JPS5624539A - Absolute pressure sensor - Google Patents
Absolute pressure sensorInfo
- Publication number
- JPS5624539A JPS5624539A JP9867779A JP9867779A JPS5624539A JP S5624539 A JPS5624539 A JP S5624539A JP 9867779 A JP9867779 A JP 9867779A JP 9867779 A JP9867779 A JP 9867779A JP S5624539 A JPS5624539 A JP S5624539A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- crystallized glass
- absolute pressure
- compact
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE: To make the construction of an absolute pressure sensor simple and compact and heighten its reliability, by utilizing a vacuum cell in which a part of the wall is made from a thin circular diaphragm of crystallized glass.
CONSTITUTION: The vacuum cell 10, in which a part of the wall is made from a thin circular diaphragm 12 of crystallized glass, is utilized. Since the diaphragm 12 is deflected depending on the relation between the pressure of a measured medium and vacuum, the absolute pressure can be detected. Because the diaphragm 12 of crystallized glass has prescribed strength against tension, compression and bending and airtightness is maintained even if the thickness of the diaphragm is made small, the diaphragm 12 can be caused to suffer from strain approximate to that for a diaphragm of metal. Because the diaphragm 12 has an electric insulating property, strain gauges, 20W23 do not need to be insulated. Temperature compensation is easy because the coefficient of thermal expansion of the crystallized glass can be freely selected by changing the degree of crystallization of the glass. This results in making constitution simple and compact and heightening reliability.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9867779A JPS5624539A (en) | 1979-08-03 | 1979-08-03 | Absolute pressure sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9867779A JPS5624539A (en) | 1979-08-03 | 1979-08-03 | Absolute pressure sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5624539A true JPS5624539A (en) | 1981-03-09 |
Family
ID=14226135
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9867779A Pending JPS5624539A (en) | 1979-08-03 | 1979-08-03 | Absolute pressure sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5624539A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS628029A (en) * | 1985-07-03 | 1987-01-16 | Tlv Co Ltd | Diaphragm of pressure gauge |
JPH03123476A (en) * | 1989-10-05 | 1991-05-27 | Amano Jitsugyo Kk | Antioxidation-treating equipment in treatment of gas |
-
1979
- 1979-08-03 JP JP9867779A patent/JPS5624539A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS628029A (en) * | 1985-07-03 | 1987-01-16 | Tlv Co Ltd | Diaphragm of pressure gauge |
JPH03123476A (en) * | 1989-10-05 | 1991-05-27 | Amano Jitsugyo Kk | Antioxidation-treating equipment in treatment of gas |
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