JPS5683031A - Detecting method of mark position - Google Patents

Detecting method of mark position

Info

Publication number
JPS5683031A
JPS5683031A JP16102479A JP16102479A JPS5683031A JP S5683031 A JPS5683031 A JP S5683031A JP 16102479 A JP16102479 A JP 16102479A JP 16102479 A JP16102479 A JP 16102479A JP S5683031 A JPS5683031 A JP S5683031A
Authority
JP
Japan
Prior art keywords
volume
slit
signal
scanning
rectangular beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16102479A
Other languages
Japanese (ja)
Other versions
JPS6142409B2 (en
Inventor
Yoshiaki Goto
Yasuo Furukawa
Seigo Igaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16102479A priority Critical patent/JPS5683031A/en
Publication of JPS5683031A publication Critical patent/JPS5683031A/en
Publication of JPS6142409B2 publication Critical patent/JPS6142409B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045Object or beam position registration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To perform the detection of positions with a small volume of information in a short time by a method wherein a slit-shaped rectangular beam is scanned on the region including the positioning marks to the directions of axles X and Y and the positions on the X and Y directions are found from the deviation of the reflected signal in each axial direction. CONSTITUTION:The slit-shaped rectangular beam 13 is irradiated on the whole row and the volume of the reflected electronic signal is detected and memorized. The same procedure is performed as far as to the Yn row. Then the scanning point of the Y1-Yn is irradiated once with the rectangular beam 13' to be used for irradiation of the whole X1 column and its reflected signal is memorized. The same procedure is performed repeatedly to the direction of the X axis as far as Xn column. The signal volume of each scanning position is compared and the coordinates (Xi and Yj) of the centroid of the positioning mark 1 can be found when the coordinates Xi and y3 which give maximum displacement is obtained for each scanning position. Consequently, as the slit-shaped electronic beam is scanned, the number of scanning, the volume of information and the processing time of a computer can be greatly reduced.
JP16102479A 1979-12-12 1979-12-12 Detecting method of mark position Granted JPS5683031A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16102479A JPS5683031A (en) 1979-12-12 1979-12-12 Detecting method of mark position

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16102479A JPS5683031A (en) 1979-12-12 1979-12-12 Detecting method of mark position

Publications (2)

Publication Number Publication Date
JPS5683031A true JPS5683031A (en) 1981-07-07
JPS6142409B2 JPS6142409B2 (en) 1986-09-20

Family

ID=15727129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16102479A Granted JPS5683031A (en) 1979-12-12 1979-12-12 Detecting method of mark position

Country Status (1)

Country Link
JP (1) JPS5683031A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4942093A (en) * 1988-09-09 1990-07-17 Bridgestone/Firestone, Inc. Adhesive system for bonding uncured rubber to cured polyurethane

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54118778A (en) * 1978-03-08 1979-09-14 Cho Lsi Gijutsu Kenkyu Kumiai Method of detecting pattern
JPS562628A (en) * 1979-06-20 1981-01-12 Chiyou Lsi Gijutsu Kenkyu Kumiai Method of aligning position through charged beam

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54118778A (en) * 1978-03-08 1979-09-14 Cho Lsi Gijutsu Kenkyu Kumiai Method of detecting pattern
JPS562628A (en) * 1979-06-20 1981-01-12 Chiyou Lsi Gijutsu Kenkyu Kumiai Method of aligning position through charged beam

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4942093A (en) * 1988-09-09 1990-07-17 Bridgestone/Firestone, Inc. Adhesive system for bonding uncured rubber to cured polyurethane

Also Published As

Publication number Publication date
JPS6142409B2 (en) 1986-09-20

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