JPS5661603A - Dimension measuring device - Google Patents
Dimension measuring deviceInfo
- Publication number
- JPS5661603A JPS5661603A JP13724879A JP13724879A JPS5661603A JP S5661603 A JPS5661603 A JP S5661603A JP 13724879 A JP13724879 A JP 13724879A JP 13724879 A JP13724879 A JP 13724879A JP S5661603 A JPS5661603 A JP S5661603A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electron beams
- deflecting
- deflected
- objective lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Abstract
PURPOSE: To obtain a dimensional measurement in high precision through simple constitution by providing a deflection system to subject electron beams to deflecting control in parallel with an optical center shaft of a device body between an objective lens and a sample face, thereby detecting SEM image.
CONSTITUTION: Electron beams from an electron gun 1 are deflected at a given angle by, for example, electrostatic diflecting plates 5a, 5b, deflected counter further to pass the center of an objective lens 3 and then deflected counter by an electrostatic deflecting plate 6a so as to be irradiated on a sample 4 in parallel with an optical center shaft of a device body. SEM image of the sample 4 according to a scanning of such electron beams is detected on a sensor 7 and displayed on CRT of a monitor 9 subjected to a deflection control voltage of a voltage generator 8. The deflection control voltage is detected on a voltmeter 10 and further displayed on a display 12 through a conversion circuit 11 functioning as a conversion table of deflecting amplitude of the electron beams. Thus a dimensional measurement in high precision is obtainable simply regardless of some vertical displacement of the sample 4.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13724879A JPS5661603A (en) | 1979-10-24 | 1979-10-24 | Dimension measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13724879A JPS5661603A (en) | 1979-10-24 | 1979-10-24 | Dimension measuring device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5661603A true JPS5661603A (en) | 1981-05-27 |
JPS6327641B2 JPS6327641B2 (en) | 1988-06-03 |
Family
ID=15194223
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13724879A Granted JPS5661603A (en) | 1979-10-24 | 1979-10-24 | Dimension measuring device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5661603A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012108324A (en) * | 2010-11-17 | 2012-06-07 | Ricoh Co Ltd | Surface charge distribution measuring method and surface charge distribution measuring apparatus |
JP2017022115A (en) * | 2015-07-14 | 2017-01-26 | アイシーティー インテグレーテッド サーキット テスティング ゲゼルシャフト フィーア ハルプライタープリーフテヒニック エム ベー ハー | Method for reducing frames and color aberration within charged particle beam device, and charged particle beam device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5424262A (en) * | 1977-07-26 | 1979-02-23 | Minoru Nakamura | Method of making metal granules |
-
1979
- 1979-10-24 JP JP13724879A patent/JPS5661603A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5424262A (en) * | 1977-07-26 | 1979-02-23 | Minoru Nakamura | Method of making metal granules |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012108324A (en) * | 2010-11-17 | 2012-06-07 | Ricoh Co Ltd | Surface charge distribution measuring method and surface charge distribution measuring apparatus |
JP2017022115A (en) * | 2015-07-14 | 2017-01-26 | アイシーティー インテグレーテッド サーキット テスティング ゲゼルシャフト フィーア ハルプライタープリーフテヒニック エム ベー ハー | Method for reducing frames and color aberration within charged particle beam device, and charged particle beam device |
Also Published As
Publication number | Publication date |
---|---|
JPS6327641B2 (en) | 1988-06-03 |
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