JPS5697815A - Radiation thickness gauge - Google Patents

Radiation thickness gauge

Info

Publication number
JPS5697815A
JPS5697815A JP17265479A JP17265479A JPS5697815A JP S5697815 A JPS5697815 A JP S5697815A JP 17265479 A JP17265479 A JP 17265479A JP 17265479 A JP17265479 A JP 17265479A JP S5697815 A JPS5697815 A JP S5697815A
Authority
JP
Japan
Prior art keywords
output
voltage
comparator
inputted
comparison
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17265479A
Other languages
Japanese (ja)
Other versions
JPS6111363B2 (en
Inventor
Mutsuo Sawaguchi
Eisuke Okamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP17265479A priority Critical patent/JPS5697815A/en
Publication of JPS5697815A publication Critical patent/JPS5697815A/en
Publication of JPS6111363B2 publication Critical patent/JPS6111363B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE: To measure the absolute value of accurate thickness by counting the time when a voltage starting with the output voltage of a comparison system and damping according to an exponential function as time passes becomes equal to the output voltage of a measurement system.
CONSTITUTION: The measurement system and comparison system consisting of radiation sources 1 and 1a, body 2 to be measured, and detectors 3 and 3a respectively are arranged in the same atmosphere. So that the output of comparator 17 is zero, zero points of preamplifiers 4 and 4a and the measurement and comparison systems are previously corrected through electronic switches 31 and 31a, and 19 and 27, and controllers 26 and 16 and correction amounts are stored in correcting devices 25 and 26. The output of the measurement system when sample 2 is inserted is inputted to comparator 20. The output of the comparison system, on the other hand, is inputted to function generator 21, and the voltage that starts with a voltage value equal to that of the output voltage and damps according to an exponential function determined by CR of the circuit is inputted to comparator 20. The time when both the input voltages become equal to each other is counted by counter 22 via pulse generator 23 and AND gate 22 and the digital value of the accurate thickness is displayed on display device 23.
COPYRIGHT: (C)1981,JPO&Japio
JP17265479A 1979-12-31 1979-12-31 Radiation thickness gauge Granted JPS5697815A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17265479A JPS5697815A (en) 1979-12-31 1979-12-31 Radiation thickness gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17265479A JPS5697815A (en) 1979-12-31 1979-12-31 Radiation thickness gauge

Publications (2)

Publication Number Publication Date
JPS5697815A true JPS5697815A (en) 1981-08-06
JPS6111363B2 JPS6111363B2 (en) 1986-04-02

Family

ID=15945895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17265479A Granted JPS5697815A (en) 1979-12-31 1979-12-31 Radiation thickness gauge

Country Status (1)

Country Link
JP (1) JPS5697815A (en)

Also Published As

Publication number Publication date
JPS6111363B2 (en) 1986-04-02

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