JPS5683031A - Detecting method of mark position - Google Patents
Detecting method of mark positionInfo
- Publication number
- JPS5683031A JPS5683031A JP16102479A JP16102479A JPS5683031A JP S5683031 A JPS5683031 A JP S5683031A JP 16102479 A JP16102479 A JP 16102479A JP 16102479 A JP16102479 A JP 16102479A JP S5683031 A JPS5683031 A JP S5683031A
- Authority
- JP
- Japan
- Prior art keywords
- volume
- slit
- signal
- scanning
- rectangular beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE:To perform the detection of positions with a small volume of information in a short time by a method wherein a slit-shaped rectangular beam is scanned on the region including the positioning marks to the directions of axles X and Y and the positions on the X and Y directions are found from the deviation of the reflected signal in each axial direction. CONSTITUTION:The slit-shaped rectangular beam 13 is irradiated on the whole row and the volume of the reflected electronic signal is detected and memorized. The same procedure is performed as far as to the Yn row. Then the scanning point of the Y1-Yn is irradiated once with the rectangular beam 13' to be used for irradiation of the whole X1 column and its reflected signal is memorized. The same procedure is performed repeatedly to the direction of the X axis as far as Xn column. The signal volume of each scanning position is compared and the coordinates (Xi and Yj) of the centroid of the positioning mark 1 can be found when the coordinates Xi and y3 which give maximum displacement is obtained for each scanning position. Consequently, as the slit-shaped electronic beam is scanned, the number of scanning, the volume of information and the processing time of a computer can be greatly reduced.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16102479A JPS5683031A (en) | 1979-12-12 | 1979-12-12 | Detecting method of mark position |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16102479A JPS5683031A (en) | 1979-12-12 | 1979-12-12 | Detecting method of mark position |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5683031A true JPS5683031A (en) | 1981-07-07 |
JPS6142409B2 JPS6142409B2 (en) | 1986-09-20 |
Family
ID=15727129
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16102479A Granted JPS5683031A (en) | 1979-12-12 | 1979-12-12 | Detecting method of mark position |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5683031A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4942093A (en) * | 1988-09-09 | 1990-07-17 | Bridgestone/Firestone, Inc. | Adhesive system for bonding uncured rubber to cured polyurethane |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54118778A (en) * | 1978-03-08 | 1979-09-14 | Cho Lsi Gijutsu Kenkyu Kumiai | Method of detecting pattern |
JPS562628A (en) * | 1979-06-20 | 1981-01-12 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Method of aligning position through charged beam |
-
1979
- 1979-12-12 JP JP16102479A patent/JPS5683031A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54118778A (en) * | 1978-03-08 | 1979-09-14 | Cho Lsi Gijutsu Kenkyu Kumiai | Method of detecting pattern |
JPS562628A (en) * | 1979-06-20 | 1981-01-12 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Method of aligning position through charged beam |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4942093A (en) * | 1988-09-09 | 1990-07-17 | Bridgestone/Firestone, Inc. | Adhesive system for bonding uncured rubber to cured polyurethane |
Also Published As
Publication number | Publication date |
---|---|
JPS6142409B2 (en) | 1986-09-20 |
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