JPS57123973A - Container for vacuum-depositing material - Google Patents

Container for vacuum-depositing material

Info

Publication number
JPS57123973A
JPS57123973A JP825181A JP825181A JPS57123973A JP S57123973 A JPS57123973 A JP S57123973A JP 825181 A JP825181 A JP 825181A JP 825181 A JP825181 A JP 825181A JP S57123973 A JPS57123973 A JP S57123973A
Authority
JP
Japan
Prior art keywords
container
vacuum
sections
depositing material
walls
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP825181A
Other languages
Japanese (ja)
Inventor
Michihiro Kitazawa
Mikio Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Fuji Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd, Fuji Electric Manufacturing Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP825181A priority Critical patent/JPS57123973A/en
Publication of JPS57123973A publication Critical patent/JPS57123973A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To uniformly evaporate a vacuum-depositing material from a long- sized container by dividing the container into a plurality of sections in the longitudinal direction. CONSTITUTION:A long-sized box-shaped container 1 made of stainless steel for holding a vacuum-depositing material is divided into 10 sections with partition walls 2 made of stainless steel. Selenium 4 is put in the container 1, evaporated by heating, and deposited on the surfaces of Al cylinders A-E attached onto a horizontally rotating upper shaft 6 close to each other. At this time, a temp. difference between the sections of the container 1 and a temp. difference between the surface of selenium 4 and the interior are reduced by heat conduction through the walls 2, unevenness in film thickness is reduced remarkably, and the evaporation speed is stabilized, resulting in almost uniform deposition time. In addition, the strength of the container 1 is increased by the walls 2.
JP825181A 1981-01-22 1981-01-22 Container for vacuum-depositing material Pending JPS57123973A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP825181A JPS57123973A (en) 1981-01-22 1981-01-22 Container for vacuum-depositing material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP825181A JPS57123973A (en) 1981-01-22 1981-01-22 Container for vacuum-depositing material

Publications (1)

Publication Number Publication Date
JPS57123973A true JPS57123973A (en) 1982-08-02

Family

ID=11687910

Family Applications (1)

Application Number Title Priority Date Filing Date
JP825181A Pending JPS57123973A (en) 1981-01-22 1981-01-22 Container for vacuum-depositing material

Country Status (1)

Country Link
JP (1) JPS57123973A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003293122A (en) * 1999-12-27 2003-10-15 Semiconductor Energy Lab Co Ltd Method for manufacturing display device
WO2015024280A1 (en) * 2013-08-23 2015-02-26 深圳市华星光电技术有限公司 Crucible for coating machine

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003293122A (en) * 1999-12-27 2003-10-15 Semiconductor Energy Lab Co Ltd Method for manufacturing display device
US8119189B2 (en) 1999-12-27 2012-02-21 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a display device
US9559302B2 (en) 1999-12-27 2017-01-31 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a display device
JP2018066066A (en) * 1999-12-27 2018-04-26 株式会社半導体エネルギー研究所 Film deposition method
WO2015024280A1 (en) * 2013-08-23 2015-02-26 深圳市华星光电技术有限公司 Crucible for coating machine

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