JPS5615040A - Mark detector - Google Patents

Mark detector

Info

Publication number
JPS5615040A
JPS5615040A JP8991179A JP8991179A JPS5615040A JP S5615040 A JPS5615040 A JP S5615040A JP 8991179 A JP8991179 A JP 8991179A JP 8991179 A JP8991179 A JP 8991179A JP S5615040 A JPS5615040 A JP S5615040A
Authority
JP
Japan
Prior art keywords
signal
reference voltage
converter
mark
mark detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8991179A
Other languages
Japanese (ja)
Inventor
Korehito Matsuda
Akinori Shibayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP8991179A priority Critical patent/JPS5615040A/en
Publication of JPS5615040A publication Critical patent/JPS5615040A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To detect an intersection with high reliability from a mark detection signal obtained by one beam scanning in a mark detector by detecting all the intersections between the mark detection signals and reference voltage and averaging these data. CONSTITUTION:A mark detection signal 12 is inputted to a comparator 15. A signal is fed to the controller 16 of a beam deflecting D/A converter every time the signal 12 exceeds the reference voltage 13 to latch the input value of the D/A converter. Simultaneously, pulses of number that exceeds the reference voltage 13 by the signal 12 are fed to a counter 18 for counting the pulses. Then, the input values Di of the respective D/A converters and the counted number Ni are applied to an arithmetic unit 19, which calculates the average of D'=(SIGMANiXDi)/SIGMANi (where i=1, 2,...,n). Here, n represents the number of steps of the D/A converter required for scanning the beam. The D' thus obtained is averaged to suppress the adverse effect of the noise to give reliable mark edge position thereto.
JP8991179A 1979-07-17 1979-07-17 Mark detector Pending JPS5615040A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8991179A JPS5615040A (en) 1979-07-17 1979-07-17 Mark detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8991179A JPS5615040A (en) 1979-07-17 1979-07-17 Mark detector

Publications (1)

Publication Number Publication Date
JPS5615040A true JPS5615040A (en) 1981-02-13

Family

ID=13983890

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8991179A Pending JPS5615040A (en) 1979-07-17 1979-07-17 Mark detector

Country Status (1)

Country Link
JP (1) JPS5615040A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57204126A (en) * 1981-06-10 1982-12-14 Hitachi Ltd Detecting method for position of mark in electron-ray exposing device
JPS5870554U (en) * 1981-11-09 1983-05-13 トヨタ自動車株式会社 damper pulley
JPS5914636A (en) * 1982-07-16 1984-01-25 Jeol Ltd Mark detection apparatus
JPS62183514A (en) * 1986-02-07 1987-08-11 Jeol Ltd Ion beam lithography equipment

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57204126A (en) * 1981-06-10 1982-12-14 Hitachi Ltd Detecting method for position of mark in electron-ray exposing device
JPS5870554U (en) * 1981-11-09 1983-05-13 トヨタ自動車株式会社 damper pulley
JPS5914636A (en) * 1982-07-16 1984-01-25 Jeol Ltd Mark detection apparatus
JPS634933B2 (en) * 1982-07-16 1988-02-01 Nippon Electron Optics Lab
JPS62183514A (en) * 1986-02-07 1987-08-11 Jeol Ltd Ion beam lithography equipment

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