JPS5661018A - Manufacture of thin film magnetic head - Google Patents

Manufacture of thin film magnetic head

Info

Publication number
JPS5661018A
JPS5661018A JP13423279A JP13423279A JPS5661018A JP S5661018 A JPS5661018 A JP S5661018A JP 13423279 A JP13423279 A JP 13423279A JP 13423279 A JP13423279 A JP 13423279A JP S5661018 A JPS5661018 A JP S5661018A
Authority
JP
Japan
Prior art keywords
film
insulation
constitution
magnetic gap
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13423279A
Other languages
Japanese (ja)
Inventor
Masanobu Hanazono
Hiroshi Akiyama
Shinichi Hara
Hiroji Kawakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13423279A priority Critical patent/JPS5661018A/en
Publication of JPS5661018A publication Critical patent/JPS5661018A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Abstract

PURPOSE:To manufacture the high efficiency head which is short in the magnetic gap length, by using specific types of materials respectively as insulating film for the magnetic gap constitution and for others, and leaving the insulation film only for the gas constitution, in plasma etching. CONSTITUTION:On a substrate 1 providing a lower magnetic substance 2, a magnetic gap constituting insulation film 9 consisting of a film hardly etched with plasma of fluoride gas is provided, and conductor coils 13, 14, 15 and insulation films 10, 11, 12 made of Si3N4 are alternately laminated on the film 9, and the lower magnetic substance 2 is exposed by removing insulation films 9, 10, 11, 12 for the part shown in a symbol 7. Next, the core tip is plasma-etched to remove only the insulation films 10, 11, 12 and to leave the insulation film 9, then an upper magnetic substance 8 is formed on the entire upper side of the substrate 1 to constitute the thin film magnetic head having a magnetic gap length A.
JP13423279A 1979-10-19 1979-10-19 Manufacture of thin film magnetic head Pending JPS5661018A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13423279A JPS5661018A (en) 1979-10-19 1979-10-19 Manufacture of thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13423279A JPS5661018A (en) 1979-10-19 1979-10-19 Manufacture of thin film magnetic head

Publications (1)

Publication Number Publication Date
JPS5661018A true JPS5661018A (en) 1981-05-26

Family

ID=15123507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13423279A Pending JPS5661018A (en) 1979-10-19 1979-10-19 Manufacture of thin film magnetic head

Country Status (1)

Country Link
JP (1) JPS5661018A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4636901A (en) * 1982-02-05 1987-01-13 Hitachi, Ltd. Thin film magnetic head having magnetic layers of different thickness and manufacturing method therefor
US4636897A (en) * 1982-10-15 1987-01-13 Hitachi, Ltd. Perpendicular magnetic recording and reproducing thin film head
US4804816A (en) * 1981-12-21 1989-02-14 Kabushiki Kaisha Kenwood Method of making a thin-film magnetic head having a multi-layered coil structure
EP0348230A2 (en) * 1988-06-23 1989-12-27 Sharp Kabushiki Kaisha Process for producing thin film magnetic head
JPH0689413A (en) * 1992-06-19 1994-03-29 Hitachi Ltd Thin-film magnetic head
JPH06103525A (en) * 1992-06-19 1994-04-15 Hitachi Ltd Magnetic recording and reproducing device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4804816A (en) * 1981-12-21 1989-02-14 Kabushiki Kaisha Kenwood Method of making a thin-film magnetic head having a multi-layered coil structure
US4636901A (en) * 1982-02-05 1987-01-13 Hitachi, Ltd. Thin film magnetic head having magnetic layers of different thickness and manufacturing method therefor
USRE35490E (en) * 1982-02-05 1997-04-08 Hitachi, Ltd. Thin film magnetic head having magnetic layers of different thickness and manufacturing method therefor
US4636897A (en) * 1982-10-15 1987-01-13 Hitachi, Ltd. Perpendicular magnetic recording and reproducing thin film head
EP0348230A2 (en) * 1988-06-23 1989-12-27 Sharp Kabushiki Kaisha Process for producing thin film magnetic head
JPH0689413A (en) * 1992-06-19 1994-03-29 Hitachi Ltd Thin-film magnetic head
JPH06103525A (en) * 1992-06-19 1994-04-15 Hitachi Ltd Magnetic recording and reproducing device

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