JPS57164270U - - Google Patents
Info
- Publication number
- JPS57164270U JPS57164270U JP5244181U JP5244181U JPS57164270U JP S57164270 U JPS57164270 U JP S57164270U JP 5244181 U JP5244181 U JP 5244181U JP 5244181 U JP5244181 U JP 5244181U JP S57164270 U JPS57164270 U JP S57164270U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5244181U JPS628393Y2 (ja) | 1981-04-10 | 1981-04-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5244181U JPS628393Y2 (ja) | 1981-04-10 | 1981-04-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57164270U true JPS57164270U (ja) | 1982-10-16 |
| JPS628393Y2 JPS628393Y2 (ja) | 1987-02-26 |
Family
ID=29849126
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5244181U Expired JPS628393Y2 (ja) | 1981-04-10 | 1981-04-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS628393Y2 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009004112A (ja) * | 2007-06-19 | 2009-01-08 | Hitachi High-Technologies Corp | 荷電粒子線装置およびその真空立上げ方法 |
| JP2015121103A (ja) * | 2013-12-20 | 2015-07-02 | 株式会社豊田中央研究所 | 熱遷移流ポンプシステム及び熱遷移流ポンプを用いた真空室の真空維持方法 |
-
1981
- 1981-04-10 JP JP5244181U patent/JPS628393Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009004112A (ja) * | 2007-06-19 | 2009-01-08 | Hitachi High-Technologies Corp | 荷電粒子線装置およびその真空立上げ方法 |
| JP2015121103A (ja) * | 2013-12-20 | 2015-07-02 | 株式会社豊田中央研究所 | 熱遷移流ポンプシステム及び熱遷移流ポンプを用いた真空室の真空維持方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS628393Y2 (ja) | 1987-02-26 |