JPS56120527A - Manufacturing apparatus for glass base material for optical fiber - Google Patents

Manufacturing apparatus for glass base material for optical fiber

Info

Publication number
JPS56120527A
JPS56120527A JP1959980A JP1959980A JPS56120527A JP S56120527 A JPS56120527 A JP S56120527A JP 1959980 A JP1959980 A JP 1959980A JP 1959980 A JP1959980 A JP 1959980A JP S56120527 A JPS56120527 A JP S56120527A
Authority
JP
Japan
Prior art keywords
concn
starting material
carrier gas
optical fiber
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1959980A
Other languages
Japanese (ja)
Other versions
JPS59457B2 (en
Inventor
Kazunori Senda
Ryozo Yamauchi
Suehiro Miyamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikura Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Fujikura Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikura Ltd, Nippon Telegraph and Telephone Corp filed Critical Fujikura Ltd
Priority to JP1959980A priority Critical patent/JPS59457B2/en
Publication of JPS56120527A publication Critical patent/JPS56120527A/en
Publication of JPS59457B2 publication Critical patent/JPS59457B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
    • C23C16/4482—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material by bubbling of carrier gas through liquid source material
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/86—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid by bubbling a gas through the liquid
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/87—Controlling the temperature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Abstract

PURPOSE:To obtain an optical fiber with stable characteristics by providing the titled apparatus with a controller for controlling the temp. of a starting material holding container in accordance with the detected value of the concn. of gaseous starting material in a carrier gas. CONSTITUTION:Liq. starting material 14 held in bubbler 17 is bubbled with carrier gas 15 fed at a flow rate controlled by mass flow controller 12 to allow the gaseous starting material to be contained in gas 15, and the gas is supplied to a reaction section, where vitrification is carried out to manufacture a glass base material for an optical fiber. In this apparatus concn. detector 61 for detecting the concn. of the gaseous starting material in carrier gas 16 is attached to the pass for carrier gas 16, and the apparatus is further provided with controller 64 for controlling the temp. of bubbler 17 in accordance with the detected concn. signal of detector 61. Thus, carrier gas 16 of stable concn. can be supplied to the reaction section at a stable flow rate.
JP1959980A 1980-02-19 1980-02-19 Manufacturing equipment for glass base material for optical fibers Expired JPS59457B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1959980A JPS59457B2 (en) 1980-02-19 1980-02-19 Manufacturing equipment for glass base material for optical fibers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1959980A JPS59457B2 (en) 1980-02-19 1980-02-19 Manufacturing equipment for glass base material for optical fibers

Publications (2)

Publication Number Publication Date
JPS56120527A true JPS56120527A (en) 1981-09-21
JPS59457B2 JPS59457B2 (en) 1984-01-06

Family

ID=12003681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1959980A Expired JPS59457B2 (en) 1980-02-19 1980-02-19 Manufacturing equipment for glass base material for optical fibers

Country Status (1)

Country Link
JP (1) JPS59457B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2233603A1 (en) * 2009-03-27 2010-09-29 Rohm and Haas Electronic Materials, L.L.C. Method and apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2233603A1 (en) * 2009-03-27 2010-09-29 Rohm and Haas Electronic Materials, L.L.C. Method and apparatus
CN101962757A (en) * 2009-03-27 2011-02-02 罗门哈斯电子材料有限公司 Film forming method and apparatus on base material
US8501266B2 (en) 2009-03-27 2013-08-06 Rohm And Haas Electronics Materials Llc Method and apparatus
US10060030B2 (en) 2009-03-27 2018-08-28 Ceres Technologies, Inc. Evaporation vessel apparatus and method

Also Published As

Publication number Publication date
JPS59457B2 (en) 1984-01-06

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