JPS56149446U - - Google Patents
Info
- Publication number
- JPS56149446U JPS56149446U JP4813580U JP4813580U JPS56149446U JP S56149446 U JPS56149446 U JP S56149446U JP 4813580 U JP4813580 U JP 4813580U JP 4813580 U JP4813580 U JP 4813580U JP S56149446 U JPS56149446 U JP S56149446U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4813580U JPS56149446U (en) | 1980-04-08 | 1980-04-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4813580U JPS56149446U (en) | 1980-04-08 | 1980-04-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56149446U true JPS56149446U (en) | 1981-11-10 |
Family
ID=29643132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4813580U Pending JPS56149446U (en) | 1980-04-08 | 1980-04-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56149446U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63177034U (en) * | 1987-05-06 | 1988-11-16 | ||
| JPS63177031U (en) * | 1987-05-06 | 1988-11-16 | ||
| JPH0322533A (en) * | 1989-06-20 | 1991-01-30 | Nec Corp | Atomizing processor |
| JPH054468U (en) * | 1991-07-02 | 1993-01-22 | 山形日本電気株式会社 | Semiconductor wafer dehydrator |
| JP2006518096A (en) * | 2002-10-29 | 2006-08-03 | ノヴォ リサーチ インコーポレイテッド | Apparatus and method for cleaning semiconductor wafer surface using ozone |
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1980
- 1980-04-08 JP JP4813580U patent/JPS56149446U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63177034U (en) * | 1987-05-06 | 1988-11-16 | ||
| JPS63177031U (en) * | 1987-05-06 | 1988-11-16 | ||
| JPH0322533A (en) * | 1989-06-20 | 1991-01-30 | Nec Corp | Atomizing processor |
| JPH054468U (en) * | 1991-07-02 | 1993-01-22 | 山形日本電気株式会社 | Semiconductor wafer dehydrator |
| JP2006518096A (en) * | 2002-10-29 | 2006-08-03 | ノヴォ リサーチ インコーポレイテッド | Apparatus and method for cleaning semiconductor wafer surface using ozone |