JPS57114344A - Apparatus for precise positioning - Google Patents
Apparatus for precise positioningInfo
- Publication number
- JPS57114344A JPS57114344A JP18712880A JP18712880A JPS57114344A JP S57114344 A JPS57114344 A JP S57114344A JP 18712880 A JP18712880 A JP 18712880A JP 18712880 A JP18712880 A JP 18712880A JP S57114344 A JPS57114344 A JP S57114344A
- Authority
- JP
- Japan
- Prior art keywords
- main shaft
- read
- measuring instruments
- measuring
- utilizing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Automatic Control Of Machine Tools (AREA)
Abstract
PURPOSE: To permit rapid and correct positioning by measuring the indexing error on an X-Y table and the elongation amount of a main shaft and the table due to temperature variation by use of a laser measuring instrument and correcting the positions of the main shaft and the table through little transfer.
CONSTITUTION: A hollow main shaft 31 is equipped with a thrust plate 35 and a static pressure type bearing 32. The position of the main shaft 31 and the position of an X-Y table 2 are read by the first and the second laser measuring instruments 61W64 and 51W54 respectively. The first measuring instruments 61W64 read the position by utilizing the reflection of the laser beam on the reflecting mirror 62 arranged at the position of the shaft center of the main shaft 31 and the second measuring instruments 51W54 read the position by utilizing a reflecting mirror 52. The relative position of the main shaft 31 and the table 2 described above is read from the measured values by the both measuring instruments, and the positions of the main shaft 31 and the table 2 are roughly adjusted by driving a feeding motor 71, and the position of the main shaft 31 is minutely adjusted by a pressure adjuster 11.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18712880A JPS57114344A (en) | 1980-12-27 | 1980-12-27 | Apparatus for precise positioning |
US06/333,632 US4585379A (en) | 1980-12-27 | 1981-12-22 | Precision positioning device |
CH824581A CH645292A5 (en) | 1980-12-27 | 1981-12-23 | PRECISION POSITIONING DEVICE. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18712880A JPS57114344A (en) | 1980-12-27 | 1980-12-27 | Apparatus for precise positioning |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57114344A true JPS57114344A (en) | 1982-07-16 |
JPS6350141B2 JPS6350141B2 (en) | 1988-10-06 |
Family
ID=16200601
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18712880A Granted JPS57114344A (en) | 1980-12-27 | 1980-12-27 | Apparatus for precise positioning |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57114344A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63128907A (en) * | 1986-11-19 | 1988-06-01 | 株式会社東京精密 | Grooving control method of dicing device |
JPH0569437A (en) * | 1991-05-14 | 1993-03-23 | Tokyo Seimitsu Co Ltd | Grooving control device of dicing apparatus |
JPH0587954U (en) * | 1992-04-28 | 1993-11-26 | 株式会社ディスコ | Precision cutting equipment |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0425225U (en) * | 1990-06-25 | 1992-02-28 | ||
JPH0438030U (en) * | 1990-07-26 | 1992-03-31 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52278A (en) * | 1975-06-19 | 1977-01-05 | Dai Ichi Seiyaku Co Ltd | Process for preparing piperidylbenzimidazole derivatives |
-
1980
- 1980-12-27 JP JP18712880A patent/JPS57114344A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52278A (en) * | 1975-06-19 | 1977-01-05 | Dai Ichi Seiyaku Co Ltd | Process for preparing piperidylbenzimidazole derivatives |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63128907A (en) * | 1986-11-19 | 1988-06-01 | 株式会社東京精密 | Grooving control method of dicing device |
JP2530827B2 (en) * | 1986-11-19 | 1996-09-04 | 株式会社東京精密 | Grooving control method for dicing machine |
JPH0569437A (en) * | 1991-05-14 | 1993-03-23 | Tokyo Seimitsu Co Ltd | Grooving control device of dicing apparatus |
JP2501970B2 (en) * | 1991-05-14 | 1996-05-29 | 株式会社東京精密 | Grooving control device for dicing machine |
JPH0587954U (en) * | 1992-04-28 | 1993-11-26 | 株式会社ディスコ | Precision cutting equipment |
JP2540745Y2 (en) * | 1992-04-28 | 1997-07-09 | 株式会社ディスコ | Precision cutting equipment |
Also Published As
Publication number | Publication date |
---|---|
JPS6350141B2 (en) | 1988-10-06 |
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