JPS5650110A - Manufacture of finely powdered silicic acid of larger particle size - Google Patents
Manufacture of finely powdered silicic acid of larger particle sizeInfo
- Publication number
- JPS5650110A JPS5650110A JP12472479A JP12472479A JPS5650110A JP S5650110 A JPS5650110 A JP S5650110A JP 12472479 A JP12472479 A JP 12472479A JP 12472479 A JP12472479 A JP 12472479A JP S5650110 A JPS5650110 A JP S5650110A
- Authority
- JP
- Japan
- Prior art keywords
- particle size
- soln
- finely powdered
- powdered silicic
- silicic acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Silicon Compounds (AREA)
Abstract
PURPOSE: To manufacture finely powdered silicic acid of larger particle size useful mainly for polishing a semiconductor substrate by adding an acidic substance to an aqueous alkali silicate soln. contg. finely powdered silicic aicd as seed.
CONSTITUTION: To an aqeuous soln. contg. 0.5W1.0mol/l sodium silicate as Na2O concn. is added commercially-available finely-powdered silicic acid by 0.3W 1mol per 3l of the soln., and 0.5W2N hydrochloric acid, sulfuric acid, carbonic acid or the like is added at 0.2W1.0l/min per 3l of the aqueous sodium silicic soln. while keeping ≥70, especially 90W95°C constant temp. The resulting finely powdered silicic acid of larger particle size has 30W0.6m2/g specific surface area (0.1W5μ particle size), and it is mainly used to polish a semiconductor wafer after drying.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12472479A JPS5650110A (en) | 1979-09-29 | 1979-09-29 | Manufacture of finely powdered silicic acid of larger particle size |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12472479A JPS5650110A (en) | 1979-09-29 | 1979-09-29 | Manufacture of finely powdered silicic acid of larger particle size |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5650110A true JPS5650110A (en) | 1981-05-07 |
JPS6116732B2 JPS6116732B2 (en) | 1986-05-01 |
Family
ID=14892529
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12472479A Granted JPS5650110A (en) | 1979-09-29 | 1979-09-29 | Manufacture of finely powdered silicic acid of larger particle size |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5650110A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58111342U (en) * | 1982-01-22 | 1983-07-29 | 本田技研工業株式会社 | carburetor adjustment screw |
-
1979
- 1979-09-29 JP JP12472479A patent/JPS5650110A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58111342U (en) * | 1982-01-22 | 1983-07-29 | 本田技研工業株式会社 | carburetor adjustment screw |
JPS6218685Y2 (en) * | 1982-01-22 | 1987-05-13 |
Also Published As
Publication number | Publication date |
---|---|
JPS6116732B2 (en) | 1986-05-01 |
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