JPS5636024A - Measuring device for high-frequency modulated ray - Google Patents

Measuring device for high-frequency modulated ray

Info

Publication number
JPS5636024A
JPS5636024A JP11198479A JP11198479A JPS5636024A JP S5636024 A JPS5636024 A JP S5636024A JP 11198479 A JP11198479 A JP 11198479A JP 11198479 A JP11198479 A JP 11198479A JP S5636024 A JPS5636024 A JP S5636024A
Authority
JP
Japan
Prior art keywords
signal
ray
transduced
mixer
response
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11198479A
Other languages
Japanese (ja)
Inventor
Masashi Ozeki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11198479A priority Critical patent/JPS5636024A/en
Publication of JPS5636024A publication Critical patent/JPS5636024A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/10—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
    • G01J1/16—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void using electric radiation detectors
    • G01J1/1626—Arrangements with two photodetectors, the signals of which are compared

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)

Abstract

PURPOSE:To enable the detection of a minute response signal by lowering the frequencies of a reference ray signal and a response ray signal by the use of a mixer in measuring characteristics of semiconducting crystals. CONSTITUTION:When a high-frequency modulated ray is applied from the signal source 1 of a signal to an object 2 to be measured, the modulated ray generated at the object 2 is transduced into an electric signal by a photodetector 3, supplied to a mixer 5 after amplification 4 and mixed thereby with a signal from a high-frequency signal generator 20, thus a response signal being led out. Meanwhile, another high- frequency modulated ray from a beam splitter 11 is transduced into an electric signal by a photodetector 12, supplied to a mixer 14 after being amplified 13, and mixed thereby with the signal from the generator 20, thus a reference signal being led out. And, each signal whose frequency is transduced into the low is given to a lock-in amplifier 22 and subjected to phase detection and high-sensitivity amplification, and by the output therefrom a minute response ray can be measured with excellent S/N.
JP11198479A 1979-08-31 1979-08-31 Measuring device for high-frequency modulated ray Pending JPS5636024A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11198479A JPS5636024A (en) 1979-08-31 1979-08-31 Measuring device for high-frequency modulated ray

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11198479A JPS5636024A (en) 1979-08-31 1979-08-31 Measuring device for high-frequency modulated ray

Publications (1)

Publication Number Publication Date
JPS5636024A true JPS5636024A (en) 1981-04-09

Family

ID=14575028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11198479A Pending JPS5636024A (en) 1979-08-31 1979-08-31 Measuring device for high-frequency modulated ray

Country Status (1)

Country Link
JP (1) JPS5636024A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59122904A (en) * 1982-12-28 1984-07-16 Jeol Ltd Ion beam film thickness measuring device
JPS61205713U (en) * 1985-06-14 1986-12-25

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59122904A (en) * 1982-12-28 1984-07-16 Jeol Ltd Ion beam film thickness measuring device
JPS61205713U (en) * 1985-06-14 1986-12-25

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