JPS57171205A - Optical measuring method for pore - Google Patents
Optical measuring method for poreInfo
- Publication number
- JPS57171205A JPS57171205A JP5680181A JP5680181A JPS57171205A JP S57171205 A JPS57171205 A JP S57171205A JP 5680181 A JP5680181 A JP 5680181A JP 5680181 A JP5680181 A JP 5680181A JP S57171205 A JPS57171205 A JP S57171205A
- Authority
- JP
- Japan
- Prior art keywords
- pore
- light
- laser
- semiconductor laser
- scanned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
- G01B11/12—Measuring arrangements characterised by the use of optical techniques for measuring diameters internal diameters
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5680181A JPS57171205A (en) | 1981-04-14 | 1981-04-14 | Optical measuring method for pore |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5680181A JPS57171205A (en) | 1981-04-14 | 1981-04-14 | Optical measuring method for pore |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57171205A true JPS57171205A (en) | 1982-10-21 |
Family
ID=13037497
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5680181A Pending JPS57171205A (en) | 1981-04-14 | 1981-04-14 | Optical measuring method for pore |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57171205A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008233085A (ja) * | 2007-03-16 | 2008-10-02 | Trumpf Werkzeugmaschinen Gmbh & Co Kg | 薄板加工における正常な状態の存在を検査するための方法及び装置 |
CN105300279A (zh) * | 2015-10-08 | 2016-02-03 | 扬中中科维康智能科技有限公司 | 一种激光跟踪仪光斑位置敏感器psd跟踪零点的标定方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51868A (ja) * | 1974-06-20 | 1976-01-07 | Mitsubishi Electric Corp |
-
1981
- 1981-04-14 JP JP5680181A patent/JPS57171205A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51868A (ja) * | 1974-06-20 | 1976-01-07 | Mitsubishi Electric Corp |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008233085A (ja) * | 2007-03-16 | 2008-10-02 | Trumpf Werkzeugmaschinen Gmbh & Co Kg | 薄板加工における正常な状態の存在を検査するための方法及び装置 |
CN105300279A (zh) * | 2015-10-08 | 2016-02-03 | 扬中中科维康智能科技有限公司 | 一种激光跟踪仪光斑位置敏感器psd跟踪零点的标定方法 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
IL72183A (en) | Measuring system employing a measuring method based on the triangulation principle for the non-contact measurement of a distance from the surface of a contoured object to a reference level | |
JPS6410104A (en) | Detection optical system | |
ES2034453T3 (es) | Medicion de la curvatura de material transparente o translucido. | |
KR880006525A (ko) | 표면품질, 특히 반도체 슬라이스의 표면품질을 측정하는 방법 및 장치 | |
DE3270640D1 (en) | Off-axis light beam defect detector | |
JPS57171205A (en) | Optical measuring method for pore | |
JPS5767815A (en) | Measuring method for position of reflector using light | |
US3840303A (en) | Device for detection of blemishes in the surface of symmetrical planar objects | |
JPS57179704A (en) | Method and device for measuring length | |
JPS5616806A (en) | Surface roughness measuring unit | |
JPS6439543A (en) | Defective inspection device | |
JPH0479522B2 (ja) | ||
JPS63225116A (ja) | 光学式変位測定装置 | |
JPS6352004A (ja) | 測定装置 | |
JPS54114261A (en) | Measuring apparatus of surface undulations | |
JPS5593003A (en) | Measuring method for plate thickness of plate-shape transparent body | |
JPH1164231A (ja) | ガラス管の泡筋検出方法および装置 | |
JPS56125604A (en) | Surface roughness measuring apparatus | |
JPS5648546A (en) | Crack detector | |
JPS54136888A (en) | Surface defect detecting device | |
JPS6234245Y2 (ja) | ||
JPS5737209A (en) | Distance measuring device | |
JPS63289413A (ja) | 形状測定装置 | |
JPS5479693A (en) | Wire body surface defect detector | |
JPS6335362Y2 (ja) |