JPS57114344A - Apparatus for precise positioning - Google Patents

Apparatus for precise positioning

Info

Publication number
JPS57114344A
JPS57114344A JP18712880A JP18712880A JPS57114344A JP S57114344 A JPS57114344 A JP S57114344A JP 18712880 A JP18712880 A JP 18712880A JP 18712880 A JP18712880 A JP 18712880A JP S57114344 A JPS57114344 A JP S57114344A
Authority
JP
Japan
Prior art keywords
main shaft
read
measuring instruments
measuring
utilizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18712880A
Other languages
Japanese (ja)
Other versions
JPS6350141B2 (en
Inventor
Kazuhiko Nagayama
Masami Masuda
Yukio Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP18712880A priority Critical patent/JPS57114344A/en
Priority to US06/333,632 priority patent/US4585379A/en
Priority to CH824581A priority patent/CH645292A5/en
Publication of JPS57114344A publication Critical patent/JPS57114344A/en
Publication of JPS6350141B2 publication Critical patent/JPS6350141B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Automatic Control Of Machine Tools (AREA)

Abstract

PURPOSE: To permit rapid and correct positioning by measuring the indexing error on an X-Y table and the elongation amount of a main shaft and the table due to temperature variation by use of a laser measuring instrument and correcting the positions of the main shaft and the table through little transfer.
CONSTITUTION: A hollow main shaft 31 is equipped with a thrust plate 35 and a static pressure type bearing 32. The position of the main shaft 31 and the position of an X-Y table 2 are read by the first and the second laser measuring instruments 61W64 and 51W54 respectively. The first measuring instruments 61W64 read the position by utilizing the reflection of the laser beam on the reflecting mirror 62 arranged at the position of the shaft center of the main shaft 31 and the second measuring instruments 51W54 read the position by utilizing a reflecting mirror 52. The relative position of the main shaft 31 and the table 2 described above is read from the measured values by the both measuring instruments, and the positions of the main shaft 31 and the table 2 are roughly adjusted by driving a feeding motor 71, and the position of the main shaft 31 is minutely adjusted by a pressure adjuster 11.
COPYRIGHT: (C)1982,JPO&Japio
JP18712880A 1980-12-27 1980-12-27 Apparatus for precise positioning Granted JPS57114344A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP18712880A JPS57114344A (en) 1980-12-27 1980-12-27 Apparatus for precise positioning
US06/333,632 US4585379A (en) 1980-12-27 1981-12-22 Precision positioning device
CH824581A CH645292A5 (en) 1980-12-27 1981-12-23 PRECISION POSITIONING DEVICE.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18712880A JPS57114344A (en) 1980-12-27 1980-12-27 Apparatus for precise positioning

Publications (2)

Publication Number Publication Date
JPS57114344A true JPS57114344A (en) 1982-07-16
JPS6350141B2 JPS6350141B2 (en) 1988-10-06

Family

ID=16200601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18712880A Granted JPS57114344A (en) 1980-12-27 1980-12-27 Apparatus for precise positioning

Country Status (1)

Country Link
JP (1) JPS57114344A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63128907A (en) * 1986-11-19 1988-06-01 株式会社東京精密 Grooving control method of dicing device
JPH0569437A (en) * 1991-05-14 1993-03-23 Tokyo Seimitsu Co Ltd Grooving control device of dicing apparatus
JPH0587954U (en) * 1992-04-28 1993-11-26 株式会社ディスコ Precision cutting equipment

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0425225U (en) * 1990-06-25 1992-02-28
JPH0438030U (en) * 1990-07-26 1992-03-31

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52278A (en) * 1975-06-19 1977-01-05 Dai Ichi Seiyaku Co Ltd Process for preparing piperidylbenzimidazole derivatives

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52278A (en) * 1975-06-19 1977-01-05 Dai Ichi Seiyaku Co Ltd Process for preparing piperidylbenzimidazole derivatives

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63128907A (en) * 1986-11-19 1988-06-01 株式会社東京精密 Grooving control method of dicing device
JP2530827B2 (en) * 1986-11-19 1996-09-04 株式会社東京精密 Grooving control method for dicing machine
JPH0569437A (en) * 1991-05-14 1993-03-23 Tokyo Seimitsu Co Ltd Grooving control device of dicing apparatus
JP2501970B2 (en) * 1991-05-14 1996-05-29 株式会社東京精密 Grooving control device for dicing machine
JPH0587954U (en) * 1992-04-28 1993-11-26 株式会社ディスコ Precision cutting equipment
JP2540745Y2 (en) * 1992-04-28 1997-07-09 株式会社ディスコ Precision cutting equipment

Also Published As

Publication number Publication date
JPS6350141B2 (en) 1988-10-06

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