JPS5669210A - Method for depositing thermally decomposed carbon - Google Patents
Method for depositing thermally decomposed carbonInfo
- Publication number
- JPS5669210A JPS5669210A JP14499379A JP14499379A JPS5669210A JP S5669210 A JPS5669210 A JP S5669210A JP 14499379 A JP14499379 A JP 14499379A JP 14499379 A JP14499379 A JP 14499379A JP S5669210 A JPS5669210 A JP S5669210A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- decomposed carbon
- thermally decomposed
- material gas
- downstream
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
PURPOSE:To improve the efficiency of deposition of thermally decomposed carbon useful as an electrode, etc. on a substrate heated under the flow of a raw material gas, by shifting the heating zone of the substrate gradually from the downstream to the upstream of the material gas flow. CONSTITUTION:A substrate 6 is placed in the main body of the reactor 1, which is provided with an induction coil 4 for substrate heating. The coil 4 can be shifted vertically with a driving motor 3. Raw material gas is introduced into the reactor 1 through an inlet 7, and at the same time, the heating zone of the substrate 6 is shifted gradually from the downstream to the upstream of the material gas flow to effect the continuous deposition of the thermally decomposed carbon on the substrate from the downstream to the upstream side. The process enables the uniform deposition of thermally decomposed carbon to the whole surface of the substrate 6 using a small-scale apparatus, and also enables to deposite the decomposed carbon to a part of the substrate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14499379A JPS5669210A (en) | 1979-11-09 | 1979-11-09 | Method for depositing thermally decomposed carbon |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14499379A JPS5669210A (en) | 1979-11-09 | 1979-11-09 | Method for depositing thermally decomposed carbon |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5669210A true JPS5669210A (en) | 1981-06-10 |
Family
ID=15374972
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14499379A Pending JPS5669210A (en) | 1979-11-09 | 1979-11-09 | Method for depositing thermally decomposed carbon |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5669210A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5930709A (en) * | 1982-08-13 | 1984-02-18 | Toa Nenryo Kogyo Kk | Method for synthesizing carbon film and carbon granule in vapor phase |
JPS6155218A (en) * | 1984-08-23 | 1986-03-19 | Hinode Kagaku Kogyo Kk | Electroconductive potassium titanate fiber and its production |
JPS6320480A (en) * | 1986-07-14 | 1988-01-28 | Res Dev Corp Of Japan | Method and apparatus for surface treatment of powder or fibrous material |
JPH02236278A (en) * | 1986-07-14 | 1990-09-19 | Res Dev Corp Of Japan | Method for ultra-thin film coating of superfine powder or fine fibrous material |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS491396U (en) * | 1972-04-07 | 1974-01-08 |
-
1979
- 1979-11-09 JP JP14499379A patent/JPS5669210A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS491396U (en) * | 1972-04-07 | 1974-01-08 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5930709A (en) * | 1982-08-13 | 1984-02-18 | Toa Nenryo Kogyo Kk | Method for synthesizing carbon film and carbon granule in vapor phase |
JPH0333641B2 (en) * | 1982-08-13 | 1991-05-17 | Tonen Kk | |
JPS6155218A (en) * | 1984-08-23 | 1986-03-19 | Hinode Kagaku Kogyo Kk | Electroconductive potassium titanate fiber and its production |
JPH0355412B2 (en) * | 1984-08-23 | 1991-08-23 | ||
JPS6320480A (en) * | 1986-07-14 | 1988-01-28 | Res Dev Corp Of Japan | Method and apparatus for surface treatment of powder or fibrous material |
JPH02236278A (en) * | 1986-07-14 | 1990-09-19 | Res Dev Corp Of Japan | Method for ultra-thin film coating of superfine powder or fine fibrous material |
JPH055896B2 (en) * | 1986-07-14 | 1993-01-25 | Shingijutsu Jigyodan | |
JPH0543791B2 (en) * | 1986-07-14 | 1993-07-02 | Shingijutsu Kaihatsu Jigyodan |
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