JPS5692543A - Preparation of electrophotographic receptor - Google Patents
Preparation of electrophotographic receptorInfo
- Publication number
- JPS5692543A JPS5692543A JP16916679A JP16916679A JPS5692543A JP S5692543 A JPS5692543 A JP S5692543A JP 16916679 A JP16916679 A JP 16916679A JP 16916679 A JP16916679 A JP 16916679A JP S5692543 A JPS5692543 A JP S5692543A
- Authority
- JP
- Japan
- Prior art keywords
- glow discharge
- electrophotographic receptor
- amorphous silicon
- preparation
- silicon film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Light Receiving Elements (AREA)
- Photoreceptors In Electrophotography (AREA)
Abstract
PURPOSE: To prepare an electrophotographic receptor superior in sensitivity to a long wavelength region, by decomposing monosilane gas containing a specified amount of oxygen gas by glow discharge to form an amorphous silicon film.
CONSTITUTION: A conductive substrate, such as a glass substrate provided with a nesa film is arranged in a high frequency glow discharge device, monosilane gas, such as SiH4 containing 0.5W6vol% oxygen gas is introduced, decomposed by glow discharge, and deposition on the substrate, thus permitting an amorphous silicon film to be formed and to be used as a photoreceptor.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16916679A JPS5692543A (en) | 1979-12-27 | 1979-12-27 | Preparation of electrophotographic receptor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16916679A JPS5692543A (en) | 1979-12-27 | 1979-12-27 | Preparation of electrophotographic receptor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5692543A true JPS5692543A (en) | 1981-07-27 |
Family
ID=15881484
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16916679A Pending JPS5692543A (en) | 1979-12-27 | 1979-12-27 | Preparation of electrophotographic receptor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5692543A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4835507A (en) * | 1985-12-06 | 1989-05-30 | Canon Kabushiki Kaisha | Photosensor array for image processing apparatus |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54145539A (en) * | 1978-05-04 | 1979-11-13 | Canon Inc | Electrophotographic image forming material |
-
1979
- 1979-12-27 JP JP16916679A patent/JPS5692543A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54145539A (en) * | 1978-05-04 | 1979-11-13 | Canon Inc | Electrophotographic image forming material |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4835507A (en) * | 1985-12-06 | 1989-05-30 | Canon Kabushiki Kaisha | Photosensor array for image processing apparatus |
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