JPS57103027A - Semiconductor transducer - Google Patents

Semiconductor transducer

Info

Publication number
JPS57103027A
JPS57103027A JP15873281A JP15873281A JPS57103027A JP S57103027 A JPS57103027 A JP S57103027A JP 15873281 A JP15873281 A JP 15873281A JP 15873281 A JP15873281 A JP 15873281A JP S57103027 A JPS57103027 A JP S57103027A
Authority
JP
Japan
Prior art keywords
resistor
bridge circuit
zero point
circuit
production section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15873281A
Other languages
Japanese (ja)
Inventor
Kazuji Yamada
Hideo Sato
Motohisa Nishihara
Yasumasa Matsuda
Satoshi Shimada
Tsutomu Okayama
Yoshitaka Matsuoka
Katsuya Katogi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15873281A priority Critical patent/JPS57103027A/en
Publication of JPS57103027A publication Critical patent/JPS57103027A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To reduce number of components and to prevent the fluctuation of zero point or span due to temperature at zero point transit, by selecting a suitable temperature sensitive circuit constant. CONSTITUTION:A bridge circuit 27 consisting of a gauge resistor 31 which converts a physical amount formed a strain production section of a semiconductor diaphragm into electric quantity, and an energizing circuit which detects current or voltage applying the bridge circuit at a reference resistor, compares the detected value with a reference value and supplies the result to the bridge circuit 27, are provided. Further, a correction resistor 36 which responds to the strain production section of the semiconductor diaphragm and shows a positive resistance change to temperature change is formed and this correction resistor 36 is used as an element of a reference resistor.
JP15873281A 1981-10-07 1981-10-07 Semiconductor transducer Pending JPS57103027A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15873281A JPS57103027A (en) 1981-10-07 1981-10-07 Semiconductor transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15873281A JPS57103027A (en) 1981-10-07 1981-10-07 Semiconductor transducer

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP11991677A Division JPS5453877A (en) 1977-10-07 1977-10-07 Temperature compensation circuit of semiconductor strain gauge

Publications (1)

Publication Number Publication Date
JPS57103027A true JPS57103027A (en) 1982-06-26

Family

ID=15678116

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15873281A Pending JPS57103027A (en) 1981-10-07 1981-10-07 Semiconductor transducer

Country Status (1)

Country Link
JP (1) JPS57103027A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59184819A (en) * 1983-04-06 1984-10-20 Hitachi Ltd Semiconductor pressure sensor
JPH01110343U (en) * 1988-01-18 1989-07-25

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5453877A (en) * 1977-10-07 1979-04-27 Hitachi Ltd Temperature compensation circuit of semiconductor strain gauge

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5453877A (en) * 1977-10-07 1979-04-27 Hitachi Ltd Temperature compensation circuit of semiconductor strain gauge

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59184819A (en) * 1983-04-06 1984-10-20 Hitachi Ltd Semiconductor pressure sensor
JPH0425488B2 (en) * 1983-04-06 1992-05-01 Hitachi Ltd
JPH01110343U (en) * 1988-01-18 1989-07-25

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