JPS57124440A - Compound etching method - Google Patents
Compound etching methodInfo
- Publication number
- JPS57124440A JPS57124440A JP1038681A JP1038681A JPS57124440A JP S57124440 A JPS57124440 A JP S57124440A JP 1038681 A JP1038681 A JP 1038681A JP 1038681 A JP1038681 A JP 1038681A JP S57124440 A JPS57124440 A JP S57124440A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- film
- silicon nitride
- nitride film
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
Abstract
PURPOSE:To prevent a side-etching as well as to smoothen corner sections by a method wherein an isotropic etching processing and a non-isotropic processing are cojointly performed as a compound etching method. CONSTITUTION:A silicon nitride film 2 of approximately 1.2mum is formed on the surface of a silicon substrate 3 using a vapor-phase growing method and the like, and a silicon oxide film 1 of 0.2mum or thereabouts is formed on the surface of the film 2. Then, a prescribed photoresist film is formed on the surface of the silicon oxide film 1, and a master pattern is obtained by performing an etching on the silicon oxide film 1. The silicon nitride film 2 is etched to the middle part using thermal phosphoric acid, and then the remaining part of the silicon nitride film 2 is removed by performing a reactive etching using CF gas. Accordingly, the silicon nitride film 2 can be etched as per master pattern, the corner of the pattern edge is steppingly formed, and a smooth sectional form can be obtained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1038681A JPS57124440A (en) | 1981-01-27 | 1981-01-27 | Compound etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1038681A JPS57124440A (en) | 1981-01-27 | 1981-01-27 | Compound etching method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57124440A true JPS57124440A (en) | 1982-08-03 |
Family
ID=11748673
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1038681A Pending JPS57124440A (en) | 1981-01-27 | 1981-01-27 | Compound etching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57124440A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61295634A (en) * | 1985-06-25 | 1986-12-26 | Oki Electric Ind Co Ltd | Dry etching method |
JPS6360531A (en) * | 1986-08-30 | 1988-03-16 | Toshiba Corp | Manufacture of semiconductor device |
JPS63196039A (en) * | 1987-02-10 | 1988-08-15 | Fujitsu Ltd | Plasma etching method |
JPH01280317A (en) * | 1988-05-06 | 1989-11-10 | Matsushita Electric Ind Co Ltd | Dry etching |
JP2001007342A (en) * | 1999-04-20 | 2001-01-12 | Semiconductor Energy Lab Co Ltd | Semiconductor device and its manufacture |
JP2002026322A (en) * | 2000-07-10 | 2002-01-25 | Denso Corp | Semiconductor device and manufacturing method |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5487172A (en) * | 1977-12-23 | 1979-07-11 | Hitachi Ltd | Manufacture for simiconductor device |
JPS5495186A (en) * | 1978-01-12 | 1979-07-27 | Sanyo Electric Co Ltd | Production of compound semiconductor device |
JPS5687666A (en) * | 1979-12-20 | 1981-07-16 | Toshiba Corp | Plasma etching method |
JPS5690525A (en) * | 1979-11-28 | 1981-07-22 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS577936A (en) * | 1980-06-18 | 1982-01-16 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1981
- 1981-01-27 JP JP1038681A patent/JPS57124440A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5487172A (en) * | 1977-12-23 | 1979-07-11 | Hitachi Ltd | Manufacture for simiconductor device |
JPS5495186A (en) * | 1978-01-12 | 1979-07-27 | Sanyo Electric Co Ltd | Production of compound semiconductor device |
JPS5690525A (en) * | 1979-11-28 | 1981-07-22 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5687666A (en) * | 1979-12-20 | 1981-07-16 | Toshiba Corp | Plasma etching method |
JPS577936A (en) * | 1980-06-18 | 1982-01-16 | Fujitsu Ltd | Manufacture of semiconductor device |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61295634A (en) * | 1985-06-25 | 1986-12-26 | Oki Electric Ind Co Ltd | Dry etching method |
JPH0528489B2 (en) * | 1985-06-25 | 1993-04-26 | Oki Electric Ind Co Ltd | |
JPS6360531A (en) * | 1986-08-30 | 1988-03-16 | Toshiba Corp | Manufacture of semiconductor device |
JPS63196039A (en) * | 1987-02-10 | 1988-08-15 | Fujitsu Ltd | Plasma etching method |
JPH01280317A (en) * | 1988-05-06 | 1989-11-10 | Matsushita Electric Ind Co Ltd | Dry etching |
JP2001007342A (en) * | 1999-04-20 | 2001-01-12 | Semiconductor Energy Lab Co Ltd | Semiconductor device and its manufacture |
JP2002026322A (en) * | 2000-07-10 | 2002-01-25 | Denso Corp | Semiconductor device and manufacturing method |
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