JPS56164583A - Manufacture of photosensitive semiconductor device - Google Patents
Manufacture of photosensitive semiconductor deviceInfo
- Publication number
- JPS56164583A JPS56164583A JP6863080A JP6863080A JPS56164583A JP S56164583 A JPS56164583 A JP S56164583A JP 6863080 A JP6863080 A JP 6863080A JP 6863080 A JP6863080 A JP 6863080A JP S56164583 A JPS56164583 A JP S56164583A
- Authority
- JP
- Japan
- Prior art keywords
- film
- al2o3
- transparent
- lattice type
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010408 film Substances 0.000 abstract 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 3
- 229910052593 corundum Inorganic materials 0.000 abstract 3
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 abstract 2
- 238000006243 chemical reaction Methods 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 229910021417 amorphous silicon Inorganic materials 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Abstract
PURPOSE:To contrive to improve the photoelectric conversion coefficient for the subject semiconductor device by a method wherein the metal film coated on a transparent insulated substrate is selectively anodic-oxidized and the metal film having a transparent film section is formed. CONSTITUTION:The Al film 8 of L thickness is evaporated on the transparent insulated substrate 1 and a lattice type resist mask is provided. An Al2O3 10 film of L thickness is obtained by having the Al film 8 anodic oxidated in a dilute sulfuric acid solution. When a mask 9 is removed, an Al2O3 11 and an Al 10 are arranged alternately and the difference in level of the two layers becomes 0.3- 0.5L or thereabouts making a gentle inclination from the Al 10 to Al2O3 11. Accordingly, no disconnection is generated on the transparent conductive film 2 formed on a lattice type electrode 11 and the film is formed thickly, thereby enabling to reduce electric resistance. Then amorphous Si 3-5 of P type dope, nondope and N type dope are laminated and an electrode is added, and a thin film solar battery with a lattice type electrode is now completed. Accordingly to this constitution, the device having a high photoelectric conversion coefficiency can be obtained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6863080A JPS56164583A (en) | 1980-05-22 | 1980-05-22 | Manufacture of photosensitive semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6863080A JPS56164583A (en) | 1980-05-22 | 1980-05-22 | Manufacture of photosensitive semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56164583A true JPS56164583A (en) | 1981-12-17 |
JPS6148798B2 JPS6148798B2 (en) | 1986-10-25 |
Family
ID=13379245
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6863080A Granted JPS56164583A (en) | 1980-05-22 | 1980-05-22 | Manufacture of photosensitive semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56164583A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5935491A (en) * | 1982-08-24 | 1984-02-27 | Sanyo Electric Co Ltd | Photo semiconductor device |
JPS6432814A (en) * | 1987-07-28 | 1989-02-02 | Nissan Motor | Armrest mount structure of seat for car |
JPH077174A (en) * | 1993-01-28 | 1995-01-10 | Gold Star Electron Co Ltd | Photodiode and preparation thereof |
US8110740B2 (en) * | 2005-08-10 | 2012-02-07 | Enplas Corporation | Photoelectrode substrate of dye sensitizing solar cell, and method for producing same |
WO2012030407A1 (en) * | 2010-09-03 | 2012-03-08 | Tetrasun, Inc. | Fine line metallization of photovoltaic devices by partial lift-off of optical coatings |
US9673341B2 (en) | 2015-05-08 | 2017-06-06 | Tetrasun, Inc. | Photovoltaic devices with fine-line metallization and methods for manufacture |
-
1980
- 1980-05-22 JP JP6863080A patent/JPS56164583A/en active Granted
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5935491A (en) * | 1982-08-24 | 1984-02-27 | Sanyo Electric Co Ltd | Photo semiconductor device |
JPS6432814A (en) * | 1987-07-28 | 1989-02-02 | Nissan Motor | Armrest mount structure of seat for car |
JPH077174A (en) * | 1993-01-28 | 1995-01-10 | Gold Star Electron Co Ltd | Photodiode and preparation thereof |
US8110740B2 (en) * | 2005-08-10 | 2012-02-07 | Enplas Corporation | Photoelectrode substrate of dye sensitizing solar cell, and method for producing same |
WO2012030407A1 (en) * | 2010-09-03 | 2012-03-08 | Tetrasun, Inc. | Fine line metallization of photovoltaic devices by partial lift-off of optical coatings |
US8236604B2 (en) | 2010-09-03 | 2012-08-07 | Tetrasun, Inc. | Fine line metallization of photovoltaic devices by partial lift-off of optical coatings |
AU2011282499B2 (en) * | 2010-09-03 | 2014-06-19 | Tetrasun, Inc. | Fine line metallization of photovoltaic devices by partial lift-off of optical coatings |
AU2014224095B2 (en) * | 2010-09-03 | 2016-11-17 | Tetrasun, Inc. | Fine line metallization of photovoltaic devices by partial lift-off of optical coatings |
US9673341B2 (en) | 2015-05-08 | 2017-06-06 | Tetrasun, Inc. | Photovoltaic devices with fine-line metallization and methods for manufacture |
Also Published As
Publication number | Publication date |
---|---|
JPS6148798B2 (en) | 1986-10-25 |
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