B7/36—Systems for automatic generation of focusing signals using image sharpness techniques, e.g. image processing techniques for generating autofocus signals

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Automatic Focus Adjustment (AREA)

Abstract

PURPOSE:To elevate the focusing detection accuracy and to increase a response speed, by controlling a focus system so that a histogram with respect to the light intensity of a pattern approaches a pattern decided in advance, as for an automatic focusing method of a microscope, etc. CONSTITUTION:A sample pattern 3 is detected by an objective lens 2, and is converted to a video signal corresponding to variable density of the pattern, by an image pickup device 3. Its signal is inputted to an adder 6 through an A/D converter, a variable density histogram of the video signal is generated, and the question whether it is within a focusing point allowable range or not is decided. In case when it exceeds the allowable range, a focusing adjustment is executed by driving a driving motor. Since pattern information itself is utilized instead of distance information, the accuracy of focusing detection is high, and also its response speed is high owing to electric processing.
JP5721481A 1981-04-17 1981-04-17 Automatic focusing method Pending JPS57172305A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5721481A JPS57172305A (en) 1981-04-17 1981-04-17 Automatic focusing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5721481A JPS57172305A (en) 1981-04-17 1981-04-17 Automatic focusing method

Publications (1)

Publication Number Publication Date
JPS57172305A true JPS57172305A (en) 1982-10-23

Family

ID=13049268

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5721481A Pending JPS57172305A (en) 1981-04-17 1981-04-17 Automatic focusing method

Country Status (1)

Country Link
JP (1) JPS57172305A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50129016A (en) * 1974-03-29 1975-10-11

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50129016A (en) * 1974-03-29 1975-10-11

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